JPH0556014B2 - - Google Patents

Info

Publication number
JPH0556014B2
JPH0556014B2 JP62250886A JP25088687A JPH0556014B2 JP H0556014 B2 JPH0556014 B2 JP H0556014B2 JP 62250886 A JP62250886 A JP 62250886A JP 25088687 A JP25088687 A JP 25088687A JP H0556014 B2 JPH0556014 B2 JP H0556014B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP62250886A
Other versions
JPH0193120A (en
Inventor
Hisahiro Matsukawa
Original Assignee
Tokyo Shibaura Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co filed Critical Tokyo Shibaura Electric Co
Priority to JP62250886A priority Critical patent/JPH0556014B2/ja
Priority claimed from US07/130,215 external-priority patent/US4845530A/en
Publication of JPH0193120A publication Critical patent/JPH0193120A/en
Publication of JPH0556014B2 publication Critical patent/JPH0556014B2/ja
Anticipated expiration legal-status Critical
Application status is Expired - Fee Related legal-status Critical

Links

JP62250886A 1987-10-05 1987-10-05 Expired - Fee Related JPH0556014B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62250886A JPH0556014B2 (en) 1987-10-05 1987-10-05

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP62250886A JPH0556014B2 (en) 1987-10-05 1987-10-05
US07/130,215 US4845530A (en) 1986-12-26 1987-12-08 Reduced projection type step- and repeat-exposure apparatus
KR8714992A KR910001524B1 (en) 1986-12-26 1987-12-26 Reduction stepper

Publications (2)

Publication Number Publication Date
JPH0193120A JPH0193120A (en) 1989-04-12
JPH0556014B2 true JPH0556014B2 (en) 1993-08-18

Family

ID=17214483

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62250886A Expired - Fee Related JPH0556014B2 (en) 1987-10-05 1987-10-05

Country Status (1)

Country Link
JP (1) JPH0556014B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9233553B2 (en) 2000-09-11 2016-01-12 Videojet Technologies (Nottingham) Limited Tape drive and printing apparatus

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4492309B2 (en) * 2004-11-24 2010-06-30 パナソニック株式会社 Inclination measuring method and apparatus
JP4910126B2 (en) * 2006-02-20 2012-04-04 国立大学法人東北大学 3-axis angle sensor

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5918950A (en) * 1982-07-09 1984-01-31 Censor Patent Versuch Apparatus for projection transfer of mask on work piece and adjusting method thereof

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5918950A (en) * 1982-07-09 1984-01-31 Censor Patent Versuch Apparatus for projection transfer of mask on work piece and adjusting method thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9233553B2 (en) 2000-09-11 2016-01-12 Videojet Technologies (Nottingham) Limited Tape drive and printing apparatus

Also Published As

Publication number Publication date
JPH0193120A (en) 1989-04-12

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees