JPH06203658A - Coating solution for stranparent conductive film formation - Google Patents

Coating solution for stranparent conductive film formation

Info

Publication number
JPH06203658A
JPH06203658A JP36074992A JP36074992A JPH06203658A JP H06203658 A JPH06203658 A JP H06203658A JP 36074992 A JP36074992 A JP 36074992A JP 36074992 A JP36074992 A JP 36074992A JP H06203658 A JPH06203658 A JP H06203658A
Authority
JP
Japan
Prior art keywords
conductive film
coating liquid
transparent conductive
coating
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP36074992A
Other languages
Japanese (ja)
Other versions
JP3338966B2 (en
Inventor
Masaya Yukinobu
雅也 行延
Shiro Tsunoda
志郎 角田
Keiichi Orita
桂一 折田
Keiju Koizumi
啓寿 小泉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Metal Mining Co Ltd
Tohoku Chemical Industries Ltd
Original Assignee
Sumitomo Metal Mining Co Ltd
Tohoku Chemical Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Metal Mining Co Ltd, Tohoku Chemical Industries Ltd filed Critical Sumitomo Metal Mining Co Ltd
Priority to JP36074992A priority Critical patent/JP3338966B2/en
Publication of JPH06203658A publication Critical patent/JPH06203658A/en
Application granted granted Critical
Publication of JP3338966B2 publication Critical patent/JP3338966B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Abstract

PURPOSE:To provide a coating solution for transparent conductive film formation which has high viscosity and low resistance. CONSTITUTION:AcAcIn and organic Sn are dissolved in phenol-2 basic acid and/or phenol benzyl acetate, and hydroxypropyl cellulose is added to this system to give viscosity. By the addition quantity of hydroxypropyl cellulose is not more than 5wt.%, a coating solution for transparent conductive film formation having high viscosity and low resistance is provided. Since the addition quantity of the cellulose is low, this solution is easily thermally decomposed at baking, and a good transparent conductive film can be formed.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、透明導電膜形成用塗布
液に関する。さらに詳しくは、ガラス,セラミックス等
の基板上に塗布して透明な導電性膜の形成に適した塗布
液に関する。
FIELD OF THE INVENTION The present invention relates to a coating liquid for forming a transparent conductive film. More specifically, it relates to a coating solution suitable for forming a transparent conductive film by coating on a substrate such as glass or ceramics.

【0002】[0002]

【従来の技術】透明導電膜は、例えば液晶ディスプレイ
などの表示管,タッチパネル,太陽電池などの透明電
極,冷凍ショーケースなどの窓の防雲、あるいは水着防
止用透明発熱体、さらに赤外線反射膜,帯電防止に用い
られる。
2. Description of the Related Art A transparent conductive film is, for example, a display tube such as a liquid crystal display, a touch panel, a transparent electrode such as a solar cell, cloud protection for windows such as a freezer showcase, or a transparent heating element for swimsuit prevention, an infrared reflection film, Used for antistatic.

【0003】このような目的に用いる透明導電膜とし
て、有機又は無機金属化合物の溶液を基板に塗布し、加
熱焼成することによって導電膜を形成する方法が知られ
ている。この方法は、溶液の塗布に、印刷法を用いる
と、パターン印刷,乾燥,焼成という簡単な工程で実現
でき、基板上に任意の形状の導電膜を大面積に形成する
ことが可能である。
As a transparent conductive film used for such a purpose, there is known a method of forming a conductive film by applying a solution of an organic or inorganic metal compound onto a substrate and baking the solution. If a printing method is used for applying the solution, this method can be realized by simple steps of pattern printing, drying, and baking, and a conductive film having an arbitrary shape can be formed over a large area on a substrate.

【0004】[0004]

【発明が解決しようとする課題】この方法に用いる塗布
液として、例えば、硝酸インジウム,有機錫化合物,ヘ
キシレングリコール,酢酸及び/又は無水酢酸を含有す
る透明な導電性膜形成用塗布液(特開平4−25576
8号公報参照)がある。この塗布液は、粘度が50〜1
00cpsであり、100〜200cpsを必要とする
フレキソ印刷、あるいは50〜100cpsを必要とす
るスピンコート,グラビア印刷を用いた製膜は可能であ
るが、塗布粘度50,000〜300,000cpを必
要とする平版印刷,10,000〜80,000cpを
必要とする凸版印刷,500〜1,000cpを必要と
するスクリーン印刷によって製膜することができない。
As a coating liquid used in this method, for example, a coating liquid for forming a transparent conductive film containing indium nitrate, an organic tin compound, hexylene glycol, acetic acid and / or acetic anhydride (special Kaihei 4-25576
8). This coating solution has a viscosity of 50 to 1
00cps, flexo printing requiring 100 to 200cps, or spin coating or gravure printing requiring 50 to 100cps is possible, but a coating viscosity of 50,000 to 300,000cp is required. It is not possible to form a film by lithographic printing, which requires 10,000 to 80,000 cp, letterpress printing, and screen printing which requires 500 to 1,000 cp.

【0005】また、特公昭63−25448号公報に
は、インジウム化合物に、抵抗値調整用として錫化合物
と、粘性剤としてニトロセルロースと、溶媒としてブチ
ルソルブ,ブチルカルビトール,ベンジルアセテート及
びジメチルフタレートの混合溶媒とを添加して得られる
高粘度の透明導電性被膜形成用ペーストが開示されてい
る。このペーストは、スクリーン印刷性と寿命特性を改
善するため、ニトロセルロースをよく溶解するセルソル
ブ、あるいはカルビトール類を使用したものであるが、
粘性剤の添加量が13〜17重量%と高く、このため焼
成時に熱分解性が悪くなり、形成される膜の導電性、あ
るいは透明性が低下するという欠点がある。
In Japanese Patent Publication No. 63-25448, a mixture of an indium compound, a tin compound for adjusting a resistance value, nitrocellulose as a viscous agent, and butyl sorb, butyl carbitol, benzyl acetate and dimethyl phthalate as a solvent. A high-viscosity transparent conductive film-forming paste obtained by adding a solvent is disclosed. This paste uses cellosolve, which dissolves nitrocellulose well, or carbitols, in order to improve screen printability and life characteristics.
The addition amount of the viscous agent is as high as 13 to 17% by weight, and therefore, there is a drawback that the thermal decomposability is deteriorated during firing and the conductivity or transparency of the formed film is lowered.

【0006】本発明の目的は、少なくともスクリーン印
刷による製膜が可能な高粘度特性を有し、塗布膜が良好
な導電性を示し、機械的強度,光透過性に優れ、面内バ
ラツキが小さい透明導電膜形成用塗布液を提供すること
にある。
An object of the present invention is to have at least high viscosity characteristics capable of forming a film by screen printing, the coating film exhibits good conductivity, excellent mechanical strength and light transmittance, and small in-plane variation. It is to provide a coating liquid for forming a transparent conductive film.

【0007】[0007]

【課題を解決するための手段】上記目的を達成するた
め、本発明による透明導電膜形成用塗布液においては、
アセチルアセトンインジウムと、有機錫とを溶剤中に溶
解させ、粘性剤を添加した透明導電膜形成用塗布液であ
って、溶剤は、アルキルフェノール及び/又はアルケニ
ルフェノールと、二塩基性酸エステル及び/又は酢酸ベ
ンジルであり、粘性剤は、ヒドロキシプロピルセルロー
スであり、その添加量は、5重量%以下である。
In order to achieve the above object, in the coating liquid for forming a transparent conductive film according to the present invention,
A coating liquid for forming a transparent conductive film, which is prepared by dissolving acetylacetone indium and organic tin in a solvent and adding a viscous agent, wherein the solvent is alkylphenol and / or alkenylphenol, dibasic acid ester and / or acetic acid. It is benzyl, the viscous agent is hydroxypropyl cellulose, and the amount added is 5% by weight or less.

【0008】また、アセチルアセトンインジウムと、有
機錫との含有量は、7重量%〜40重量%である。
The content of acetylacetone indium and organic tin is 7% by weight to 40% by weight.

【0009】また、有機錫は、アセチルアセトン錫であ
る。
The organic tin is acetylacetone tin.

【0010】また、アルキルフェノール及び/又はアル
ケニルフェノールの添加量は40重量%以下である。
The addition amount of alkylphenol and / or alkenylphenol is 40% by weight or less.

【0011】また、さらに希釈剤を含み、希釈剤は、塗
布液の粘度を低下させる有機溶剤である。
Further, a diluent is further included, and the diluent is an organic solvent that reduces the viscosity of the coating liquid.

【0012】[0012]

【作用】アセチルアセトンインジウム(AcAcIn)
は、一般式
[Function] Acetylacetone indium (AcAcIn)
Is the general formula

【式1】 で示される化合物である。有機錫には、特にアセチルア
セトン錫が好ましい。
[Formula 1] Is a compound represented by. Acetylacetone tin is particularly preferable as the organic tin.

【0013】ヒドロキシプロピルセルロースは、一般式Hydroxypropyl cellulose has the general formula

【式2】 で示される化合物である。[Formula 2] Is a compound represented by.

【0014】アルキルフェノール及び/又はアルケニル
フェノールとしては、クレゾール類,パラターシャリィ
ーブチルフェノール,オクチルフェノール,ノニルフェ
ノール及びカシューナット殻液[3ペンタデカデシール
フェノール]を挙げることができる。
Examples of alkylphenols and / or alkenylphenols include cresols, paratertiarybutylphenol, octylphenol, nonylphenol and cashew nut shell liquid [3 pentadecadedecylphenol].

【0015】二塩基性酸エステルは、一般式The dibasic acid ester has the general formula

【式3】 で示される化合物である。[Formula 3] Is a compound represented by.

【0016】特に、高沸点溶剤(蒸留範囲196〜22
5℃)であるグルタル酸
In particular, high boiling solvents (distillation range 196-22
5 ° C) glutaric acid

【式4】 が好ましい。[Formula 4] Is preferred.

【0017】発明者らは、アルキルフェノール及び/又
はアルケニルフェノールと二塩基性エステルとの混合溶
剤あるいは、アルキルフェノール及び/又はアルケニル
フェノールと酢酸ベンジルとの混合溶剤は、アセチルア
セトンインジウムと有機錫とを非常に良く溶解し、且つ
これらの混合溶剤にヒドロキシプロピルセルロースを加
えると、ヒドロキシプロピルセルロースの添加量が5重
量%以下の範囲で粘度が高くなることを見い出した。そ
して、また、このセルロースの添加量が少ないことから
塗布後の焼成時には容易に熱分解する。このため透明性
が良く、導電性の高い膜が得られる。
The inventors of the present invention have found that a mixed solvent of alkylphenol and / or alkenylphenol and a dibasic ester or a mixed solvent of alkylphenol and / or alkenylphenol and benzyl acetate is very effective in mixing acetylacetone indium and organotin. It has been found that, when dissolved and added with hydroxypropyl cellulose to these mixed solvents, the viscosity increases in the range where the amount of hydroxypropyl cellulose added is 5% by weight or less. Further, since the addition amount of this cellulose is small, it is easily pyrolyzed at the time of baking after coating. Therefore, a film having good transparency and high conductivity can be obtained.

【0018】本発明による塗布液は、上記各成分を含有
してなる透明で均一な溶液である。係る溶液は、例えば
これらの成分を60〜200℃の下で0.5〜12時間
撹拌することにより得られる。
The coating solution according to the present invention is a transparent and uniform solution containing the above components. Such a solution is obtained, for example, by stirring these components at 60 to 200 ° C. for 0.5 to 12 hours.

【0019】表1にパラターシャリィーブチルフェノー
ルと、ヒドロキシプロピルセルロースの変量試験結果に
ついて示す。
Table 1 shows the results of the variation test of paratertiary butylphenol and hydroxypropyl cellulose.

【0020】[0020]

【表1】 [Table 1]

【0021】表2にフェノール類の相違による塗布液の
到達飽和粘度について示す。
Table 2 shows the ultimate saturation viscosities of the coating solutions due to the difference in phenols.

【0022】[0022]

【表2】 AcAcIn 11.4 AcAcSn 0.6 ヒドロキシプロピルセルロース y フェノール誘導体 20.0 DBE 68−y 製造条件 120℃×3hrs[Table 2] AcAcIn 11.4 AcAcSn 0.6 Hydroxypropyl cellulose y Phenol derivative 20.0 DBE 68-y Manufacturing conditions 120 ° C. × 3 hrs

【0023】本発明によって得られる塗布液の粘度は、
粘性剤であるヒドロキシプロピルセルロースの添加量が
5重量%以下の小量であるにもかかわらず、フェノール
類との組合せによって120k〜300kcps/25
℃のような高粘度にまで達するのは、ヒドロキシプロピ
ルセルロースとフェノール類との間に少量存在する−C
2OH,−CHO,ベンゼン核のフェノール性OH基
とが化学的な反応を生じることによるものと思われる。
The viscosity of the coating liquid obtained by the present invention is
Even though the amount of hydroxypropyl cellulose, which is a viscous agent, is a small amount of 5% by weight or less, it is 120 k to 300 kcps / 25 when combined with phenols.
There is a small amount of -C present between hydroxypropyl cellulose and phenols, which reaches a viscosity as high as C.
This is probably because H 2 OH, —CHO, and the phenolic OH group of the benzene nucleus cause a chemical reaction.

【0024】フェノール類が40重量%以上に過剰に加
えられたり、ヒドロキシプロピルセルロースが5重量%
以上過剰に加えられると膜特性が劣るようになる。この
理由は、相互間で架橋反応によるゲル状物が生じ、印刷
などの方法でガラス基板上に塗布し、400℃〜620
℃で焼成した際に、ゲル状物焼却跡が比較的粗大で不均
質なボイドを形成するため、光の乱反射を生じて光学特
性が劣るからであると思われる。
Phenols are added in excess of 40% by weight, and hydroxypropyl cellulose is 5% by weight.
If it is added excessively, the film characteristics will be deteriorated. The reason for this is that a gel-like substance is generated due to a cross-linking reaction between them, and the gel-like substance is applied onto a glass substrate by a method such as printing, and the temperature is 400 ° C.
It is considered that this is because when burned at ℃, the incineration trace of the gel-like material forms a relatively coarse and inhomogeneous void, which causes diffuse reflection of light and deteriorates the optical characteristics.

【0025】上記成分配合によって得られる本発明の透
明導電膜形成用塗布液は、少なくともスクリーン印刷に
要求される粘度以上の印刷法に好適な高粘度のものが得
られる。
The coating liquid for forming a transparent conductive film of the present invention obtained by blending the above components has a high viscosity suitable for a printing method of at least the viscosity required for screen printing.

【0026】塗布液の粘度に関し、スクリーン印刷の場
合には、塗布液の粘度が200cps/25℃のように
低粘度になると、塗布液返しの際に、塗布液が網目の間
から裏側に廻り込んで印刷不良となるフローダウン現象
が生じ、膜厚が厚くなる。参考までに表3に、エチルセ
ルロース[N200]を用いた場合の塗布液粘度を示
す。エチルセルロース[N200]を用いたときの塗布
液の粘度は、ヒドロキシプロピルセルロースを用いた場
合の大略1/100以下である。
Regarding the viscosity of the coating liquid, in the case of screen printing, when the viscosity of the coating liquid becomes as low as 200 cps / 25 ° C., when the coating liquid is returned, the coating liquid spills from between the meshes to the back side. A flow-down phenomenon occurs, which causes printing failure due to a complicated print, resulting in an increase in film thickness. For reference, Table 3 shows the viscosity of the coating liquid when ethyl cellulose [N200] was used. The viscosity of the coating liquid when ethyl cellulose [N200] is used is about 1/100 or less of that when hydroxypropyl cellulose is used.

【0027】[0027]

【表3】 [Table 3]

【0028】本発明は、ヒドロキシプロピルセルロース
とフェノール類との化学的反応に基づき、ヒドロキシプ
ロピルセルロースの添加量が比較的少ないにもかかわら
ず、高粘度塗布液が得られることから、スクリーン印
刷、のように塗布液に高粘度を要する印刷法を用いて基
板上に任意の形状の繊細で微細な透明導電膜パターンを
形成できる。
The present invention is based on a chemical reaction between hydroxypropyl cellulose and phenols, and a high-viscosity coating liquid can be obtained even though the amount of hydroxypropyl cellulose added is relatively small. As described above, a delicate and fine transparent conductive film pattern having an arbitrary shape can be formed on a substrate by using a printing method in which the coating liquid requires high viscosity.

【0029】しかも、本発明によって得られる塗布液
は、基板に対する漏れ性も申し分なく、使用されている
溶剤が高沸点で蒸発速度が遅いことから、塗布作業中の
粘度安定性及び塗布後のレベリング性が良好であり、従
って膜厚や屈曲率などの面内バラツキが非常に小さい透
明導電膜が得られる。
In addition, the coating solution obtained by the present invention has a satisfactory leak property to the substrate, and since the solvent used has a high boiling point and a slow evaporation rate, the viscosity stability during coating operation and the leveling after coating are achieved. Therefore, a transparent conductive film having excellent properties and therefore having very small in-plane variations such as film thickness and bending rate can be obtained.

【0030】塗布膜の乾燥は、一般に塗布液が塗布され
た基板を80〜160℃の温度下に10〜60分保持す
ることにより行われ、塗布膜の焼成は、乾燥した塗布基
板を焼成炉に入れ、400〜620℃に昇温することに
より行われる。
The coating film is generally dried by holding the substrate coated with the coating solution at a temperature of 80 to 160 ° C. for 10 to 60 minutes, and the coating film is baked by baking the dried coating substrate in a baking furnace. And the temperature is raised to 400 to 620 ° C.

【0031】図1に、塗布液中のAcAcIn+AcA
cSnの含有量と膜特性としてのシート抵抗値(R),
全光線透過率(LT)及びヘイズ値(H)との関係を示
した。図1により、(AcAcIn+AcAcSn)量
が6%以下の場合には、シート抵抗値が低くならず、7
%以上であることが好ましいことが判る。また、実用的
な上限は40%である。なお、成分配合,製造条件は、
図中に示したとおりである。
FIG. 1 shows AcAcIn + AcA in the coating solution.
cSn content and sheet resistance (R) as film characteristics,
The relationship between the total light transmittance (LT) and the haze value (H) is shown. According to FIG. 1, when the amount of (AcAcIn + AcAcSn) is 6% or less, the sheet resistance value does not decrease, and
It can be seen that it is preferably at least%. The practical upper limit is 40%. The composition and manufacturing conditions are
It is as shown in the figure.

【0032】AcAcInは、溶剤に対する溶解性に限
界があるのは、過剰に加えられると不均質に分散した状
態で存在する未溶解部分が焼成膜中のIn/Sn濃度を
不均一にするため、光学特性が劣ることになるものと思
われる。
AcAcIn has a limited solubility in a solvent. When it is added in excess, the undissolved portion existing in a non-uniformly dispersed state makes the In / Sn concentration in the fired film non-uniform. It seems that the optical characteristics will be inferior.

【0033】図2に印刷焼成膜の(AcAcSn/Ac
AcIn+AcAcSn)×100%と膜特性について
示した。AcAcSn量の増加に伴い、膜は、青色に着
色し、その度合いを増す。AcAcSn量と共に光学特
性が低下するのはこの着色に起因する。成分配合並びに
製造条件は図中に示した。
FIG. 2 shows (AcAcSn / Ac of the printed and baked film).
The film characteristics are shown as AcIn + AcAcSn) × 100%. With an increase in the amount of AcAcSn, the film is colored blue, and the degree thereof is increased. It is due to this coloring that the optical characteristics decrease with the amount of AcAcSn. The composition of ingredients and manufacturing conditions are shown in the figure.

【0034】図2により、AcAcSn量としては、5
重量%が最適であり、AcAcSn以外の有機錫に同様
の傾向を示す。表4に、塗布液の材料構成の相違と焼成
膜特性との関係について示す。表4においては、ヒドロ
キシプロピルセルロース及び/あるいはパラターシャリ
ィーブチルフェノールが少ない程、焼成膜の導電特性が
優れる傾向を示している。
From FIG. 2, the AcAcSn amount is 5
The weight% is optimum, and shows the same tendency as organotin other than AcAcSn. Table 4 shows the relationship between the difference in the material composition of the coating liquid and the characteristics of the baked film. Table 4 shows that the smaller the amount of hydroxypropylcellulose and / or paratertiarybutylphenol, the better the conductive properties of the fired film.

【0035】[0035]

【表4】 [Table 4]

【0036】さらに、焼成温度の膜特性に及ぼす影響を
図3に示す。図3は、図中に示す配合の試料1,2につ
いて、焼成温度400〜600℃の範囲の膜特性を示し
たものである。図3より、膜特性は、高温焼成の程、膜
特性に優れることが分かる。
Further, FIG. 3 shows the influence of the baking temperature on the film characteristics. FIG. 3 shows the film characteristics of the samples 1 and 2 having the formulations shown in the figure in the range of a firing temperature of 400 to 600 ° C. It can be seen from FIG. 3 that the higher the temperature of the film, the better the film characteristics.

【0037】本発明により得られた導電膜形成用塗布液
の塗布方法は特に限定されず、浸漬法,スピンコート
法,印刷法など、従来公知の方法がいずれも可能であ
る。
The coating method of the coating liquid for forming a conductive film obtained by the present invention is not particularly limited, and any conventionally known method such as dipping method, spin coating method and printing method can be used.

【0038】本発明の塗布液は減粘が可能である。例え
ばイソホロン,アセチルアセトン,ターピネオール,エ
チレンブラシレート,酢酸ブチルシクロヘキシルなどの
有機溶剤を単独及び/又は混合し、これを希釈剤として
適宜添加するとよい。これによって、スピンコート,ス
プレーコート,バーコート及びブレードコートを製膜で
きる。
The coating solution of the present invention can be reduced in viscosity. For example, organic solvents such as isophorone, acetylacetone, terpineol, ethylene brushlate, and butylcyclohexyl acetate may be used alone and / or mixed, and this may be appropriately added as a diluent. Thereby, spin coating, spray coating, bar coating and blade coating can be formed.

【0039】[0039]

【実施例】以下実施例により本発明を詳細に説明する
が、本発明はこれらの実施例により何ら制約されるもの
ではない。
EXAMPLES The present invention will be described in detail below with reference to examples, but the present invention is not limited to these examples.

【0040】(実施例1)二塩基性酸エステルとして、
64grの高沸点溶剤(DBE(デュポンジャパン社
製))に、20grのパラターシャリィーブチルフェノ
ールを加えて10分間室温で撹拌しながら溶解した。次
いで4grのヒドロキシプロピルセルロースを加え、6
0℃で1時間撹拌しながら溶解し、粘稠液を得た。この
粘稠液に0.6grのAcAcSnと最後に11.4g
rのAcAcInを加えて撹拌しながら160℃に昇温
し、そのまま1時間保持した。まだ熱いうちに500m
eshスクリーンを使用し、吸引濾過して80kcps
/25℃の導電膜形成用塗布液を得た。
Example 1 As a dibasic acid ester,
To 64 gr of a high boiling solvent (DBE (manufactured by DuPont Japan)), 20 gr of paratertiarybutylphenol was added and dissolved while stirring at room temperature for 10 minutes. Then add 4 gr of hydroxypropyl cellulose and add 6
It melt | dissolved, stirring at 0 degreeC for 1 hour, and the viscous liquid was obtained. Add 0.6 gr of AcAcSn and finally 11.4 g to this viscous liquid.
rAcAcIn of r was added, the temperature was raised to 160 ° C. with stirring, and the temperature was maintained for 1 hour. 500m while still hot
80 kcps using esh screen with suction filtration
A coating liquid for forming a conductive film of / 25 ° C. was obtained.

【0041】100,150,200,250,270
及び300meshのマスクにより、窓ガラスなどとし
て汎用の青板ガラス(厚さ3mm)を10cm角に切っ
た基板上に、得られた塗布液を5cm角にスクリーン印
刷した。
100, 150, 200, 250, 270
And a mask of 300 mesh, the obtained coating solution was screen-printed in a 5 cm square on a substrate obtained by cutting a general-purpose blue plate glass (thickness: 3 mm) into a 10 cm square as a window glass or the like.

【0042】120℃で10分間乾燥後焼成炉に入れ、
室温から500℃まで約80分を掛けて昇温し、そのま
ま10分間保持した。次いで30分後炉温が300℃以
下になったところで取り出し、導電膜を得た。
After drying at 120 ° C. for 10 minutes, it was put in a baking furnace,
The temperature was raised from room temperature to 500 ° C over about 80 minutes, and the temperature was maintained for 10 minutes. Then, after 30 minutes, when the furnace temperature reached 300 ° C. or lower, the film was taken out to obtain a conductive film.

【0043】得られた導電膜について、シート抵抗値を
四端子法で、全光線透過率(LT)とヘイズ価(H)を
ヘイズメーターで、硬度を鉛筆硬度計で、膜厚を表面粗
度計でそれぞれ測定した。その結果を表5に示す。
Regarding the obtained conductive film, the sheet resistance value was measured by the four-terminal method, the total light transmittance (LT) and the haze value (H) were measured by a haze meter, the hardness was measured by a pencil hardness meter, and the film thickness was determined by the surface roughness. Each was measured with a meter. The results are shown in Table 5.

【0044】[0044]

【表5】 [Table 5]

【0045】(実施例2)64grの酢酸ベンジルに2
0grのパラターシャリィーブチルフェノールを加えて
10分間室温で撹拌しながら溶解した。次いで4grの
ヒドロキシプロピルセルロースを加え、60℃で1時間
撹拌しながら溶解して粘稠液を得た。この粘稠液に0.
6grのAcAcSnと11.4grのAcAcInを
加えて、撹拌しながら160℃に昇温し、そのまま1時
間保持した。まだ熱いうちに500meshのスクリー
ンを使用し、吸引濾過して24kcps/25℃の導電
膜形成用塗布液を得た。
(Example 2) 2 parts were added to 64 gr of benzyl acetate.
0 gr of paratertiary butylphenol was added and dissolved for 10 minutes at room temperature with stirring. Next, 4 gr of hydroxypropyl cellulose was added and dissolved with stirring at 60 ° C. for 1 hour to obtain a viscous liquid. 0.
6gr of AcAcSn and 11.4gr of AcAcIn were added, the temperature was raised to 160 ° C with stirring, and the mixture was kept for 1 hour. While still hot, a 500 mesh screen was used and suction filtration was performed to obtain a coating liquid for forming a conductive film having a film thickness of 24 kcps / 25 ° C.

【0046】270mesh及び150meshのマス
クを使用して実施例1と同様に印刷,乾燥,焼成を行
い、導電膜を得た。得られた導電膜の特性を表6に示
す。
Printing, drying and baking were carried out in the same manner as in Example 1 using masks of 270 mesh and 150 mesh to obtain a conductive film. Table 6 shows the properties of the obtained conductive film.

【0047】[0047]

【表6】 [Table 6]

【0048】(実施例3)実施例1で得た導電膜形成塗
布液を270meshのマスクを使用して実施例1と同
様に印刷,乾燥した。次いで酸素中で45分を掛け、4
20℃に昇温した。この温度に達した後、窒素を流入さ
せ、炉内が窒素雰囲気になったところで再び昇温し、5
00℃で10分間焼成した。
Example 3 The conductive film-forming coating liquid obtained in Example 1 was printed and dried in the same manner as in Example 1 using a 270 mesh mask. Then take 45 minutes in oxygen, 4
The temperature was raised to 20 ° C. After reaching this temperature, nitrogen was introduced and the temperature was raised again when the inside of the furnace became a nitrogen atmosphere.
It was baked at 00 ° C. for 10 minutes.

【0049】約4時間掛けて冷却し、炉内温度が150
℃に達してから取り出した焼成膜の特性を表7に示す。
After cooling for about 4 hours, the temperature inside the furnace is 150
Table 7 shows the characteristics of the fired film taken out after the temperature reached ℃.

【0050】[0050]

【表7】 [Table 7]

【0051】(実施例4)64grのDBEに20gr
のオクチルフェノールを加えて10分間室温で撹拌しな
がら溶解した。次いで4grのヒドロキシプロピルセル
ロースを加え、60℃で1時間撹拌しながら溶解し、粘
稠液とした。この粘稠液に0.6grのAcAcSnと
11.4grのAcAcInを加えて撹拌しながら16
0℃に昇温し、そのまま1時間保持した。いまだ熱いう
ちに、粘稠液を500meshのスクリーンを使用して
吸引濾過し、150kcps/25℃の導電膜形成用塗
布液を得た。次に、270meshのマスクを使用して
得られた塗布液を実施例1と同様に印刷,乾燥,焼成を
行い、基板上に透明導電膜を形成した。導電膜の特性は
表8のとおりである。
(Example 4) 20 gr in 64 gr DBE
Octylphenol was added and dissolved at room temperature for 10 minutes with stirring. Next, 4 gr of hydroxypropyl cellulose was added and dissolved with stirring at 60 ° C. for 1 hour to obtain a viscous liquid. To this viscous liquid, 0.6 gr of AcAcSn and 11.4 gr of AcAcIn were added and stirred with stirring 16
The temperature was raised to 0 ° C. and kept for 1 hour. While still hot, the viscous liquid was suction filtered using a 500 mesh screen to obtain a coating liquid for forming a conductive film of 150 kcps / 25 ° C. Next, the coating solution obtained using a 270 mesh mask was printed, dried and baked in the same manner as in Example 1 to form a transparent conductive film on the substrate. Table 8 shows the characteristics of the conductive film.

【0052】[0052]

【表8】 [Table 8]

【0053】(実施例5)64grのDBEに20gr
のノニルフェノールの混液に、4grのヒドロキシプロ
ピルセルロースを加え、60℃で1時間溶解して粘稠液
を得た。次いで0.6grのAcAcSnと11.4g
rのAcAcInを加えて実施例4と同様の方法によ
り、200kcps/25℃の導電膜形成用塗布液を得
た。次に、150,200及び270meshのマスク
を用い得られた塗布液を実施例1と同様に印刷,乾燥,
焼成して基板上に透明導電膜を形成した。150mes
hのマスクを使用した焼成膜には微細な亀裂が発生して
いた。200及び270meshによる導電膜の特性は
表9のとおりである。
(Example 5) 20 gr in 64 gr DBE
4 gr of hydroxypropyl cellulose was added to the mixed solution of nonylphenol of 1 and dissolved at 60 ° C. for 1 hour to obtain a viscous liquid. Then 0.6gr of AcAcSn and 11.4g
By the same method as in Example 4 except that AcAcIn of r was added, a coating solution for forming a conductive film of 200 kcps / 25 ° C. was obtained. Next, the coating solution obtained by using the masks of 150, 200 and 270 mesh was printed, dried and dried in the same manner as in Example 1.
The transparent conductive film was formed on the substrate by firing. 150 mes
Fine cracks were generated in the fired film using the mask of h. Table 9 shows the characteristics of the conductive film according to 200 and 270 mesh.

【0054】[0054]

【表9】 [Table 9]

【0055】(実施例6)64grのDBEに20gr
のカシューナット殻液(3pentodecadecy
l phenol)の混液に、4grのヒドロキシプロ
ピルセルロースを加え、60℃で1時間溶解して粘稠液
を得た。次いで0.6grのAcAcSnと11.4g
rのAcAcInを加えて実施例1と同様の方法によ
り、300kcps/25℃の導電膜形成用塗布液を得
た。次に、200,250,270及び300mesh
のマスクを用い、得られた塗布液を実施例1と同様の方
法で印刷,乾燥し,500℃で1時間焼成して基板上に
透明導電膜を形成した。200及び250meshのマ
スクを使用した焼成膜には微細な亀裂が発生していた。
導電膜の特性は表10のとおりである。
(Embodiment 6) 20 gr in 64 gr DBE
Cashew nut shell liquid (3 pentodecadecy
1 gr) was mixed with 4 gr of hydroxypropyl cellulose and dissolved at 60 ° C. for 1 hour to obtain a viscous liquid. Then 0.6gr of AcAcSn and 11.4g
By the same method as in Example 1 except that AcAcIn of r was added, a coating liquid for forming a conductive film of 300 kcps / 25 ° C. was obtained. Next, 200, 250, 270 and 300 mesh
The obtained coating liquid was printed and dried by the same method as in Example 1 using the mask of 1., and baked at 500 ° C. for 1 hour to form a transparent conductive film on the substrate. Fine cracks were generated in the fired film using the masks of 200 and 250 mesh.
The characteristics of the conductive film are shown in Table 10.

【0056】[0056]

【表10】 [Table 10]

【0057】(実施例7)87grのDBEに5grの
パラターシャリィーブチルフェノール5grを加え、1
0分間室温で撹拌しながら溶解した。次いで1grのヒ
ドロキシプロピルセルロースを加えて60℃で1時間溶
解し、0.3grのAcAcSn及び6.7grのAc
AcInを加えた。160℃で1時間撹拌しながら溶解
したのち、液がいまだ熱いうちに500meshスクリ
ーンにより吸引濾過して140kcps/25℃の導電
膜形成用塗布液を得た。この塗布液をアセチルアセトン
で希釈したときの粘度は表11のとおりである。
(Example 7) To 87 gr of DBE, 5 gr of 5 g of paratertiarybutylphenol was added, and 1
It dissolved for 0 minutes with stirring at room temperature. Then, 1 gr of hydroxypropyl cellulose was added and dissolved at 60 ° C. for 1 hour to obtain 0.3 gr of AcAcSn and 6.7 gr of Ac.
AcIn was added. After the solution was stirred at 160 ° C. for 1 hour and dissolved, the solution was suction filtered through a 500 mesh screen while the solution was still hot to obtain a coating solution for forming a conductive film of 140 kcps / 25 ° C. Table 11 shows the viscosities of the coating solution diluted with acetylacetone.

【0058】[0058]

【表11】 [Table 11]

【0059】一方、15cm×20cmで厚2mmtの
青板ガラス(LT91.6%,H0.0%)を80℃の
オーブンに20分間入れて加温した後、炉から取り出
し、このガラス板を、スピンコーターにて300rpm
の回転速度で回転させ、その上に塗布液/アセチルアセ
トン=60/40の希釈液8grを一瞬のうちに塗布
し、塗布後2分間回転を継続した。次いで実施例1と同
様の方法で500℃で10分間焼成し、透明導電膜を形
成した。導電膜の形成は、200rpmの回転速度でも
同様に行った。得られた導電膜の特性は表12のとおり
である。
On the other hand, a blue plate glass (LT91.6%, H0.0%) having a size of 15 cm × 20 cm and a thickness of 2 mmt was placed in an oven at 80 ° C. for 20 minutes to be heated and then taken out from the furnace, and the glass plate was spun. 300 rpm with a coater
The coating liquid / acetylacetone = 60/40 dilution liquid 8 gr was applied to the coating liquid in an instant, and the rotation was continued for 2 minutes after the coating. Then, the transparent conductive film was formed by firing at 500 ° C. for 10 minutes in the same manner as in Example 1. The conductive film was formed in the same manner at a rotation speed of 200 rpm. Table 12 shows the characteristics of the obtained conductive film.

【0060】[0060]

【表12】 [Table 12]

【0061】(実施例8)270grのDBEに180
grのパラターシャリィーブチルフェノールを加えて1
0分間室温で撹拌しながら溶解した。次いで13grの
ヒドロキシプロピルセルロースを加え、60℃で1時間
撹拌しながら溶解して粘稠液を得た。この粘稠液に2.
1grのモノブチル錫トリアセテートと、最後に47.
5grのAcAcInを加え撹拌しながら160℃に昇
温し、そのまま1時間保持した。
Example 8 180 to 270 gr of DBE
Add 1 g of paratertiary butylphenol
It dissolved for 0 minutes with stirring at room temperature. Next, 13 gr of hydroxypropyl cellulose was added and dissolved with stirring at 60 ° C. for 1 hour to obtain a viscous liquid. Add to this viscous liquid 2.
1 gr monobutyltin triacetate and finally 47.
5 gr of AcAcIn was added, the temperature was raised to 160 ° C. with stirring, and the temperature was maintained for 1 hour.

【0062】まだ熱いうちに500meshスクリーン
を使用して粘稠液を吸引濾過し、16kcps/25℃
の導電膜形成用塗布液を得た。
While still hot, the viscous liquid is suction filtered using a 500 mesh screen, 16 kcps / 25 ° C.
To obtain a coating liquid for forming a conductive film.

【0063】一方、200meshのマスクにより10
cm×10cm×0.3cmの青板ガラス基板上に得ら
れた塗布液をスクリーン印刷した。
On the other hand, with a mask of 200 mesh, 10
The obtained coating liquid was screen-printed on a blue glass substrate having a size of 10 cm × 10 cm × 0.3 cm.

【0064】120℃で10分間乾燥後焼成炉に入れ、
室温から550℃まで約90分を掛けて昇温し、20分
間保持した。次いで30分後炉温が300℃以下になっ
たところで取り出して導電膜を得た。
After drying at 120 ° C. for 10 minutes, it was put in a baking furnace,
The temperature was raised from room temperature to 550 ° C. over about 90 minutes and kept for 20 minutes. Then, after 30 minutes, when the furnace temperature reached 300 ° C. or lower, the film was taken out to obtain a conductive film.

【0065】得られた導電膜の特性は表13のとおりで
あった。
The characteristics of the obtained conductive film are shown in Table 13.

【0066】[0066]

【表13】 [Table 13]

【0067】(実施例9)2.1grのモノブチル錫ト
リアセテートの代りに3.9grのジ−n−ブトキシ錫
を用いたほかは実施例8と全く同様の方法で32kcp
s/25℃の導電膜形成用塗布液を得た。
(Example 9) 32 kcp in the same manner as in Example 8 except that 3.9 gr of di-n-butoxytin was used in place of 2.1 gr of monobutyltin triacetate.
A coating liquid for forming a conductive film at s / 25 ° C. was obtained.

【0068】実施例8と同様の方法で印刷,乾燥,焼成
して得た導電膜の特性は表14のとおりであった。
The characteristics of the conductive film obtained by printing, drying and firing in the same manner as in Example 8 are shown in Table 14.

【0069】[0069]

【表14】 [Table 14]

【0070】(実施例10)2.1grのモノブチル錫
トリアセテートの代りに2.5grのオクチル酸錫を用
いたほかは実施例8と全く同様の方法で25kcps/
25℃の導電膜形成用塗布液を得た。
(Example 10) 25 kcps / in the same manner as in Example 8 except that 2.5 gr of tin octylate was used in place of 2.1 gr of monobutyltin triacetate.
A coating liquid for forming a conductive film at 25 ° C. was obtained.

【0071】実施例8と同様の方法で印刷,乾燥,焼成
して得た導電膜の特性は表15のとおりであった。
The characteristics of the conductive film obtained by printing, drying and firing in the same manner as in Example 8 are shown in Table 15.

【0072】[0072]

【表15】 [Table 15]

【0073】(比較例1)2.1grのモノブチル錫ト
リアセテートの代りに1.3grの塩化錫SnCl2
2H2Oを用いたほかは実施例8と全く同様の方法で2
5kcps/25℃の導電膜形成用塗布液を得た。
(Comparative Example 1) Instead of 2.1 gr of monobutyltin triacetate, 1.3 gr of tin chloride SnCl 2 ·.
Using the same method as in Example 8 except that 2H 2 O was used, 2
A coating liquid for forming a conductive film of 5 kcps / 25 ° C. was obtained.

【0074】実施例8と同様の方法で印刷,乾燥,焼成
して得た導電膜の特性は表16のとおりであった。
The characteristics of the conductive film obtained by printing, drying and firing in the same manner as in Example 8 are shown in Table 16.

【0075】[0075]

【表16】 [Table 16]

【0076】(比較例2)酢酸ベンジル26.33g
r,ターピネオール42.33gr,イソホロン9.1
5gr,アセチルアセトン9.14grの混合溶液中に
2.94grのヒドロキシプロピルセルロースを加え、
撹拌しながら160℃で8時間加熱溶解して粘稠液を得
た。
Comparative Example 2 26.33 g of benzyl acetate
r, terpineol 42.33 gr, isophorone 9.1
2.94 gr of hydroxypropyl cellulose was added to a mixed solution of 5 gr and 9.14 gr of acetylacetone,
It was heated and dissolved at 160 ° C. for 8 hours with stirring to obtain a viscous liquid.

【0077】この粘稠液に9.60grのオクチル酸イ
ンジウムと0.51grのオクチル酸錫を加え、実施例
8と同様の方法により1.8kcps/25℃の導電膜
形成用塗布液を得た。
9.60 gr of indium octylate and 0.51 gr of tin octylate were added to this viscous liquid, and a coating liquid for forming a conductive film of 1.8 kcps / 25 ° C. was obtained by the same method as in Example 8. .

【0078】実施例8と同様の方法で印刷,乾燥,焼成
して得た導電膜の特性は表17のとおりであった。
The characteristics of the conductive film obtained by printing, drying and firing in the same manner as in Example 8 are shown in Table 17.

【0079】[0079]

【表17】 [Table 17]

【00080】以上、実施例と比較例とを較べて明らか
なとおり、比較例による導電膜は、いずれも全光線透過
率,ヘイズ値に劣り抵抗値が大きく、殊に粘度を高めた
ものはさらに抵抗値が大きくなっているのに対し、本発
明の塗布液は、高粘度で得られた導電膜は抵抗値が小さ
く、全光線透過率,ヘイズ値は共に優れ、また、本発明
によれば希釈液を用いてスピンコートにより実用的な透
明導電膜を形成できることが実証された。
As is clear from the comparison between the examples and the comparative examples, the conductive films according to the comparative examples are inferior to the total light transmittance and the haze value and have a large resistance value. In contrast to the high resistance value, the coating liquid of the present invention has a low resistance value in the conductive film obtained with high viscosity, and has excellent total light transmittance and haze value, and according to the present invention, It was demonstrated that a practical transparent conductive film can be formed by spin coating using a diluent.

【0081】[0081]

【発明の効果】以上のように本発明の導電膜形成用塗布
液によれば、高粘度で抵抗値が小さいため、平板,凸
版,スクリーンなどの印刷法はもとより、必要により希
釈してスピンコートなどにより膜特性に優れた透明導電
膜を成膜でき、特に、パターン印刷,乾燥,焼成という
簡単な工程で基板上に任意の形状の透明導電膜微細パタ
ーンを形成することができる。
As described above, according to the coating film for forming a conductive film of the present invention, since it has a high viscosity and a low resistance value, it is spin-coated by diluting it as necessary, as well as by a printing method such as flat plate, letterpress and screen. As a result, a transparent conductive film having excellent film characteristics can be formed, and in particular, a transparent conductive film fine pattern having an arbitrary shape can be formed on a substrate by simple steps of pattern printing, drying and baking.

【0082】また、低い焼成温度での焼成が可能であ
り、得られた導電膜は、導電性が良好で、機械的強度,
光学性に優れ、面内バラツキが小さいため、タッチパネ
ルや表示装置の透明電極や帯電防止膜などに広く利用で
きる。
Further, it is possible to perform firing at a low firing temperature, and the obtained conductive film has good conductivity, mechanical strength,
Since it has excellent optical properties and has small in-plane variation, it can be widely used for transparent electrodes and antistatic films of touch panels and display devices.

【図面の簡単な説明】[Brief description of drawings]

【図1】[AcAcIn+AcAcSn]量と、焼成膜
のシート抵抗値との関係を示す図である。
FIG. 1 is a diagram showing the relationship between the [AcAcIn + AcAcSn] amount and the sheet resistance value of a fired film.

【図2】印刷焼成膜の(AcAcSn)/(AcAcI
n)×100%と膜特性との関係を示す図である。
FIG. 2 is (AcAcSn) / (AcAcI) of the printed and fired film.
It is a figure which shows the relationship between n) x100% and a film characteristic.

【図3】塗布膜の焼成温度の膜特性に及ぼす影響を示す
図である。
FIG. 3 is a diagram showing an influence of a baking temperature of a coating film on film characteristics.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 折田 桂一 東京都品川区西五反田7丁目9番4号 東 北化工株式会社内 (72)発明者 小泉 啓寿 東京都品川区西五反田7丁目9番4号 東 北化工株式会社内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Keiichi Orita 7-9-4 Nishigotanda, Shinagawa-ku, Tokyo Within Tohoku Kako Co., Ltd. (72) Inventor Keiju Koizumi 7-9, Nishigotanda, Shinagawa-ku, Tokyo No. 4 Tohoku Kako Co., Ltd.

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】 アセチルアセトンインジウムと、有機錫
とを溶剤中に溶解させ、粘性剤を添加した透明導電膜形
成用塗布液であって、 溶剤は、アルキルフェノール及び/又はアルケニルフェ
ノールと、二塩基性酸エステル及び/又は酢酸ベンジル
であり、 粘性剤は、ヒドロキシプロピルセルロースであり、その
添加量は、5重量%以下であることを特徴とする透明導
電膜形成用塗布液。
1. A coating solution for forming a transparent conductive film, which comprises dissolving indium acetylacetone and organic tin in a solvent and adding a viscous agent, wherein the solvent is alkylphenol and / or alkenylphenol and a dibasic acid. An ester and / or benzyl acetate, a viscous agent is hydroxypropyl cellulose, and the addition amount thereof is 5% by weight or less.
【請求項2】 アセチルアセトンインジウムと、有機錫
との含有量は、7重量%〜40重量%である請求項1に
記載の透明導電膜形成用塗布液。
2. The coating liquid for forming a transparent conductive film according to claim 1, wherein the contents of acetylacetone indium and organic tin are 7% by weight to 40% by weight.
【請求項3】 有機錫は、アセチルアセトン錫である請
求項1又は2に記載の透明導電膜形成用塗布液。
3. The coating liquid for forming a transparent conductive film according to claim 1, wherein the organic tin is acetylacetone tin.
【請求項4】 アルキルフェノール及び/又はアルケニ
ルフェノールの添加量は、40重量%以下であることを
特徴とする請求項1,2又は3に記載の透明導電膜形成
用塗布液。
4. The coating liquid for forming a transparent conductive film according to claim 1, wherein the added amount of alkylphenol and / or alkenylphenol is 40% by weight or less.
【請求項5】 請求項1,2,3又は4に記載の透明導
電膜形成用塗布液であって、さらに希釈剤を含み、希釈
剤は、塗布液の粘度を低下させる有機溶剤であることを
特徴とする透明導電膜形成用塗布液。
5. The coating liquid for forming a transparent conductive film according to claim 1, 2, 3 or 4, further comprising a diluent, wherein the diluent is an organic solvent that reduces the viscosity of the coating liquid. A coating liquid for forming a transparent conductive film, comprising:
JP36074992A 1992-12-28 1992-12-28 Coating solution for forming transparent conductive film Expired - Lifetime JP3338966B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP36074992A JP3338966B2 (en) 1992-12-28 1992-12-28 Coating solution for forming transparent conductive film

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Application Number Priority Date Filing Date Title
JP36074992A JP3338966B2 (en) 1992-12-28 1992-12-28 Coating solution for forming transparent conductive film

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JPH06203658A true JPH06203658A (en) 1994-07-22
JP3338966B2 JP3338966B2 (en) 2002-10-28

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