JPH0531735B2 - - Google Patents

Info

Publication number
JPH0531735B2
JPH0531735B2 JP2630084A JP2630084A JPH0531735B2 JP H0531735 B2 JPH0531735 B2 JP H0531735B2 JP 2630084 A JP2630084 A JP 2630084A JP 2630084 A JP2630084 A JP 2630084A JP H0531735 B2 JPH0531735 B2 JP H0531735B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2630084A
Other versions
JPS60173438A (en
Inventor
Yasutake Ooishi
Shiro Takahashi
Original Assignee
Nippon Telegraph & Telephone
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph & Telephone filed Critical Nippon Telegraph & Telephone
Priority to JP2630084A priority Critical patent/JPH0531735B2/ja
Publication of JPS60173438A publication Critical patent/JPS60173438A/en
Publication of JPH0531735B2 publication Critical patent/JPH0531735B2/ja
Anticipated expiration legal-status Critical
Application status is Expired - Lifetime legal-status Critical

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/30Testing of optical devices, constituted by fibre optics or optical waveguides
    • G01M11/35Testing of optical devices, constituted by fibre optics or optical waveguides in which light is transversely coupled into or out of the fibre or waveguide, e.g. using integrating spheres
JP2630084A 1984-02-14 1984-02-14 Expired - Lifetime JPH0531735B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2630084A JPH0531735B2 (en) 1984-02-14 1984-02-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2630084A JPH0531735B2 (en) 1984-02-14 1984-02-14

Publications (2)

Publication Number Publication Date
JPS60173438A JPS60173438A (en) 1985-09-06
JPH0531735B2 true JPH0531735B2 (en) 1993-05-13

Family

ID=12189486

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2630084A Expired - Lifetime JPH0531735B2 (en) 1984-02-14 1984-02-14

Country Status (1)

Country Link
JP (1) JPH0531735B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8951348B1 (en) 2005-04-26 2015-02-10 Novellus Systems, Inc. Single-chamber sequential curing of semiconductor wafers
US9073100B2 (en) 2005-12-05 2015-07-07 Novellus Systems, Inc. Method and apparatuses for reducing porogen accumulation from a UV-cure chamber
US9384959B2 (en) 2005-04-26 2016-07-05 Novellus Systems, Inc. Purging of porogen from UV cure chamber

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8951348B1 (en) 2005-04-26 2015-02-10 Novellus Systems, Inc. Single-chamber sequential curing of semiconductor wafers
US9384959B2 (en) 2005-04-26 2016-07-05 Novellus Systems, Inc. Purging of porogen from UV cure chamber
US10121682B2 (en) 2005-04-26 2018-11-06 Novellus Systems, Inc. Purging of porogen from UV cure chamber
US9073100B2 (en) 2005-12-05 2015-07-07 Novellus Systems, Inc. Method and apparatuses for reducing porogen accumulation from a UV-cure chamber

Also Published As

Publication number Publication date
JPS60173438A (en) 1985-09-06

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term