JPH0584657B2 - - Google Patents

Info

Publication number
JPH0584657B2
JPH0584657B2 JP61077188A JP7718886A JPH0584657B2 JP H0584657 B2 JPH0584657 B2 JP H0584657B2 JP 61077188 A JP61077188 A JP 61077188A JP 7718886 A JP7718886 A JP 7718886A JP H0584657 B2 JPH0584657 B2 JP H0584657B2
Authority
JP
Japan
Prior art keywords
magnetic field
magnetic
substrate
substrate holder
film forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP61077188A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62232911A (ja
Inventor
Mitsuhiro Kamei
Keiji Arimatsu
Hidetsugu Setoyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP7718886A priority Critical patent/JPS62232911A/ja
Publication of JPS62232911A publication Critical patent/JPS62232911A/ja
Publication of JPH0584657B2 publication Critical patent/JPH0584657B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Thin Magnetic Films (AREA)
JP7718886A 1986-04-03 1986-04-03 磁性膜形成装置 Granted JPS62232911A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7718886A JPS62232911A (ja) 1986-04-03 1986-04-03 磁性膜形成装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7718886A JPS62232911A (ja) 1986-04-03 1986-04-03 磁性膜形成装置

Publications (2)

Publication Number Publication Date
JPS62232911A JPS62232911A (ja) 1987-10-13
JPH0584657B2 true JPH0584657B2 (enrdf_load_stackoverflow) 1993-12-02

Family

ID=13626840

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7718886A Granted JPS62232911A (ja) 1986-04-03 1986-04-03 磁性膜形成装置

Country Status (1)

Country Link
JP (1) JPS62232911A (enrdf_load_stackoverflow)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01294859A (ja) * 1988-05-23 1989-11-28 Hitachi Ltd 対向ターゲツト式スパツタリング装置
US5630916A (en) * 1993-03-02 1997-05-20 Cvc Products, Inc. Magnetic orienting device for thin film deposition and method of use
GB9609470D0 (en) * 1996-05-07 1996-07-10 Nordiko Ltd Magnet array
US6106682A (en) * 1998-05-22 2000-08-22 Cvc Products, Inc. Thin-film processing electromagnet for low-skew magnetic orientation
US6042707A (en) * 1998-05-22 2000-03-28 Cvc Products, Inc. Multiple-coil electromagnet for magnetically orienting thin films
JP4648876B2 (ja) * 2006-06-28 2011-03-09 信越化学工業株式会社 径方向磁場発生用磁気回路
CN107313019B (zh) * 2017-07-14 2019-11-29 北京北方华创微电子装备有限公司 磁性薄膜沉积腔室及薄膜沉积设备

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60182711A (ja) * 1984-02-29 1985-09-18 Konishiroku Photo Ind Co Ltd 磁性薄膜の形成方法およびその装置

Also Published As

Publication number Publication date
JPS62232911A (ja) 1987-10-13

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees