JPH0580256A - Infrared microscope - Google Patents

Abstract

PURPOSE:To facilitate mode switching and to provide safety for an observer by providing a lock mechanism so that a sample light switch does not send sample light to an ocular while an irradiation light switch irradiates a sample with infrared rays. CONSTITUTION:In the infrared microscope equipped with the irradiation light switch which irradiates the sample with visible light or infrared rays selectively and the sample light switch which sends the sample light from the sample to the ocular for naked-eye observation or an infrared detection device selectively, the lock mechanism allows the sample to be irradiated with only the visible light without fail while the light from the sample is guided to the ocular. Namely, a switching mirror 19 for sending light to the ocular moves on a rail 33 and when it is switched to an IN position by a lever 34, a lower switching mirror 18 which guides the infrared rays to the sample is pressed by an associative bar 35 and fixed at an OUT position off the optical axis.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an infrared microscope capable of observing visible light and simultaneously performing spectroscopic analysis of a minute region by infrared light.

[0002]

2. Description of the Related Art In an infrared microscope, depending on the type of light used, (1) a visible light mode for observing with visible light,
(2) There are two types of modes, infrared mode for performing spectroscopic analysis by infrared rays, and for each of these modes,
Two modes are used by switching between two modes: (a) a transmission mode for observing and measuring light or infrared rays transmitted through the sample, and (b) a reflection mode for observing and measuring light or infrared rays reflected on the sample surface. Therefore, the infrared microscope as a whole operates in four modes: (A) observation of transmitted light by visible light, (B) observation of reflected light by visible light, (C) measurement of transmitted light by infrared ray, and (D) measurement of reflected light by infrared ray. You can do it.

In order to switch between these modes, in the conventional infrared microscope 10, as shown in FIG. 4, four switching mirrors 16, 17, 18, 19 and 2 provided in the main body of the microscope are used.
Individual visible light sources 20, 21 were used. The states of the switching mirror and the light source in each of the above modes are as follows.

(A) Observation of transmitted light by visible light The transmitted light source 20 arranged below the microscope main body is turned on, the switching mirror 17 is put in the optical path as shown by the solid line, and the sample 14 is placed from the bottom. Irradiate with visible light. The switching mirror 18 immediately above the sample 14 is removed from the optical path as shown by the dotted line, and the switching mirror 19 on it is put in the optical path as shown by the solid line. The light transmitted through the sample is the upper switching mirror 19
Is reflected to the left by the half mirror 23 and the prism 2.
It is led to the eyepiece lens 12 through the lens 4.

(B) Observing Reflected Light by Visible Light The reflected light source 21 arranged above the microscope main body is turned on, the switching mirror 19 is put in the optical path as shown by the solid line, and the switching mirror 18 is shown by the dotted line. To remove it from the optical path.
The visible light from the reflected light source 21 is applied to the sample 14 via the half mirror 23 and the switching mirror 19, and the light reflected by the sample is sent to the eyepiece 12 through the switching mirror 19, the half mirror 23 and the prism 24. Be done.

(C) In the case of transmitted light measurement by infrared rays: Infrared rays generated by an infrared light source (including an interferometer) (not shown) are introduced from an infrared ray introduction port 11 at the rear of the main body, and the infrared rays are switched by an infrared switching mirror 16 below Reflect on. The switching mirror 17, the switching mirror 18, and the switching mirror 19 are all removed from the optical path as shown by the dotted line. The infrared rays are irradiated onto the sample 14 from below by the reflecting mirrors 25, 26 and 27, and the infrared rays transmitted through the sample 14 are reflected by the reflecting mirror 2 on the upper part of the body.
It is sent to the infrared detector 13 by 8, 29 and 30. The infrared detector 13 performs processing such as Fourier transform spectroscopy on the received infrared light to measure the physical properties of the sample 14.

(D) In the case of measurement of reflected light by infrared rays Infrared rays are introduced from the infrared introducing port 11 at the rear of the main body and reflected by the infrared switching mirror 16 to the upper side of the main body. Place the switching mirror 18 in the half mirror position as shown by the solid line,
The switching mirror 19 is removed from the optical path as shown by the dotted line. The infrared rays are radiated onto the sample 14 from above by the reflecting mirrors 32 and 31 and the switching mirror 18 located at the half mirror position. The infrared light reflected by the sample 14 passes through a portion not blocked by the switching mirror 18, and is reflected by the reflecting mirrors 28, 29, 3
0 is sent to the infrared detector 13.

[0008]

Conventionally, four switching mirrors 16, 17, 1 are used to switch between the respective modes as described above.
This is performed by manually switching the visible light sources 20, 21 and the visible light sources 20, 21 independently of each other. Therefore, the operation for switching the mode is complicated, and if even one of the switching mirrors is operated incorrectly, it will not be applicable to any of the modes and will not be able to perform correct observation and measurement. May cause a state in which infrared rays are guided toward the eyepiece lens 12.
Usually, infrared rays sent from an infrared light source including an interferometer contain laser light for controlling the interference state, and therefore it must be prevented from entering the eyes of an observer. Therefore, conventionally, it has been necessary to provide a mechanism for blocking the laser in the infrared introducing port 11.

The present invention has been made to solve the above problems, and an object of the present invention is to easily switch modes and, in particular, to an infrared microscope equipped with a safety mechanism for an observer. To provide.

[0010]

SUMMARY OF THE INVENTION In the present invention made to solve the above problems, a) an irradiation light switching device for selectively irradiating a sample with visible light or infrared light; and b) In an infrared microscope equipped with a sample light switch for selectively sending sample light including visible light and infrared light from the sample to either an eyepiece lens for eye observation or an infrared detection device, c) irradiation A mechanism for interlocking the light switching device and the sample light switching device such that the irradiation light switching device is set to irradiate the sample with infrared light, and the sample light switching device sends the sample light to the eyepiece lens. The present invention is characterized in that a lock mechanism is provided so that the set state and the set state cannot occur at the same time.

[0011]

When the light from the sample (the "light" here includes visible light and infrared light) is guided to the eyepiece, the locking mechanism of c) irradiates the sample with only visible light. Not done. This prevents the infrared rays from entering the eyes of the observer.

[0012]

EXAMPLE An example in which the present invention is applied to the infrared microscope 10 of FIG. 4 will be described. 1 and 2 show a mechanism for interlocking the four switching mirrors 16, 17, 18, 19 of the infrared microscope shown in FIG. Before explaining this mechanism, four switching mirrors 16, 17, 18, 19 and two visible light sources 2 in the four modes (A) to (D) are described.
The states of 0 and 21 are shown in a list in FIG. In FIG. 3, T
Is the transmission mode position of the infrared switching mirror 16 (inlet 11
R indicates that it is in a position that reflects infrared rays coming in from below, and R indicates that it is in a reflection mode position (a position that reflects infrared rays in an upward direction). The other three switching mirrors 1
Regarding 7, 18, and 19, IN indicates that the switching mirror is in the optical path (position shown by the solid line in FIG. 4), and OUT indicates that it is outside the optical path (position shown by the dotted line in FIG. 4). There is.
HALF indicates that the switching mirror 18 is at the half mirror position (the position indicated by the solid line in FIG. 4). Regarding the light sources 20 and 21, ON indicates that they are on, and OFF indicates that they are off. It should be noted that the portion enclosed in parentheses () may be in any state, but in the present embodiment, it is indicated that it is in parentheses.

As is clear from the table shown in FIG.
In each mode, each switching mirror 16, 17, 18,
19 are not set apart at all, but there is a relationship between them.

(I) First, in the case of observing with visible light (mode A and mode B), it is necessary to set the switching mirror 19 to the IN position in order to guide the light to the eyepiece 12, but for safety. From this point of view, the switching mirror 18 is set to OU so that infrared rays do not reach the eyepiece at this time.
As T, it is necessary to prevent the sample 14 from being irradiated with infrared rays. Therefore, it is necessary to provide an interlocking mechanism in which the switching mirror 18 is always OUT when the switching mirror 19 is IN.

(Ii) Next, when observing in visible light with a transmission mode (mode A), the switching mirror 17 must be IN.
It is necessary to place the switch mirror 19 in the IN position and the switching mirror 19 must also be placed in the IN position. In addition, when measuring in transmission mode with infrared rays (mode C), the switching mirror 17 must be used.
It is necessary to place it at the OUT position, and the switching mirror 19 must be OUT
Must be placed in the position. Otherwise, switch mirror 1
The position of 9 does not matter. Therefore, the switching mirror 1
9 can be completely interlocked with the switching mirror 17.

(Iii) Furthermore, the case where the switching mirror 18 comes to the half mirror position HALF can be only in the infrared measurement mode (mode D) by reflected light. At this time, the infrared switching mirror 16 is set to the R position. There is a need.
In other modes (modes A, B, and C), the switching mirror 18 must be set to OUT, but all the infrared switching mirrors 16 can be set to the T position (of these, the T position must be set to the T position). Mode C does not become
Only). Therefore, the infrared switching mirror 16 can be interlocked with the switching mirror 18.

Based on the above conditions, the interlocking mechanism as shown in FIGS. 1 and 2 is adopted in this embodiment. The switching mirror 19 for sending light to the eyepiece lens is movable on the rail 33, and the lever 34 operates to switch between its IN position and OUT position. The interlocking bar 35 descends from the switching mirror 19 to the switching mirror 18 below. The lower switching mirror 18 is movable on the rail 36,
The HALF position and the OUT position can be switched by the lever 37. However, as shown in FIG. 2, when the upper switching mirror 19 is in the IN position, the lower switching mirror 18 is
Is pressed by the interlocking bar 35 and fixed at the OUT position.
Cannot be in F position. That is, the interlocking bar 35
Thus, the above condition (i) is satisfied.

Next, when the upper switching mirror 19 comes to the IN position as shown in FIG. 2, the trigger of the micro switch 38 is pushed to turn it on. Although not shown, the switching mirror 17 can be moved by a motor, and the micro switch 38 is interlocked with the drive motor of the switching mirror 17. Then, when the micro switch 38 is turned on, the motor is driven so that the switching mirror 17 becomes in.
On the contrary, as shown in FIG. 1, when the switching mirror 19 is retracted to the OUT position and the micro switch 38 is turned off, the motor moves the switching mirror 17 to the OUT position. This allows
The above condition (ii) is satisfied.

Finally, a micro switch 39 is also provided in front of the switching mirror 18, and the micro switch 39 is connected to a motor (not shown) for driving the infrared switching mirror 16. Then, as shown in FIG. 1, when the switching mirror 18 is placed in the HALF position, the micro switch 39 is turned on, and the infrared switching mirror 16 is placed in the R position. On the contrary, as shown in FIG.
When placed in the position, the micro switch 39 is turned off, and the infrared switching mirror 16 is driven to the T position. As a result, the above condition (iii) is satisfied.

Regarding the visible light sources 20 and 21,
It may be manually operated separately, or may be interlocked with the microswitch 38 or 39 for further convenience.

In the above description, each switching mirror is moved in and out of the optical path by parallel movement, but this changes the optical path of visible light or infrared light by rotating each mirror or controlling the reflectance. You may do it. Further, in the above embodiment, a mechanical mechanism called an interlocking bar is used for a part of the interlocking mechanism, and an electric mechanism by a micro switch and a motor is adopted for a part of the interlocking mechanism. The mechanism may be a mechanism, or all may be an electrical interlocking mechanism.

[0022]

In the infrared microscope according to the present invention, when the light from the sample is guided to the eyepiece lens by the lock mechanism in which the irradiation light switch and the sample light switch are interlocked, the sample is always Only visible light is emitted. This prevents infrared rays and the accompanying laser light for interference control from entering the eyes of an observer due to an erroneous operation of mode switching. Also, based on this lock mechanism, by further interlocking with other switching devices such as mirrors, the operation for mode switching is simplified, and it is easy to operate by operating a smaller number of changeover switches than before. It becomes possible to switch to the desired mode.

[Brief description of drawings]

FIG. 1 is an explanatory diagram of a switching mirror interlocking mechanism of an infrared microscope according to an embodiment of the present invention when a switching mirror 19 is at an OUT position.

FIG. 2 is an explanatory diagram of the switching mirror interlocking mechanism of the embodiment when the switching mirror 19 is at the IN position.

FIG. 3 is a diagram showing a state table of four switching mirrors and two visible light sources in each mode of the infrared microscope of the embodiment.

FIG. 4 is a sectional view showing the structure of an infrared microscope.

[Explanation of symbols]

10 ... Infrared microscope 11 ... Infrared inlet 12 ... Eyepiece 13 ... Infrared detector 14 ... Sample 16 ... Infrared switching mirror 17, 18, 1
9 ... Switching mirror 20 ... Transmitted light source 21 ... Reflected light source 34, 37 ... Lever 35 ... Interlocking bar (lock mechanism) 38, 39 ... Micro switch

Claims (1)

[Claims] 1. A) an irradiation light switching device for selectively irradiating a sample with visible light or infrared light, and b) an eyepiece for observing the sample light containing visible light and infrared light from the sample with the naked eye. In an infrared microscope equipped with a sample light switch for selectively sending to either a lens or an infrared detection device, c) a mechanism for interlocking the irradiation light switch and the sample light switch, A lock mechanism is provided to prevent the state where the light switch is set to irradiate the sample with infrared rays and the state where the sample light switch is set to send the sample light to the eyepiece at the same time. An infrared microscope characterized by.