JPH0578027B2 - - Google Patents

Info

Publication number
JPH0578027B2
JPH0578027B2 JP1089135A JP8913589A JPH0578027B2 JP H0578027 B2 JPH0578027 B2 JP H0578027B2 JP 1089135 A JP1089135 A JP 1089135A JP 8913589 A JP8913589 A JP 8913589A JP H0578027 B2 JPH0578027 B2 JP H0578027B2
Authority
JP
Japan
Prior art keywords
support frame
thin film
film
photomask
thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1089135A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0262A (ja
Inventor
Etsuo Ootake
Kaoru Yamaki
Takayuki Kuroda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daicel Corp
Original Assignee
Daicel Chemical Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daicel Chemical Industries Ltd filed Critical Daicel Chemical Industries Ltd
Priority to JP1089135A priority Critical patent/JPH0262A/ja
Publication of JPH0262A publication Critical patent/JPH0262A/ja
Publication of JPH0578027B2 publication Critical patent/JPH0578027B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP1089135A 1989-04-07 1989-04-07 フォトマスクカバー Granted JPH0262A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1089135A JPH0262A (ja) 1989-04-07 1989-04-07 フォトマスクカバー

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1089135A JPH0262A (ja) 1989-04-07 1989-04-07 フォトマスクカバー

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP57103488A Division JPS58219023A (ja) 1982-06-15 1982-06-15 樹脂薄膜の製造方法

Publications (2)

Publication Number Publication Date
JPH0262A JPH0262A (ja) 1990-01-05
JPH0578027B2 true JPH0578027B2 (en, 2012) 1993-10-27

Family

ID=13962437

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1089135A Granted JPH0262A (ja) 1989-04-07 1989-04-07 フォトマスクカバー

Country Status (1)

Country Link
JP (1) JPH0262A (en, 2012)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100910657B1 (ko) * 2007-02-23 2009-08-05 박현진 신규한 락토바실러스 브츠네리 및 이의 용도
KR100919852B1 (ko) * 2007-11-15 2009-09-30 한국 한의학 연구원 해방풍 추출물을 유효성분으로 함유하는 부종 또는 피부염예방 및 치료용 조성물
LT5905B (lt) 2011-05-13 2013-02-25 Ernest Vardanian Pagalbinė plaukimo priemonė

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6131331Y2 (en, 2012) * 1979-10-09 1986-09-11
US4255216A (en) * 1980-01-14 1981-03-10 International Business Machines Corporation Pellicle ring removal method and tool

Also Published As

Publication number Publication date
JPH0262A (ja) 1990-01-05

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