JPH0543479Y2 - - Google Patents
Info
- Publication number
- JPH0543479Y2 JPH0543479Y2 JP15765286U JP15765286U JPH0543479Y2 JP H0543479 Y2 JPH0543479 Y2 JP H0543479Y2 JP 15765286 U JP15765286 U JP 15765286U JP 15765286 U JP15765286 U JP 15765286U JP H0543479 Y2 JPH0543479 Y2 JP H0543479Y2
- Authority
- JP
- Japan
- Prior art keywords
- conductor plate
- insulator
- probe
- main body
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004020 conductor Substances 0.000 claims description 29
- 239000004065 semiconductor Substances 0.000 claims description 21
- 239000012212 insulator Substances 0.000 claims description 13
- 239000000523 sample Substances 0.000 claims description 13
- 239000000758 substrate Substances 0.000 description 11
- 239000004809 Teflon Substances 0.000 description 4
- 229920006362 Teflon® Polymers 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15765286U JPH0543479Y2 (enrdf_load_stackoverflow) | 1986-10-15 | 1986-10-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15765286U JPH0543479Y2 (enrdf_load_stackoverflow) | 1986-10-15 | 1986-10-15 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6364037U JPS6364037U (enrdf_load_stackoverflow) | 1988-04-27 |
| JPH0543479Y2 true JPH0543479Y2 (enrdf_load_stackoverflow) | 1993-11-02 |
Family
ID=31080401
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15765286U Expired - Lifetime JPH0543479Y2 (enrdf_load_stackoverflow) | 1986-10-15 | 1986-10-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0543479Y2 (enrdf_load_stackoverflow) |
-
1986
- 1986-10-15 JP JP15765286U patent/JPH0543479Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6364037U (enrdf_load_stackoverflow) | 1988-04-27 |
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