JPH06244159A - Light-excited gas reactor - Google Patents

Abstract

PURPOSE:To prevent an object to the treated from being damaged by the irradiation with exciting light by providing light intercepting means between a process for exciting a gas light and another process for carrying the excited gas and between the process for carrying the excited gas and a process for causing the excited gas to react with the object to be treated. CONSTITUTION:A gaseous starting material which is excited by ultraviolet rays from a light source 3 composed of low-pressure mercury discharge lamps is introduced through a feed tube 1 into a light-exciting chamber 2 made of quartz glass, etc., which transmits ultraviolet rays and excited by the ultraviolet rays from the light source 3. The excited active gas is supplied to the surface of an object 7 to be treated through a gas passing hole 6 formed in a plate of opaque material such as aluminum. The hole 6 does not transmit light, because the hole 6 has a meandering structure. When electric test is performed on the object 7 to be treated of a test piece such as a semiconductor device after removing a resist from the surface of the object 7 by using ozone as a reactive gas, no such variation in the electric quantity that indicate a damage is recognized. When a transparent quartz plate is used instead of the aluminum plate 5, however, the variation is recognized.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is particularly applicable to the case where an active gas excited by light is reacted with an object to be removed and a substance synthesized by light is generated on the object to be treated, particularly to a semiconductor. The present invention relates to a photoexcited gas reaction device suitable for removing organic substances and inorganic substances such as unnecessary resist on a wafer in a device manufacturing process, dry cleaning of a wafer, cleaning of a liquid crystal substrate and resist removal.

[0002]

2. Description of the Related Art In a conventional photoexcitation process, as shown in, for example, U.S. Pat. No. 4,885,047, an excitation light is directly irradiated onto an object to be processed. Therefore, depending on the process of manufacturing the object to be processed or the type of the object to be processed, the energy of the applied ultraviolet rays may damage the object to be processed.

[0003]

The problem to be solved by the present invention is to prevent damage to the object to be processed by the irradiation of excitation light.

[0004]

In order to solve the above-mentioned problems, the present invention is provided between a process of exciting a gas by light, a process of transporting the excited gas, and a process of reacting the excited gas with an object to be processed. This is achieved by providing means for blocking the light.

[0005]

The reaction gas is excited by irradiating the gas flowing in the light transmitting container with light or flowing the gas around the light source. The excited active gas is introduced into the processing chamber containing the object to be processed through the transportation process. Excitation light bends the transportation process of the excitation gas and forms a shield with a material that does not transmit light to prevent the light from reaching the surface of the object to be treated, so that the object to be treated is damaged by light energy. Can be eliminated.

[0006]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS First, in the apparatus shown in FIG. 1, the light source 3 represents an ultraviolet light source, specifically, a low pressure mercury discharge lamp. The raw material gas for the reaction is introduced by a supply pipe 1 into a photoexcitation tank 2 made of quartz glass or the like that transmits ultraviolet rays and excited by a light source 3. The excited active gas does not transmit light,
For example, it is supplied to the surface of the object 7 to be processed through gas passage holes 6 provided in the aluminum plate 5. Since the gas passage hole 6 has a meandering structure, it does not transmit light.
A test element of a semiconductor device was placed as the object to be processed 7, and the electrical test result after removing the resist on the object to be processed 7 by using ozone as a reaction gas showed no change in the amount of electricity indicating damage. ..

Here, when the above-mentioned aluminum plate 5 was replaced with transparent quartz which is transparent to ultraviolet rays and a similar electrical test was conducted, a change in the amount of electricity showing damage was found.

Another embodiment will be described with reference to FIG. A glass tube 14 for passing gas is provided outside the light source 3, a raw material gas is introduced from a supply tube 11, and a gas is excited in a photoexcitation tank 12 between the light source 13 and the glass tube 14 to form a bent gas passage tube 16. It is supplied to the surface of the object 7 to be processed. Since the metal plate 15 that does not transmit light is arranged between the light source 3 and the object to be processed 7, the excitation light does not reach the object to be processed 7.

FIG. 3 shows another embodiment of the relationship between the light source 23 and the photoexcitation tank 22. The photoexcitation tank 22 is composed of a double quartz tube. The light source 3 has a replaceable structure. The gas passage pipe 26 is, for example, as shown in FIG.
As shown in FIG. 3, a plate that guides the surface of the object to be processed 7 and does not transmit light is arranged between the object to be processed 7 and the light source 3.

FIG. 4 shows another embodiment of the light source 33.
The outer periphery is used as an excitation tank 32, and the excitation gas is supplied to the surface of the object to be processed 37 from a slit-shaped outlet through a slit-shaped gas passage pipe 36. Since the gas passage tube 36 is made of a metal material that does not transmit light, the light of the light source 33 does not reach the surface of the object to be processed 7.

When the inorganic material on the object to be treated is removed as a halogen compound having a high vapor pressure by the method of generating active fluorine and chlorine atoms which include fluorine and chlorine in the source gas of the excitation gas and are decomposed and excited by ultraviolet rays, or The present invention can also be applied to so-called photo-CVD or the like in which a silicon compound is photolyzed and silicon and oxygen are reacted to form a silicon oxide film.

[0012]

According to the present invention, the photoexcited reaction is carried out without directly irradiating the surface of the object to be treated with light, so that the photoexcited gas reaction without damaging the object to be treated due to the high energy irradiation of light can be performed. it can.

[Brief description of drawings]

FIG. 1 is an explanatory diagram of an embodiment of the present invention.

FIG. 2 is an explanatory diagram of a second embodiment of the present invention.

FIG. 3 is an explanatory diagram of a third embodiment of the present invention.

FIG. 4 is an explanatory diagram of a fourth embodiment of the present invention.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Gas supply pipe, 2 ... Photoexcitation tank, 3 ... Light source, 5 ... Light-shielding plate, 6 ... Gas passage hole, 7 ... Processing object.

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁵ Identification number Office reference number FI technical display location H01L 21/027 21/31 B // H01L 21/304 341 D 8832-4M

Claims (2)

[Claims] 1. A means for exciting a gas by a light source, a means for transporting the excited gas, and a means for reacting the excited gas with an object to be processed, and means for blocking light between the light source and the object to be processed. A photoexcited gas reaction device provided. 2. The photoexcited gas reaction device according to claim 1, wherein the means for exciting the gas is such that the light source emits ultraviolet light, and the boundary between the gas and the light source part is made of a material having an excellent ultraviolet transmittance.