JPH06123709A - Method for inspecting printed wiring board and device - Google Patents

Method for inspecting printed wiring board and device

Info

Publication number
JPH06123709A
JPH06123709A JP27422392A JP27422392A JPH06123709A JP H06123709 A JPH06123709 A JP H06123709A JP 27422392 A JP27422392 A JP 27422392A JP 27422392 A JP27422392 A JP 27422392A JP H06123709 A JPH06123709 A JP H06123709A
Authority
JP
Japan
Prior art keywords
printed wiring
wiring board
defect
detection
inspection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP27422392A
Other languages
Japanese (ja)
Inventor
Yoshinori Goto
義則 後藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Showa Denko Materials Co Ltd
Original Assignee
Hitachi Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Chemical Co Ltd filed Critical Hitachi Chemical Co Ltd
Priority to JP27422392A priority Critical patent/JPH06123709A/en
Publication of JPH06123709A publication Critical patent/JPH06123709A/en
Pending legal-status Critical Current

Links

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  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Processing Or Creating Images (AREA)

Abstract

PURPOSE:To provide a method for efficiently inspecting a wiring pattern of a printed wiring board and a device used in its method. CONSTITUTION:In an inspector for a printed wiring board 1 utilizing an optical characteristic for the printed wiring board 1, using an optical type pattern inspection machine 2 for detecting a defect produced in a wiring pattern and the coordinate data and detection items of detection parts obtained therefrom and employing a defect confirmation machine 3 for confirmation the detection parts, defect number allowed on a specific defect production prohibition area and one face of the printed wiring board 1 is previously determined. In the case where the defect parts exist in the production prohibition area and specific item detection parts exceed the number allowed in one previously determined printed wiring board 1, these parts are inspected prior to other detected part.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明はプリント配線板の検査方
法及び装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and apparatus for inspecting printed wiring boards.

【0002】[0002]

【従来の技術】プリント配線板1は、図2に示すよう
に、絶縁基板2とその表面に形成された回路導体から成
るものであり、その製造法によって銅箔の不要な箇所を
除去して回路導体を形成する方法や、導体回路の必要な
箇所にのみ無電解めっきによって形成する方法が知られ
ている。
2. Description of the Related Art A printed wiring board 1, as shown in FIG. 2, is composed of an insulating substrate 2 and a circuit conductor formed on the surface thereof, and is manufactured by removing unnecessary portions of a copper foil. A method of forming a circuit conductor and a method of forming a circuit conductor by electroless plating only in a necessary portion of the conductor circuit are known.

【0003】ところで、このようなプリント配線板は製
造する時の治工具の精度や印刷による配線パターンの形
成時の印刷誤差等によりパターンに欠陥を生ずるが、こ
のよな欠陥としては第3図に示すごとく、断線5、欠け
6、細り7、ピンホール8、短絡9、残銅10、突起1
1など様々な欠陥を生じることがある。
By the way, in such a printed wiring board, a defect occurs in the pattern due to the accuracy of jigs and tools at the time of manufacturing, a printing error at the time of forming a wiring pattern by printing, and the like. As shown, disconnection 5, chipping 6, tapering 7, pinhole 8, short circuit 9, residual copper 10, protrusion 1
Various defects such as 1 may occur.

【0004】このような欠陥として、導体回路の断線や
回路間の短絡は回路として正常な動作ができないので、
当然排除されなければならないが、断線や短絡にまで至
らなくても回路動作が正常に行えない場合がある。例え
ば、回路導体の幅が設計値よりも細くなって必要とする
電流に耐えられないことや、導体回路の間隔が狭くなっ
て必要とする耐電圧が得られないことである。この他に
も高速回路における伝送特性を維持するために必要な形
状とならない場合や、電子部品を搭載するためにパター
ン形状の誤差が厳しい場合などがある。
As such a defect, a broken conductor circuit or a short circuit between circuits cannot operate normally as a circuit.
Of course, it must be eliminated, but circuit operation may not be performed normally even if a wire break or short circuit does not occur. For example, the width of the circuit conductor is narrower than the design value and cannot withstand the required current, and the interval between the conductor circuits is narrow so that the required withstand voltage cannot be obtained. In addition to this, there are cases in which the shape is not required to maintain the transmission characteristics in a high-speed circuit, and there are cases in which the error in the pattern shape is severe due to the mounting of electronic components.

【0005】プリント配線板の欠陥を検出する方法とし
ては、画像処理の手法を利用するものとして特開平4−
29041号公報及び特公平3−3384号公報に開示
されている。
As a method for detecting a defect in a printed wiring board, an image processing method is used.
It is disclosed in Japanese Patent Publication No. 29041 and Japanese Patent Publication No. 3-3384.

【0006】従来は光学式パターン検査機により検出さ
れた位置の座標と検出項目を欠陥確認機に転送し、検出
された順に確認作業を行うことにより、プリント配線板
の配線パターンの検査が完了するものである。
Conventionally, the inspection of the wiring pattern of the printed wiring board is completed by transferring the coordinates of the position detected by the optical pattern inspection machine and the detection items to the defect confirmation machine and performing confirmation work in the order of detection. It is a thing.

【0007】[0007]

【発明が解決しようとする課題】ところで、プリント配
線板には第図4に示すような、ラインコーナー部12や
スルーホールパット首部13のような箇所に発生した断
線又は欠けは修正不可であり、また修正が認められたと
しても修正許容数がある。従来は光学式パターン検査機
2により検出された順に従い、確認機3で確認作業を行
っていた。しかしながら、従来の方式では確認作業の一
番最後に修正不可の欠陥が現れる場合があり、非効率的
である。
By the way, in the printed wiring board, the disconnection or the chipping which has occurred in the line corner portion 12 and the through hole pad neck portion 13 as shown in FIG. 4 cannot be corrected. Even if the correction is approved, there is the allowable number of corrections. Conventionally, the confirmation work was performed by the confirmation device 3 in accordance with the order of detection by the optical pattern inspection device 2. However, in the conventional method, an uncorrectable defect may appear at the end of the confirmation work, which is inefficient.

【0008】本発明は、プリント配線板の配線パターン
の検査を効率的に行う方法と、その方法に使用する装置
を提供することを目的とする。
It is an object of the present invention to provide a method for efficiently inspecting a wiring pattern on a printed wiring board and an apparatus used for the method.

【0009】[0009]

【課題を解決するための手段】本発明のプリント配線板
の検査方法は、プリント配線板の光学的特性を利用し、
配線パターンに発生した欠陥を検出する光学式パターン
検査機1と、これにより得られた検出箇所の座標データ
と検出項目を使用して、検出箇所の確認を行うための欠
陥確認機2を使用したプリント配線板の検査装置におい
て、予め特定の欠陥の発生禁止領域とプリント配線板の
1面に許容された欠陥数を定め、検出箇所が発生禁止領
域に存在したり、特定の項目の検出箇所が予め定められ
た1枚のプリント配線板に許容される数を超えた場合
に、これらの箇所を他に検出された箇所よりも優先して
確認することを特徴とする。
A method for inspecting a printed wiring board according to the present invention utilizes the optical characteristics of the printed wiring board,
An optical pattern inspecting machine 1 for detecting a defect generated in a wiring pattern, and a defect confirming machine 2 for confirming the detected place by using the coordinate data and the detected item of the detected place obtained by this are used. In a printed wiring board inspection device, a predetermined defect occurrence prohibited area and the number of defects allowed on one surface of the printed wiring board are set in advance, and a detection location exists in the occurrence prohibited area or a detection location of a specific item is detected. It is characterized in that when the number exceeds a predetermined number permitted for one printed wiring board, these places are confirmed with priority over other detected places.

【0010】検出箇所の確認の順番は、特定の欠陥の発
生禁止領域で検出された箇所を最優先とし、次に予め定
めたプリント配線板の1面に許容される特定の欠陥と
し、最後に予め定めた検査領域での検出箇所とすること
ができる。
The order of confirming the detection points is to give the highest priority to the points detected in the specific defect generation prohibited area, then to the predetermined specific defect permitted on one surface of the printed wiring board, and finally It can be a detection point in a predetermined inspection area.

【0011】このような方法に使用できる装置として
は、第図1に示すように、光学式パターン検査機1から
検出箇所の座標と検出項目を確認機2に転送する従来の
検査装置において、検出箇所の座標と検出項目を編集す
るためのデータ編集機3を設けるものが使用できる。
As an apparatus which can be used for such a method, as shown in FIG. 1, in the conventional inspection apparatus which transfers the coordinates of the detection point and the detection item from the optical pattern inspection machine 1 to the confirmation machine 2, A device provided with a data editing machine 3 for editing the coordinates of the location and the detection item can be used.

【0012】本発明においては、光学式パターン検査機
と確認機及び検出箇所の座標と検出項目のデータを編集
するために、光学式パターン検査機のパーソナルコンピ
ュータを使用することが好ましい。
In the present invention, it is preferable to use a personal computer of the optical pattern inspection machine in order to edit the optical pattern inspection machine, the confirmation machine, and the coordinates of the detection points and the data of the detection items.

【0013】[0013]

【作用】本発明の方法及び装置により、検出された箇所
すべてを確認することなく良否の判定を行うことがで
き、プリント配線板の検査を効率的に行うことができ
る。
According to the method and apparatus of the present invention, the quality can be determined without checking all the detected locations, and the printed wiring board can be efficiently inspected.

【0014】[0014]

【実施例】光学式パターン検査機から検出箇所の座標デ
ータを入力する。データ編集装置にPC−9801EX
を使用し、プログラムとして、図2に示すフローチャー
トのプログラムとして第図2に示すフローチャートのプ
ログラムを用いた。パーソナルコンピュータに、特定の
欠陥の発生禁止領域で検出した箇所の座標を格納するエ
リアを、特定の欠陥の発生禁止領域以外の領域で検出し
た箇所の座標と検出項目を格納するエリアを設定し、光
学式パターン検査機により検出された箇所の座標と検出
項目を設定と比較してそれぞれのエリアに格納する。特
定の欠陥の発生禁止領域以外の領域で、特定の欠陥の数
を蓄積し、プリント配線板の1面に許容される数を超え
たことを判定するには、上述の操作と関連付け、特定の
欠陥が検出された時のみ特定の記憶エリアに1を加え、
その数が設定値を超えたか否かを判断するプログラムを
設ける。確認機に送るデータの順番は、特定の欠陥の発
生禁止領域に検出された箇所の座標データを最優先と
し、次に特定の欠陥の発生禁止領域以外の領域で検出さ
れた箇所の座標と検出項目とし、最後に検査領域で検出
された上述以外の検出箇所の座標と検出項目とする。
[Example] Coordinate data of a detection location is input from an optical pattern inspection machine. PC-9801EX for data editing device
2 was used as the program, and the program of the flowchart shown in FIG. 2 was used as the program of the flowchart shown in FIG. In the personal computer, set the area that stores the coordinates of the location detected in the specific defect occurrence prohibited area, the area that stores the coordinates of the location detected in the area other than the specific defect occurrence prohibited area, and the detection item, The coordinates of the location detected by the optical pattern inspection machine and the detection items are compared with the settings and stored in the respective areas. In order to accumulate the number of specific defects in an area other than the specific defect generation prohibited area and determine that the number exceeds the allowable number for one surface of the printed wiring board, it is necessary to correlate with the above-mentioned operation and execute the specific operation. Only add 1 to a specific storage area when a defect is detected,
A program is provided to determine whether the number exceeds the set value. Regarding the order of data sent to the confirmation device, the coordinate data of the location detected in the specific defect occurrence prohibited area has the highest priority, and then the coordinates and the location of the location detected in the area other than the specific defect occurrence prohibited area are detected. The items are the coordinates of the detection points other than those described above and the detection items that are finally detected in the inspection area.

【0015】[0015]

【発明の効果】以上に説明したように、本発明によって
プリント配線板の検査を効率的に行う方法と、その方法
に使用する装置を提供することができる。
As described above, the present invention can provide a method for efficiently inspecting a printed wiring board and an apparatus used for the method.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例を示す概略図である。FIG. 1 is a schematic view showing an embodiment of the present invention.

【図2】本発明の一実施例に用いたプログラムのフロー
を示すフローチャートである。
FIG. 2 is a flowchart showing a flow of a program used in an embodiment of the present invention.

【図3】本発明の一実施例を説明するための配線パター
ンの欠陥を有するプリント配線板の斜視図である。
FIG. 3 is a perspective view of a printed wiring board having a defect in a wiring pattern for explaining an embodiment of the present invention.

【図4】本発明の一実施例を説明するための配線パター
ンの欠陥を有するプリント配線板の上面図である。
FIG. 4 is a top view of a printed wiring board having a wiring pattern defect for explaining one embodiment of the present invention.

【符号の説明】[Explanation of symbols]

1.プリント配線板 2.光学式パター
ン検査機 3.確認機 4.データ編集機 5.断線 6.欠け 7.細り 8.ピンホール 9.短絡 10.残銅 11.突起 12.ラインコー
ナー部 13.スルーホールパット首部
1. Printed wiring board 2. Optical pattern inspection machine 3. Confirmation machine 4. Data editor 5. Disconnection 6. Chip 7. Thinning 8. Pinhole 9. Short circuit 10. Residual copper 11. Protrusion 12. Line corner section 13. Through hole pad neck

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】プリント配線板の光学的特性を利用し、配
線パターンに発生した欠陥を検出する光学式パターン検
査機と、これにより得られた検出箇所の座標データと検
出項目を使用して、検出箇所の確認を行うための欠陥確
認機を使用したプリント配線板の検査装置において、予
め定めた検査領域で特定の欠陥の発生禁止領域を定める
方法。
1. An optical pattern inspecting device for detecting a defect generated in a wiring pattern by using optical characteristics of a printed wiring board, and coordinate data and detection items of a detection position obtained by the optical pattern inspecting device. A method for determining a specific defect generation prohibited area in a predetermined inspection area in a printed wiring board inspection apparatus using a defect confirmation device for confirming a detection location.
【請求項2】検査したプリント配線板の検出箇所が特定
の欠陥の発生禁止領域である場合に、優先して確認作業
を行うことを目的とした請求項1に記載のプリント配線
板の検査装置。
2. The printed wiring board inspecting device according to claim 1, wherein the inspection work is prioritized when the detected location of the inspected printed wiring board is a specific defect generation prohibited area. .
【請求項3】プリント配線板の光学的特性を利用し、配
線パターンに発生した欠陥を検出する光学式パターン検
査機2と、これにより得られた検出箇所の座標データと
検出項目を使用して、検出箇所の確認を行うための欠陥
確認機3を使用したプリント配線板の検査装置におい
て、プリント配線板の1面に許容された数を定める方
法。
3. An optical pattern inspecting device 2 for detecting a defect occurring in a wiring pattern by utilizing the optical characteristics of a printed wiring board, and coordinate data and detection items of detection points obtained by the optical pattern inspecting device 2. In a printed wiring board inspecting apparatus using a defect checking device 3 for checking a detection location, a method for determining the number allowed on one surface of the printed wiring board.
【請求項4】検査したプリント配線板の検出箇所がプリ
ント配線板の1面に許容された数を超えた場合に、検査
領域の検出箇所よりも優先して確認作業を行うことを目
的とした請求項3に記載のプリント配線板の検査装置。
4. When the number of inspected printed wiring boards detected exceeds the number allowed on one surface of the printed wiring board, the purpose is to perform confirmation work prior to the detected areas in the inspection area. The printed wiring board inspection device according to claim 3.
【請求項5】検査を行うプリント配線板1に光学式パタ
ーン検査機2を適用し、それにより得られた検出箇所の
座標データ及び検出項目を、予め特定の欠陥の発生禁止
領域と、プリント配線板の1面に許容された数を定めた
データ編集機4に入力し、確認機への出力を制御するこ
とを特徴としたプリント配線板の検査装置。
5. An optical pattern inspection machine 2 is applied to a printed wiring board 1 to be inspected, and coordinate data and detection items of detection points obtained by the inspection are set in advance in a specific defect generation prohibited area and a printed wiring board. An inspection device for a printed wiring board, characterized in that the number of data permitted on one surface of a board is input to a data editing machine 4 and the output to a confirmation machine is controlled.
JP27422392A 1992-10-13 1992-10-13 Method for inspecting printed wiring board and device Pending JPH06123709A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27422392A JPH06123709A (en) 1992-10-13 1992-10-13 Method for inspecting printed wiring board and device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27422392A JPH06123709A (en) 1992-10-13 1992-10-13 Method for inspecting printed wiring board and device

Publications (1)

Publication Number Publication Date
JPH06123709A true JPH06123709A (en) 1994-05-06

Family

ID=17538743

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27422392A Pending JPH06123709A (en) 1992-10-13 1992-10-13 Method for inspecting printed wiring board and device

Country Status (1)

Country Link
JP (1) JPH06123709A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019522180A (en) * 2016-05-09 2019-08-08 オックスフォード インストルメンツ ナノテクノロジー ツールス リミテッド Improved analysis using preliminary surveys

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019522180A (en) * 2016-05-09 2019-08-08 オックスフォード インストルメンツ ナノテクノロジー ツールス リミテッド Improved analysis using preliminary surveys

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