JPH06162442A - Vertical magnetic head - Google Patents
Vertical magnetic headInfo
- Publication number
- JPH06162442A JPH06162442A JP33003892A JP33003892A JPH06162442A JP H06162442 A JPH06162442 A JP H06162442A JP 33003892 A JP33003892 A JP 33003892A JP 33003892 A JP33003892 A JP 33003892A JP H06162442 A JPH06162442 A JP H06162442A
- Authority
- JP
- Japan
- Prior art keywords
- film
- magnetization
- magnetic
- soft magnetic
- magnetic head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3109—Details
- G11B5/3113—Details for improving the magnetic domain structure or avoiding the formation or displacement of undesirable magnetic domains
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/1278—Structure or manufacture of heads, e.g. inductive specially adapted for magnetisations perpendicular to the surface of the record carrier
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3109—Details
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、垂直磁気ヘッドに関
し、特に、主磁極の改良に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a perpendicular magnetic head, and more particularly to improvement of a main pole.
【０００２】[0002]
【従来の技術】図２に、一般的な垂直磁気ヘッドの概念
図を示す。１０は主磁極、１１はリタ−ンパスコア、１
２はコイル、１３は磁気記録媒体である。この主磁極１
０はパ−マロイ、或いは、アモルファス等から成る軟磁
性体で形成され、その磁化容易軸が記録媒体１３と水平
方向に向くように磁気異方性が付与されている（図２に
おける紙面に対して垂直方向）。2. Description of the Related Art FIG. 2 shows a conceptual diagram of a general perpendicular magnetic head. 10 is a main pole, 11 is a return path core, 1
Reference numeral 2 is a coil, and 13 is a magnetic recording medium. This main pole 1
0 is formed of a soft magnetic material such as permalloy or amorphous, and has magnetic anisotropy so that its easy axis of magnetization is oriented in the horizontal direction with respect to the recording medium 13 (with respect to the paper surface in FIG. 2). Vertical).
【０００３】その理由として、仮に磁化容易軸の磁化方
向がが記録媒体１３に対して垂直方向に向いた場合、記
録媒体１３からの信号磁束の方向と磁化容易軸の磁化方
向が一致することになり、主磁極１０を構成する軟磁性
膜の磁化過程は磁壁移動型となる。これは、磁壁の移動
に伴って発生するバルクハウゼンノイズやウイグルの原
因となり、再生出力の不安定化や再生効率の劣化につな
がる。The reason is that, if the magnetization direction of the easy axis is perpendicular to the recording medium 13, the direction of the signal magnetic flux from the recording medium 13 and the magnetization direction of the easy axis coincide with each other. Therefore, the magnetization process of the soft magnetic film forming the main pole 10 is of the domain wall motion type. This causes Barkhausen noise and wiggle that occur with the movement of the domain wall, leading to instability of the reproduction output and deterioration of the reproduction efficiency.
【０００４】一方、磁化容易軸が記録媒体１３に対して
水平方向に向いた場合には、磁化過程は回転型となり上
記のようなノイズが抑えられる。このことから、主磁極
の軟磁性膜の磁気異方性を制御する各種の方法が試みら
れている。On the other hand, when the easy axis of magnetization is oriented in the horizontal direction with respect to the recording medium 13, the magnetization process becomes a rotary type and the above noise is suppressed. Therefore, various methods for controlling the magnetic anisotropy of the soft magnetic film of the main pole have been tried.
【０００５】その一般的方法は、磁場中で熱処理を施す
方法である。また、特開昭６３−１６４０３号及び特開
平３−１１３８１５号に開示されているように、主磁極
に切り込みや、溝を設けることにより磁気異方性を制御
する方法もある。The general method is to perform heat treatment in a magnetic field. Further, as disclosed in JP-A-63-16403 and JP-A-3-113815, there is also a method of controlling the magnetic anisotropy by providing a notch or a groove in the main magnetic pole.
【０００６】[0006]
【発明が解決しようとする課題】しかしながら、前述の
熱処理を施すものにあっては、磁場の不均一性のため基
板内でのバラツキが大きくなる、と言う問題があった。However, the above-mentioned heat treatment has a problem that the variation in the substrate becomes large due to the non-uniformity of the magnetic field.
【０００７】また、前記公開公報に開示されているもの
は、前記バラツキは減るものの工程数が増えたり、主磁
極やヘッド自身の微細化による高度な微細加工技術が要
求されることになり、工程数の負担が増加してしまう、
という問題があった。そこで、本発明は前記問題点を解
決した垂直磁気ヘッドを提供しよう、と言うものであ
る。Further, in the method disclosed in the above-mentioned publication, the variation is reduced, but the number of steps is increased, and a high-level fine processing technique is required by miniaturizing the main pole and the head itself. The burden of numbers increases,
There was a problem. Therefore, the present invention is to provide a perpendicular magnetic head that solves the above problems.
【０００８】[0008]
【課題を解決するための手段】本発明は上記の問題点に
鑑みてなされたものであり、以下の構成より成る。即
ち、本発明の垂直磁気ヘッドによれば、主磁極を、外部
磁界の印加により磁化容易軸が所定方向に磁化された軟
磁性膜と、前記外部磁界の印加時に、前記軟磁性膜の磁
化容易軸の磁化方向を固定化するための反強磁性膜とを
積層して構成したことを特徴とする垂直磁気ヘッド。The present invention has been made in view of the above problems and has the following configuration. That is, according to the perpendicular magnetic head of the present invention, the main magnetic pole is formed of a soft magnetic film whose easy axis is magnetized in a predetermined direction by the application of an external magnetic field, and the soft magnetic film is easily magnetized by applying the external magnetic field. A perpendicular magnetic head characterized by being configured by laminating an antiferromagnetic film for fixing a magnetization direction of an axis.
【０００９】[0009]
【実施例】以下、図面を参照して、本発明の実施例につ
き説明する。図１は本発明の一実施例に係る垂直磁気ヘ
ッドの概略図で、Ｙ−Ｚ平面より切断し、後方側の一部
を省略した概略断面斜視図である。同図において、１は
基板で、この基板１上には絶縁膜２が設けられている。
３はフォトリソグラフによりパタ−ニングされた下コア
３ａで、この下コア３ａ上には蒸着またはスパッタリン
グにより、パ−マロイ、或いは、アモルファス等より成
る軟磁性膜４ａが約３００ｎｍの厚さで成膜されてい
る。この成膜に際しては、軟磁性膜４ａの磁化容易軸が
所定方向に向くように８〜１６×１０3 Ａ／ｍの磁界が
印加される。本実施例の場合には、Ｘ軸方向に磁界が印
加されて軟磁性膜４ａの磁化容易軸がＸ軸方向に向けら
れる。Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a schematic view of a perpendicular magnetic head according to an embodiment of the present invention, and is a schematic cross-sectional perspective view cut from the YZ plane and a part of the rear side is omitted. In the figure, 1 is a substrate, and an insulating film 2 is provided on the substrate 1.
3 is a lower core 3a patterned by photolithography, and a soft magnetic film 4a made of permalloy or amorphous is formed on the lower core 3a by vapor deposition or sputtering to a thickness of about 300 nm. Has been done. During this film formation, a magnetic field of 8 to 16 × 10 3 A / m is applied so that the easy axis of magnetization of the soft magnetic film 4a is oriented in a predetermined direction. In the case of this embodiment, a magnetic field is applied in the X-axis direction and the easy axis of magnetization of the soft magnetic film 4a is oriented in the X-axis direction.
【００１０】その後、この外部磁界印加時に、前記軟磁
性膜４ａの上に、例えば、ＦｅＭｎ合金（Ｆｅ／Ｍｎ＝
５０／５０ｗｔ％）、或いは、ＮｉＯ、Ｆｅ2 Ｏ3 等よ
り成る反強磁性膜４ｂが蒸着またはスパッタリングによ
り約２０ｎｍの厚さで成膜され、この反強磁性膜４ｂと
前記軟磁性膜４ａとで主磁極を構成している。Thereafter, when the external magnetic field is applied, for example, an FeMn alloy (Fe / Mn =) is formed on the soft magnetic film 4a.
50/50 wt%), or an antiferromagnetic film 4b made of NiO, Fe 2 O 3 or the like is formed to a thickness of about 20 nm by vapor deposition or sputtering, and the antiferromagnetic film 4b and the soft magnetic film 4a are formed. Constitutes the main magnetic pole.
【００１１】こうすることにより、軟磁性膜４ａと反強
磁性膜４ｂとが磁気的に結合し、反強磁性膜４ｂの軟磁
性膜４ａと接合する面側の層の磁化容易軸が軟磁性膜４
ａと同一方向に向けられて、この層により、例え、外部
磁界が取り除かれても軟磁性膜４ａの磁化容易軸がＸ軸
方向、即ち図示しない記録媒体（Ｘ−Ｚ平面に対して平
行な位置に置かれる。）に対して水平方向に固定化され
ることになる。As a result, the soft magnetic film 4a and the antiferromagnetic film 4b are magnetically coupled to each other, and the easy axis of magnetization of the layer of the antiferromagnetic film 4b on the surface side which is joined to the soft magnetic film 4a is soft magnetic. Membrane 4
With this layer being oriented in the same direction as a, even if the external magnetic field is removed, the easy axis of magnetization of the soft magnetic film 4a is in the X-axis direction, that is, the recording medium (not shown) (parallel to the XZ plane). It will be fixed horizontally).
【００１２】そして、前記反強磁性膜４ｂの上面には絶
縁層５が設けられ、この絶縁層５にはコイル６の一部が
埋設され、上部コア３ｂの立設部３ｂ-1を巻回するよう
に設けられている。この上コア３ｂと前記下コア３ａと
でリタ−ンコア３が形成される。本実施例の垂直磁気ヘ
ッドは、以上の構成より成り、特に、上述したように主
磁極４の構成に特徴を有するものである。尚、上述の説
明では、軟磁性膜４ａの上に反強磁性膜４ｂを積層した
構造としたが、逆に積層しても良い。An insulating layer 5 is provided on the upper surface of the antiferromagnetic film 4b, a part of the coil 6 is embedded in the insulating layer 5, and the standing portion 3b-1 of the upper core 3b is wound. It is provided to do. The upper core 3b and the lower core 3a form a return core 3. The perpendicular magnetic head according to the present embodiment has the above-described structure, and is particularly characterized by the structure of the main pole 4 as described above. Although the antiferromagnetic film 4b is laminated on the soft magnetic film 4a in the above description, it may be laminated in reverse.
【００１３】[0013]
【発明の効果】本発明の垂直磁気ヘッドによれば、主磁
極を、外部磁界の印加により磁化容易軸が所定方向に磁
化された軟磁性膜と、前記外部磁界の印加時に、前記軟
磁性膜の磁化容易軸の磁化方向を固定化するための反強
磁性膜とを積層して構成したことを特徴とする垂直磁気
ヘッド。According to the perpendicular magnetic head of the present invention, the main magnetic pole has a soft magnetic film whose easy axis is magnetized in a predetermined direction by applying an external magnetic field, and the soft magnetic film when the external magnetic field is applied. 2. A perpendicular magnetic head comprising: an antiferromagnetic film for fixing the magnetization direction of the easy axis of.
【図１】本発明の一実施例に係る垂直磁気ヘッドの概略
断面斜視図である。FIG. 1 is a schematic sectional perspective view of a perpendicular magnetic head according to an embodiment of the present invention.
【図２】一般的な垂直磁気ヘッドの概念図である。FIG. 2 is a conceptual diagram of a general perpendicular magnetic head.
１ 基板 ２ 絶縁膜 ３ リタ−ンパスコア ３ａ 下コア ３ｂ 上コア ３ｂ-1 立設部 ４ 主磁極 ４ａ 軟磁性膜 ４ｂ 反強磁性膜 ５ 絶縁層 ６ コイル 1 substrate 2 insulating film 3 return path core 3a lower core 3b upper core 3b-1 standing portion 4 main pole 4a soft magnetic film 4b antiferromagnetic film 5 insulating layer 6 coil
Claims (1)
極を、外部磁界の印加により磁化容易軸が所定方向に磁
化された軟磁性膜と、前記外部磁界の印加時に、前記軟
磁性膜の磁化容易軸の磁化方向を固定化するための反強
磁性膜とを積層して構成したことを特徴とする垂直磁気
ヘッド。According to the perpendicular magnetic head of the present invention, a main magnetic pole has a soft magnetic film whose easy axis is magnetized in a predetermined direction by applying an external magnetic field, and the soft magnetic film when the external magnetic field is applied. 2. A perpendicular magnetic head comprising: an antiferromagnetic film for fixing the magnetization direction of the easy axis of.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP33003892A JPH06162442A (en) | 1992-11-16 | 1992-11-16 | Vertical magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP33003892A JPH06162442A (en) | 1992-11-16 | 1992-11-16 | Vertical magnetic head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH06162442A true JPH06162442A (en) | 1994-06-10 |
Family
ID=18228081
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP33003892A Pending JPH06162442A (en) | 1992-11-16 | 1992-11-16 | Vertical magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06162442A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6771464B2 (en) * | 2001-10-19 | 2004-08-03 | Seagate Technology Llc | Perpendicular magnetic recording head with a laminated main write pole |
| US7295401B2 (en) | 2004-10-27 | 2007-11-13 | Hitachi Global Storage Technologies Netherlands B.V. | Laminated side shield for perpendicular write head for improved performance |
| US7359146B2 (en) * | 2003-07-16 | 2008-04-15 | Tdk Corporation | Perpendicular magnetic recording element having stacked FM and AFM films applying magnetic bias along easy axis of soft magnetic film |
-
1992
- 1992-11-16 JP JP33003892A patent/JPH06162442A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6771464B2 (en) * | 2001-10-19 | 2004-08-03 | Seagate Technology Llc | Perpendicular magnetic recording head with a laminated main write pole |
| US7359146B2 (en) * | 2003-07-16 | 2008-04-15 | Tdk Corporation | Perpendicular magnetic recording element having stacked FM and AFM films applying magnetic bias along easy axis of soft magnetic film |
| US7295401B2 (en) | 2004-10-27 | 2007-11-13 | Hitachi Global Storage Technologies Netherlands B.V. | Laminated side shield for perpendicular write head for improved performance |
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