JPH0618630B2 - Ultra high vacuum material - Google Patents

Ultra high vacuum material

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Publication number
JPH0618630B2
JPH0618630B2 JP21893187A JP21893187A JPH0618630B2 JP H0618630 B2 JPH0618630 B2 JP H0618630B2 JP 21893187 A JP21893187 A JP 21893187A JP 21893187 A JP21893187 A JP 21893187A JP H0618630 B2 JPH0618630 B2 JP H0618630B2
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JP
Japan
Prior art keywords
vacuum
ultra
layer
magnesium
aluminum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP21893187A
Other languages
Japanese (ja)
Other versions
JPS6463029A (en
Inventor
林蔵 佐藤
勉 多井
洋二 室尾
Original Assignee
株式会社神戸製鋼所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社神戸製鋼所 filed Critical 株式会社神戸製鋼所
Priority to JP21893187A priority Critical patent/JPH0618630B2/en
Publication of JPS6463029A publication Critical patent/JPS6463029A/en
Publication of JPH0618630B2 publication Critical patent/JPH0618630B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J3/00Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
    • B01J3/006Processes utilising sub-atmospheric pressure; Apparatus therefor

Description

DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention constitutes an accelerator for electrons, protons, heavy ions, etc., a neutral particle injection device for nuclear fusion, a space chamber for space development, a semiconductor manufacturing device, etc. The present invention relates to an ultra-high vacuum material used for an ultra-high vacuum container and the like.

(Prior Art) In recent years, light metal Vol. 33, No. 2 (1983) P1
As shown in Nos. 03-P110, aluminum is used as a material of parts constituting an ultra-high vacuum device such as a particle accelerator. This is because aluminum is excellent in the following points.

Short half-life of residual radioactivity due to induced activation.

Outgassing rate is small.

High thermal conductivity.

A wide variety of alloys can be selected.

It is lightweight.

Aluminum materials used include pure aluminum-based A1050, Al-Cu-based A2218, and Al-M.
Examples include g-based A5052 and A5083, and Al-Mg-Si-based A6061 and A6063. Among them, aluminum alloys such as A2218 containing copper are used as a vacuum flange material, and A50 containing 1 to 5% magnesium.
Aluminum alloys such as 52, A5083, A6061 and A6063 are used as ultra high vacuum materials.

(Problems to be solved by the invention) An ultra-high vacuum container, which is a component of an ultra-high vacuum device such as a particle accelerator, is a pipe material manufactured by a method such as extrusion using the aluminum alloy containing magnesium as described above, a rolled material. It is manufactured by welding an ultra-high vacuum material such as a material by a method such as TIG welding.

However, in this way, in an ultra-high vacuum container made of conventional ultra-high vacuum material, when its inner surface is irradiated with a high-energy beam such as a particle beam or orbital radiation, the internal ultra-high vacuum state is changed. There was a problem of being hindered.

The inventors conducted the following test in order to investigate the cause. That is, conventional ultra-high vacuum material (A5083)
Is welded by TIG welding to produce an ultra-high vacuum container, and a welding base material (rolled material) part of the ultra-high vacuum container, a welded part by TIG welding, and the peripheral part thereof are each analyzed by using an ion microanalyzer. Was analyzed in the depth direction. As a result, as shown in FIG. 9, a large amount of magnesium was found near the surface of the base metal portion (curve indicated by the solid line), the welded portion (curve indicated by the broken line) and its peripheral portion (curve indicated by the alternate long and short dash line). It was distributed. In particular, there were many near the surface of the welded portion and the peripheral portion, and several tens of times near the surface of the base metal portion. Therefore, when the inner surface of the ultra-high vacuum container is irradiated with a high-energy beam, a large amount of magnesium distributed near the inner surface of the container, particularly near the surface of the welded portion and its periphery is knocked out into the vacuum space, Since magnesium is a metal with a high vapor pressure, the ultrahigh vacuum state inside the ultrahigh vacuum container was hindered by the knocked out magnesium.

In order to prevent the above problems from occurring, a pure aluminum material containing no magnesium may be used as the ultra-high vacuum material forming the ultra-high vacuum container. However, when an ultra-high vacuum container is made of pure aluminum material, the pure aluminum material is inferior in mechanical strength to an aluminum alloy material containing magnesium, so that it is necessary to increase the thickness of the container and the container becomes heavy. There was a flaw.

(Object of the Invention) In order to solve the above-mentioned problems, the present invention is an ultra-lightweight aluminum body that can keep the inside in an ultra-high vacuum state even when the inner surface is irradiated with a high-energy beam. It is an object of the present invention to provide an ultra-high vacuum material capable of forming a high vacuum container or the like.

(Structure of the Invention) The present invention mainly uses a layer made of an aluminum alloy containing magnesium in an ultra-high vacuum material used for a component of an ultra-high vacuum device, and at least the surface of this layer is exposed to ultra-high vacuum. The gist is an ultra-high vacuum material characterized in that a portion is covered with a layer made of pure aluminum having a thickness of 0.5 mm or more.

According to the above configuration, magnesium is not distributed on the surface exposed to the ultrahigh vacuum. Therefore, if an ultra-high vacuum container or the like is constructed using this, even if the surface of the container or the like exposed to the ultra-high vacuum is irradiated with a high-energy beam, magnesium will not be knocked out into the vacuum space. Moreover, since the container and the like are mainly composed of an aluminum alloy containing magnesium and excellent in mechanical strength, it is possible to provide a lightweight container and the like having a thin wall thickness.

(Embodiment) FIG. 1 schematically shows an electron beam accelerator using an embodiment of the ultra-high vacuum material according to the present invention. This electron beam accelerator includes an electron gun 1, a linear accelerator 2, a synchrotron accelerator 3, an experimental device 4 and a beam transport system 5. Electrons created by the electron gun 1 are pulsedly accelerated by the linear accelerator 2, the accelerated electrons are accumulated in the synchrotron accelerator 3 and further accelerated to a high energy state, and then the orbital radiation is made by the synchrotron accelerator 3. The light is extracted and various kinds of experiments are conducted by the experiment device 4.

In this electron beam accelerator, the synchrotron accelerator 3 and the beam transport system 5 are aluminum ultra-high vacuum components. These parts are made by cutting a pipe-shaped ultra high vacuum material 8 or 9 having a circular cross section as shown in FIG. 2 or a race track as shown in FIG. 3 to a required length. , And vacuum flanges are welded to both ends. Whether the cross-sectional shape is circular or racetrack-shaped is selected depending on the type of magnet attached to the outer circumference. The pipe-shaped ultra-high vacuum materials 8 and 9 shown in FIGS. 2 and 3 are aluminum alloys containing magnesium (Al-Mg-based A5052, A5083, Al-Mg).
Layer 1 made of Si-based A6061, A6063, etc.)
1 mainly, and a portion of the layer exposed to the ultrahigh vacuum, that is, the inner peripheral surface is covered with a layer 12 made of pure aluminum (A1050 or the like). There are the following two methods for manufacturing such pipe-shaped ultra-high vacuum materials (clad pipes) 8 and 9, and an optimum method is adopted according to the sectional shape and size. The first method is a layer made of pure aluminum (hereinafter referred to as "pure aluminum layer").
It is a method of using a double cylindrical billet in which a layer made of an aluminum alloy containing magnesium (hereinafter referred to as "aluminum alloy layer") is arranged as an inner layer and an outer layer, and the billet is obtained by extrusion molding. It is suitable for obtaining a clad pipe 8 having a cross section. The second method is to make a pipe made of pure aluminum and a pipe made of aluminum alloy separately, insert the pipe made of pure aluminum into the pipe made of aluminum alloy, and then, while supporting the pipe made of aluminum alloy, apply internal pressure to the pipe made of pure aluminum. Is applied to integrate the pure aluminum pipe and the aluminum alloy pipe, and is suitable for obtaining the clad pipe 9 having a racetrack-shaped cross section.

When a pulsed electron beam is used as a continuous beam, a pulse beam stretcher 6 is attached instead of the synchrotron accelerator as shown in FIG.
The pulse beam stretcher 6 is provided with a plurality of ultra-high vacuum chambers 7 containing electromagnets for making electron beams continuous.

This ultra-high vacuum container 7 is, as shown in FIGS.
It has the shape of a cube. Nozzles 71, 72, 73 are attached to the side wall 7 a of the ultra-high vacuum container 7. The electron beam enters through the nozzle 71 and exits through the nozzle 72. The nozzle 73 is provided for evacuation and for adjusting the position of the internal electromagnet. The nozzles 71, 72, 73 are composed of the clad pipe shown in FIG. Vacuum flanges 71a, 72a, 73a are attached to the nozzles 71, 72, 73 by welding. A companion flange 74 is attached to the upper portion of the ultra high vacuum container 7 by welding, and a blind flange 75 is placed on the companion flange 74 for vacuum sealing.

The ultra-high vacuum container 7 includes a plate-shaped ultra-high vacuum material 10 as shown in FIG. 6, which is a side wall 7a, a bottom wall 7b, and a blind flange 7, respectively.
It is configured by cutting in accordance with a size of 5, etc., combining these cutting members, and welding the corners by TIG welding or the like. A plate-shaped ultra-high vacuum material 10 shown in FIG.
Is mainly composed of an aluminum alloy layer 11, and one surface of the layer is covered with a pure aluminum layer 12. In order to manufacture such a plate-shaped ultra-high vacuum material (clad material) 10, an aluminum alloy plate and a pure aluminum plate are superposed and rolled.

The corners are welded as shown in FIG. That is, the pure aluminum alloy layer 12 is arranged inside the container exposed to the ultra-high vacuum, and the aluminum alloy layer 11 is arranged outside the container exposed to the atmosphere.
The pure aluminum layers 12 are continuously welded to each other by using a welding material 13 for pure aluminum. Since the mechanical strength against atmospheric pressure is insufficient only by this welding, the aluminum alloy layers 11 are welded intermittently with the welding material 14 for the aluminum alloy so as to have the mechanical strength.

The ultra-high vacuum material shown in FIGS. 2, 3 and 6,
Pure aluminum layer 12 in the ultra-high vacuum material according to the present invention
Must have a thickness of 0.5 mm or more. This is for the following reason.

The clad plates were welded by TIG welding as shown in FIG. 7, and the aluminum alloy layer 1 was analyzed by EPMA line analysis.
The diffusion of magnesium from 1 to pure aluminum layer 12 was analyzed. This was performed for each of the clad plates having different thicknesses of the pure aluminum layer 12.
In addition, A1050 was used for pure aluminum and A5052 was used for the aluminum alloy. The analysis direction was the A direction shown in the figure. As a result of the analysis, as shown in FIG.
It was found that magnesium diffused from the aluminum alloy layer 11 to the pure aluminum layer 12. Particularly, from the boundary between the aluminum alloy layer 11 and the pure aluminum layer 12, that is, the boundary of the clad, the pure aluminum layer 12
Aluminum alloy layer 1 where 0.1mm is moved to the side
A magnesium concentration 2.5 to 3 times higher than that of magnesium was detected. The diffusion region was 0.3 mm from the boundary of the clad to the pure aluminum layer 12 side.

From the results of this analysis, the thickness of the pure aluminum layer 12 was set to 0.
It can be seen that when the thickness is 5 mm or more, magnesium does not reach the surface of the pure aluminum layer 12, and magnesium is not knocked out even if the surface is irradiated with a high energy beam. Therefore, the thickness of the pure aluminum layer 12 needs to be 0.5 mm or more.

Usually, the thickness of the pure aluminum layer 12 is 2-3 mm. The pure aluminum layer 12 may cover only the portion of the surface of the aluminum alloy layer 11 that is exposed to ultrahigh vacuum, or may cover the entire surface.

The thickness of the aluminum alloy layer 11 depends on the size of the ultra-high vacuum container, and after performing strength analysis, obtaining the optimum value,
It may be set according to the value.

(Effect of the invention) As described above, the ultra-high vacuum material according to the present invention is mainly composed of a layer made of an aluminum alloy containing magnesium, and at least the portion of the surface of the layer exposed to the ultra-high vacuum has a thickness. It is composed of a layer of 0.5 mm or more made of pure aluminum. Therefore, if an ultra-high vacuum container or the like is constructed using this, even if the surface of the container or the like exposed to the ultra-high vacuum is irradiated with a high-energy beam, the layer made of an aluminum alloy containing magnesium is made of pure aluminum. By being covered with the layer, the layer made of the aluminum alloy containing magnesium is not irradiated with the beam. Moreover, by setting the thickness of the layer made of pure aluminum to 0.5 mm or more, the magnesium diffused from the layer made of the aluminum alloy containing magnesium to the layer made of pure aluminum has a surface of the layer made of pure aluminum, that is, a container or the like. The surface that is exposed to the ultra-high vacuum is never reached. Therefore, even if the surface of the container or the like exposed to the ultra-high vacuum is irradiated with the high-energy beam, magnesium will not be knocked out into the vacuum space.
In addition, since the container and the like are mainly composed of an aluminum alloy containing magnesium, since the aluminum alloy containing magnesium is excellent in mechanical strength,
The thickness of the container can be reduced, making it a lightweight container. Moreover, the container and the like are made of aluminum, and the container and the like have excellent characteristics of aluminum.

[Brief description of drawings]

FIG. 1 is a plan view schematically showing an electron beam accelerator using an ultra-high vacuum material according to the present invention, and FIG. 2 is a sectional view showing an ultra-high vacuum material in the shape of a pipe having a circular cross section. Is a cross-sectional view showing a pipe-shaped ultra-high vacuum material with a racetrack cross section,
FIG. 4 is a plan view schematically showing another example of the electron beam accelerator, FIG. 5 (a) is a plan view showing an example of an ultra-high vacuum container, and FIG. 5 (b).
Is a front view thereof, and FIG. 6 is a sectional view showing a flat plate-shaped embodiment,
FIG. 7 is a sectional view showing the welded state, FIG. 8 is an analysis graph of a flat plate-shaped embodiment, and FIG. 9 is an analysis graph of a conventional ultra-high vacuum material. 3, 5, 6, 7 ... Components of ultra-high vacuum device, 8, 9, 1
0 ... Ultra-high vacuum material, 11 ... Layer made of aluminum alloy containing magnesium, 12 ... Layer made of pure aluminum.

Claims (1)

[Claims]
1. An ultra-high vacuum material used for a component of an ultra-high vacuum device, which is mainly composed of a layer made of an aluminum alloy containing magnesium, and at least a portion of the surface of the layer exposed to the ultra-high vacuum has a thickness of 0. An ultra-high vacuum material characterized by being covered with a layer made of pure aluminum of 0.5 mm or more.
JP21893187A 1987-08-31 1987-08-31 Ultra high vacuum material Expired - Lifetime JPH0618630B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21893187A JPH0618630B2 (en) 1987-08-31 1987-08-31 Ultra high vacuum material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21893187A JPH0618630B2 (en) 1987-08-31 1987-08-31 Ultra high vacuum material

Publications (2)

Publication Number Publication Date
JPS6463029A JPS6463029A (en) 1989-03-09
JPH0618630B2 true JPH0618630B2 (en) 1994-03-16

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP21893187A Expired - Lifetime JPH0618630B2 (en) 1987-08-31 1987-08-31 Ultra high vacuum material

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JP (1) JPH0618630B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4998404B2 (en) * 2007-08-16 2012-08-15 三菱マテリアル株式会社 Power module substrate, manufacturing method thereof, and power module

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Publication number Publication date
JPS6463029A (en) 1989-03-09

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