JPH0550494B2 - - Google Patents

Info

Publication number
JPH0550494B2
JPH0550494B2 JP21174284A JP21174284A JPH0550494B2 JP H0550494 B2 JPH0550494 B2 JP H0550494B2 JP 21174284 A JP21174284 A JP 21174284A JP 21174284 A JP21174284 A JP 21174284A JP H0550494 B2 JPH0550494 B2 JP H0550494B2
Authority
JP
Japan
Prior art keywords
parts
compound
solution
present
hydroxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP21174284A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6191156A (ja
Inventor
Kimio Watabe
Masahiro Shiosaki
Kunio Ito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nisso Petrochemical Ind Co Ltd
Original Assignee
Nisso Petrochemical Ind Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nisso Petrochemical Ind Co Ltd filed Critical Nisso Petrochemical Ind Co Ltd
Priority to JP59211742A priority Critical patent/JPS6191156A/ja
Priority to DE8585112572T priority patent/DE3580827D1/de
Priority to AT85112572T priority patent/ATE58972T1/de
Priority to EP85112572A priority patent/EP0177905B1/de
Priority to CA000492431A priority patent/CA1257610A/en
Priority to KR1019850007406A priority patent/KR930010775B1/ko
Priority to US06/785,518 priority patent/US4729941A/en
Publication of JPS6191156A publication Critical patent/JPS6191156A/ja
Publication of JPH0550494B2 publication Critical patent/JPH0550494B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Moulds For Moulding Plastics Or The Like (AREA)
  • Detergent Compositions (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
JP59211742A 1984-10-09 1984-10-09 ２−ヒドロキシエチル−モノ及び／又はポリ（オキシエチル）トリアルキルアンモニウムハイドロオキサイド及びその溶液 Granted JPS6191156A (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP59211742A JPS6191156A (ja) 1984-10-09 1984-10-09 ２−ヒドロキシエチル−モノ及び／又はポリ（オキシエチル）トリアルキルアンモニウムハイドロオキサイド及びその溶液
DE8585112572T DE3580827D1 (de) 1984-10-09 1985-10-04 Verfahren zum entwickeln und zum entschichten von photoresistschichten mit quaternaeren ammomiumverbindungen.
AT85112572T ATE58972T1 (de) 1984-10-09 1985-10-04 Verfahren zum entwickeln und zum entschichten von photoresistschichten mit quaternaeren ammomiumverbindungen.
EP85112572A EP0177905B1 (de) 1984-10-09 1985-10-04 Verfahren zum Entwickeln und zum Entschichten von Photoresistschichten mit quaternären Ammomiumverbindungen
CA000492431A CA1257610A (en) 1984-10-09 1985-10-08 Photoresist processing solution
KR1019850007406A KR930010775B1 (ko) 1984-10-09 1985-10-08 감광성내식막 처리액
US06/785,518 US4729941A (en) 1984-10-09 1985-10-08 Photoresist processing solution with quaternary ammonium hydroxide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59211742A JPS6191156A (ja) 1984-10-09 1984-10-09 ２−ヒドロキシエチル−モノ及び／又はポリ（オキシエチル）トリアルキルアンモニウムハイドロオキサイド及びその溶液

Publications (2)

Publication Number Publication Date
JPS6191156A JPS6191156A (ja) 1986-05-09
JPH0550494B2 true JPH0550494B2 (https=) 1993-07-29

Family

ID=16610831

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59211742A Granted JPS6191156A (ja) 1984-10-09 1984-10-09 ２−ヒドロキシエチル−モノ及び／又はポリ（オキシエチル）トリアルキルアンモニウムハイドロオキサイド及びその溶液

Country Status (1)

Country Link
JP (1) JPS6191156A (https=)

Also Published As

Publication number Publication date
JPS6191156A (ja) 1986-05-09

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