JPH0562099U - Electronic device storage chamber - Google Patents

Abstract

(57) [Abstract] [Purpose] To provide a storage chamber capable of magnetically shielding electronic equipment such as an electron beam drawing apparatus and controlling the temperature. [Constitution] The outer wall of the chamber body (12) is formed by a double-structured plate body (9) (10) (11) (13) having magnetic shielding and heat insulation properties, and this chamber body (12) An air conditioner (4) for air conditioning inside, a fan (5) for blowing air
And install the air filter (7). The plate members (9) (10) (11) (13) having the above double structure are composed of inner plates (14A) (14B) made of a magnetic shield material and outer plates (15A) (15A) (joined to their outer surfaces). 15B) and the inner plate (14
By filling a heat insulating material (16) between (A) and (14B), it is provided with a shielding property and a heat insulating property against external magnetism.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to a storage chamber for an electronic device, and more particularly, to a storage chamber for an electronic device that has magnetic shielding and heat insulation properties for an electronic device installed in the storage chamber.

[0002]

[Prior Art]

 In manufacturing a semiconductor device, an electron beam drawing apparatus is used to form a film-forming pattern or the like on the surface of a semiconductor wafer. 2. Description of the Related Art In recent years, with the miniaturization and high integration of semiconductor devices, fine patterning by electron beam drawing devices is progressing. On the other hand, in the electron beam writing system, because the writing process is performed by irradiating the electron beam on the semiconductor wafer, if the magnetic field is applied from the outside, the external magnetic field bends the electron beam to prevent fine patterning. Will be. In order to prevent this, heretofore, as shown in FIG. 2, an electron beam drawing device (1) has been conventionally manufactured with a ferromagnetic plate (2) such as permalloy having a magnetic shielding property. It is completely shielded from the external magnetic field by being housed in the chamber body (3). Further, in the electron beam drawing apparatus (1), the electron beam drawing apparatus (1) is used because the semiconductor wafer is positioned using laser interference and the accuracy of the semiconductor wafer itself and the internal mechanism is improved. It is necessary to maintain a constant temperature. Therefore, the entire chamber body (3) accommodating the electron beam drawing device (1) is installed in a clean room (20) with an air conditioning facility (not shown), and the temperature is controlled by the air conditioning facility. Is.

[0003]

[Problems to be solved by the device]

 By the way, conventionally, the chamber body (3) accommodating the electron beam drawing apparatus (1) is constituted only by the plate body (2) having a magnetic shield property, and the temperature of the electron beam drawing apparatus (1) is controlled. In addition to the chamber body (3), a large air conditioner must be installed in the clean room (20). If the magnetic shield of the electron beam writing system () and temperature control are separate, there was a problem that the capital investment cost would also rise. In addition to the electron beam drawing device (1), the above problem can be recognized not only in an electronic device that needs a shield from an external magnetic field and accurate temperature control, such as a high-precision electron microscope.

[0004]

[Means for Solving the Problems]

 As a means for solving the above problems, the present invention is characterized in that the outer wall of the chamber body is formed by a double-structured plate body having a magnetic shield property and a heat insulating property, and an air conditioning mechanism is incorporated in the chamber body. To do.

Further, it is desirable that the plate body having the double structure is configured by filling a heat insulating material between two plates made of a magnetic shield material.

Further, it is desirable that the plate body provided in the front opening of the chamber body can be opened and closed for loading and unloading of electronic equipment.

[0007]

[Action]

 The outer wall of the chamber body is made of a double-layered plate with high magnetic shielding and heat insulating properties, and an air conditioning mechanism is incorporated into the chamber body to provide magnetic shielding and temperature control functions. Configure a storage chamber equipped to reduce capital investment.

[0008]

【Example】

 An embodiment of a storage chamber of an electronic device according to the present invention will be described with reference to FIG.

In FIG. 1A, (1) is an electron beam drawing apparatus, and (9), (10), (11) and (13) are double structures that form the outer chamber wall of the chamber body (12) [described below]. ] Plate, (4) air conditioner, (5) fan for air blow, (7) air filter, (6) air intake opening, (2A) air outflow pore (8A) is perforated over the entire surface, and is a partition plate made of a ferromagnetic material such as Permalloy having magnetic shielding properties. (2B) is partially provided with pores (8B) for air inflow to provide magnetic shielding properties. It is a partition plate such as Permalloy, which constitutes the air conditioning mechanism.

The double-structure plate bodies (9), (10), (11), and (13) are magnetic shield materials, for example, inner plates made of permalloy, as shown in an enlarged view in FIG. 1 (B). (14A) (14B) and an outer plate (15A) (15B) made of aluminum, for example, which is joined to its outer surface A heat insulating material (16) such as glass fiber or urethane foam resin is filled between the plates (14A) and (14B) to provide shielding and heat insulating properties against an external magnetic field.

The double-structured plate body (9) arranged in the front opening of the chamber body (12) can be partially opened and closed as indicated by a white arrow in FIG. 1 (A). The structure allows the electron beam writing apparatus (1) to be carried in and out of the chamber body (12).

By activating the air conditioner (4) and the fan (5) for blowing air, the electron beam drawing device (1) installed in the partition plates (2A) (2B) of the chamber body (12) Is the air that has been purified by the air filter (7) and is maintained at a predetermined temperature as indicated by the thin arrow in (A) of FIG. 1 and flows through the electron beam drawing apparatus (1) in a predetermined temperature control atmosphere. Hold on. Further, the double-structured plate bodies (9), (10), (11) and (13) cooperate with the partition plates (2A) and (2B) arranged in the chamber body (12) to generate an external magnetic field. The electron beam writer (1) is shielded from the above to maintain the irradiation state of the electron beam on the semiconductor wafer with high accuracy.

[0013]

[Effect of the device]

 According to the present invention, it is possible to realize a storage chamber equipped with both a magnetic shield and temperature control for electronic equipment, and to realize a compact and practically valuable storage chamber for electronic equipment that reduces capital investment. Can be provided.

[Brief description of drawings]

FIG. 1A is a cross-sectional view showing a storage chamber of an electronic device according to the present invention, and FIG. 1B is a partial cross-sectional view showing a double structure plate used for the storage chamber.

FIG. 2 is a sectional view showing a conventional example of a storage chamber of an electronic device.

[Explanation of symbols]

 1 Electronic equipment (electron beam drawing device) 9, 10, 11, 13 Double structure plate 12 Chamber body 14A, 14B Plate (inner plate) 16 Heat insulating material

Claims (3)

[Scope of utility model registration request] 1. A storage chamber for electronic equipment, characterized in that a plate having a double structure having a magnetic shielding property and a heat insulating property forms an outer wall of a chamber body, and an air conditioning mechanism is incorporated in the chamber body. .. 2. The housing of an electronic device according to claim 1, wherein the plate member having a double structure is configured by filling a heat insulating material between two plates made of a magnetic shield material. Chamber. 3. A storage chamber for electronic equipment, wherein the plate body provided in the front opening of the chamber body according to claim 1 is opened and closed for loading and unloading of electronic equipment.