JPH0563773B2 - - Google Patents
Info
- Publication number
- JPH0563773B2 JPH0563773B2 JP30803186A JP30803186A JPH0563773B2 JP H0563773 B2 JPH0563773 B2 JP H0563773B2 JP 30803186 A JP30803186 A JP 30803186A JP 30803186 A JP30803186 A JP 30803186A JP H0563773 B2 JPH0563773 B2 JP H0563773B2
- Authority
- JP
- Japan
- Prior art keywords
- measurement light
- light beam
- reflected
- objective lens
- optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000005259 measurement Methods 0.000 claims description 79
- 230000003287 optical effect Effects 0.000 claims description 70
- 230000007246 mechanism Effects 0.000 claims description 50
- 238000000034 method Methods 0.000 claims description 9
- 230000004907 flux Effects 0.000 description 15
- 238000003384 imaging method Methods 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 4
- 238000001514 detection method Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000007935 neutral effect Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30803186A JPS63163315A (ja) | 1986-12-25 | 1986-12-25 | 非接触自動焦点位置合わせ方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30803186A JPS63163315A (ja) | 1986-12-25 | 1986-12-25 | 非接触自動焦点位置合わせ方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63163315A JPS63163315A (ja) | 1988-07-06 |
| JPH0563773B2 true JPH0563773B2 (de) | 1993-09-13 |
Family
ID=17976053
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP30803186A Granted JPS63163315A (ja) | 1986-12-25 | 1986-12-25 | 非接触自動焦点位置合わせ方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63163315A (de) |
-
1986
- 1986-12-25 JP JP30803186A patent/JPS63163315A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63163315A (ja) | 1988-07-06 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| LAPS | Cancellation because of no payment of annual fees |