JPH0546256B2 - - Google Patents
Info
- Publication number
- JPH0546256B2 JPH0546256B2 JP6204590A JP6204590A JPH0546256B2 JP H0546256 B2 JPH0546256 B2 JP H0546256B2 JP 6204590 A JP6204590 A JP 6204590A JP 6204590 A JP6204590 A JP 6204590A JP H0546256 B2 JPH0546256 B2 JP H0546256B2
- Authority
- JP
- Japan
- Prior art keywords
- air
- recess
- clean
- workbench
- exhaust
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000126 substance Substances 0.000 claims description 29
- 239000000243 solution Substances 0.000 claims description 9
- 238000002347 injection Methods 0.000 claims description 5
- 239000007924 injection Substances 0.000 claims description 5
- 239000003570 air Substances 0.000 description 90
- 239000007788 liquid Substances 0.000 description 15
- 239000012080 ambient air Substances 0.000 description 7
- 239000002253 acid Substances 0.000 description 6
- 239000003960 organic solvent Substances 0.000 description 5
- 239000000428 dust Substances 0.000 description 4
- 150000007513 acids Chemical class 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 3
- 238000011109 contamination Methods 0.000 description 3
- 238000007667 floating Methods 0.000 description 3
- 238000004378 air conditioning Methods 0.000 description 2
- 230000003749 cleanliness Effects 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 1
- 230000001143 conditioned effect Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000011010 flushing procedure Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Workshop Equipment, Work Benches, Supports, Or Storage Means (AREA)
- Devices For Use In Laboratory Experiments (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6204590A JPH03262543A (ja) | 1990-03-13 | 1990-03-13 | クリーンドラフトチヤンバー |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6204590A JPH03262543A (ja) | 1990-03-13 | 1990-03-13 | クリーンドラフトチヤンバー |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03262543A JPH03262543A (ja) | 1991-11-22 |
| JPH0546256B2 true JPH0546256B2 (enrdf_load_stackoverflow) | 1993-07-13 |
Family
ID=13188799
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6204590A Granted JPH03262543A (ja) | 1990-03-13 | 1990-03-13 | クリーンドラフトチヤンバー |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03262543A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6614682B1 (ja) * | 2018-08-20 | 2019-12-04 | 株式会社日本医化器械製作所 | 暴露防止具、及び暴露防止具付キャビネット |
| KR102078942B1 (ko) * | 2018-12-04 | 2020-02-19 | 엔젯 주식회사 | 청정도를 유지하는 코팅 장치 |
-
1990
- 1990-03-13 JP JP6204590A patent/JPH03262543A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH03262543A (ja) | 1991-11-22 |
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