JPH0570715B2 - - Google Patents
Info
- Publication number
- JPH0570715B2 JPH0570715B2 JP19590585A JP19590585A JPH0570715B2 JP H0570715 B2 JPH0570715 B2 JP H0570715B2 JP 19590585 A JP19590585 A JP 19590585A JP 19590585 A JP19590585 A JP 19590585A JP H0570715 B2 JPH0570715 B2 JP H0570715B2
- Authority
- JP
- Japan
- Prior art keywords
- protective film
- forming
- capacitance
- film
- metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 36
- 238000005260 corrosion Methods 0.000 claims description 32
- 230000007797 corrosion Effects 0.000 claims description 32
- 230000001681 protective effect Effects 0.000 claims description 29
- 238000000034 method Methods 0.000 claims description 22
- 238000011282 treatment Methods 0.000 claims description 22
- 229910052751 metal Inorganic materials 0.000 claims description 17
- 239000002184 metal Substances 0.000 claims description 17
- 238000007654 immersion Methods 0.000 claims description 9
- 229910001220 stainless steel Inorganic materials 0.000 claims description 6
- 239000010935 stainless steel Substances 0.000 claims description 6
- 238000005259 measurement Methods 0.000 claims description 5
- 230000015572 biosynthetic process Effects 0.000 claims description 4
- 238000012544 monitoring process Methods 0.000 claims description 3
- 238000012545 processing Methods 0.000 claims description 2
- 239000012212 insulator Substances 0.000 claims 2
- 239000010408 film Substances 0.000 description 73
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 20
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 15
- 239000001301 oxygen Substances 0.000 description 15
- 229910052760 oxygen Inorganic materials 0.000 description 15
- 239000001257 hydrogen Substances 0.000 description 14
- 229910052739 hydrogen Inorganic materials 0.000 description 14
- 239000000463 material Substances 0.000 description 14
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 13
- 238000002347 injection Methods 0.000 description 12
- 239000007924 injection Substances 0.000 description 12
- 230000003647 oxidation Effects 0.000 description 11
- 238000007254 oxidation reaction Methods 0.000 description 11
- 230000007423 decrease Effects 0.000 description 10
- 229910052697 platinum Inorganic materials 0.000 description 10
- 150000002500 ions Chemical class 0.000 description 9
- 230000002285 radioactive effect Effects 0.000 description 8
- 238000010586 diagram Methods 0.000 description 7
- 230000002401 inhibitory effect Effects 0.000 description 7
- 239000007769 metal material Substances 0.000 description 7
- 238000003908 quality control method Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 3
- 230000007935 neutral effect Effects 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 239000003792 electrolyte Substances 0.000 description 2
- 230000002829 reductive effect Effects 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 239000008151 electrolyte solution Substances 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 150000004678 hydrides Chemical class 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N iron oxide Inorganic materials [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 1
- 235000013980 iron oxide Nutrition 0.000 description 1
- VBMVTYDPPZVILR-UHFFFAOYSA-N iron(2+);oxygen(2-) Chemical class [O-2].[Fe+2] VBMVTYDPPZVILR-UHFFFAOYSA-N 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000012788 optical film Substances 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 238000003608 radiolysis reaction Methods 0.000 description 1
- 238000006722 reduction reaction Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
Landscapes
- Chemical Treatment Of Metals (AREA)
- Preventing Corrosion Or Incrustation Of Metals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19590585A JPS6256581A (ja) | 1985-09-06 | 1985-09-06 | 金属表面に保護皮膜を形成する方法及び装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19590585A JPS6256581A (ja) | 1985-09-06 | 1985-09-06 | 金属表面に保護皮膜を形成する方法及び装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6256581A JPS6256581A (ja) | 1987-03-12 |
| JPH0570715B2 true JPH0570715B2 (enrdf_load_stackoverflow) | 1993-10-05 |
Family
ID=16348933
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19590585A Granted JPS6256581A (ja) | 1985-09-06 | 1985-09-06 | 金属表面に保護皮膜を形成する方法及び装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6256581A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2022155731A (ja) * | 2021-03-31 | 2022-10-14 | 日鉄ステンレス株式会社 | Ｆｅ－Ｃｒ合金およびその製造方法 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH029028A (ja) * | 1988-06-27 | 1990-01-12 | Nec Corp | 光ピックアップ装置 |
| EP0517288B1 (en) * | 1991-04-29 | 1996-04-10 | Koninklijke Philips Electronics N.V. | Diffusion barrier enhancement in metallization structure for semiconductor device fabrication |
-
1985
- 1985-09-06 JP JP19590585A patent/JPS6256581A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2022155731A (ja) * | 2021-03-31 | 2022-10-14 | 日鉄ステンレス株式会社 | Ｆｅ－Ｃｒ合金およびその製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6256581A (ja) | 1987-03-12 |
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