JPH0544438B2 - - Google Patents

Info

Publication number
JPH0544438B2
JPH0544438B2 JP60235432A JP23543285A JPH0544438B2 JP H0544438 B2 JPH0544438 B2 JP H0544438B2 JP 60235432 A JP60235432 A JP 60235432A JP 23543285 A JP23543285 A JP 23543285A JP H0544438 B2 JPH0544438 B2 JP H0544438B2
Authority
JP
Japan
Prior art keywords
silicon single
impurities
crucible
content
single crystals
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60235432A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6296388A (ja
Inventor
Hiroyuki Watabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Coorstek KK
Original Assignee
Toshiba Ceramics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Ceramics Co Ltd filed Critical Toshiba Ceramics Co Ltd
Priority to JP23543285A priority Critical patent/JPS6296388A/ja
Publication of JPS6296388A publication Critical patent/JPS6296388A/ja
Publication of JPH0544438B2 publication Critical patent/JPH0544438B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Glass Melting And Manufacturing (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP23543285A 1985-10-23 1985-10-23 シリコン単結晶引上用石英ガラスルツボ Granted JPS6296388A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23543285A JPS6296388A (ja) 1985-10-23 1985-10-23 シリコン単結晶引上用石英ガラスルツボ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23543285A JPS6296388A (ja) 1985-10-23 1985-10-23 シリコン単結晶引上用石英ガラスルツボ

Publications (2)

Publication Number Publication Date
JPS6296388A JPS6296388A (ja) 1987-05-02
JPH0544438B2 true JPH0544438B2 (enrdf_load_stackoverflow) 1993-07-06

Family

ID=16986019

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23543285A Granted JPS6296388A (ja) 1985-10-23 1985-10-23 シリコン単結晶引上用石英ガラスルツボ

Country Status (1)

Country Link
JP (1) JPS6296388A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02229735A (ja) * 1989-02-28 1990-09-12 Shin Etsu Chem Co Ltd 石英ガラス部材
JPH07102999B2 (ja) * 1989-10-27 1995-11-08 三菱マテリアル株式会社 シリコン単結晶引き上げ用石英ルツボ
JP2533643Y2 (ja) * 1989-12-06 1997-04-23 三菱マテリアル 株式会社 シリコン単結晶引上げ用石英ルツボ

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53125290A (en) * 1977-04-08 1978-11-01 Toshiba Ceramics Co Carbon electrode for melting high purity stlica glass
JPS5849519A (ja) * 1981-09-07 1983-03-23 Toyota Motor Corp 自動車の車体フロア構造

Also Published As

Publication number Publication date
JPS6296388A (ja) 1987-05-02

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