JPH05291341A - Bonding device - Google Patents

Abstract

PURPOSE:To provide a highly reliable bonding device which can cope with change in frame types to be handled rapidly and easily, speeds up work, is simple in structure, and controls operation easily. CONSTITUTION:A frame L/F can be changed rapidly and easily by replacing a magazine M by a new one. Also, a magazine transport means 31 and magazine transport means 51, 52, 81, and 82 for supplying and collecting the magazine M for a loader/unloader 15 are provided for forming a line and speeding up operation. Furthermore, the magazine transport means 41 and a magazine transfer means are laid out so that they do not cross a bonding stage 9, etc., and the structure is simplified. Also, when delivering the magazine M onto the magazine transport means 41, means 66 and 96 for turning it into standby temporarily is provided, thus facilitating operation control. Also, the empty magazine is utilized effectively.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention receives a large number of lead frames each having an IC chip, that is, a semiconductor component mounted thereon, and wires the pads (electrodes) of the IC chips and the leads provided on the lead frames. The present invention relates to a bonding apparatus for bonding by using.

[0002]

2. Description of the Related Art A conventional example of such a bonding apparatus is shown in FIG.
3 shows. This bonding apparatus is installed as a line along with a die bonder apparatus and a curing apparatus (not shown). In the die bonder device, a large number of IC chips obtained by cutting a wafer are sequentially mounted at predetermined positions on a lead frame L \ F by using, for example, a thermosetting adhesive, and a curing device at a subsequent stage is mounted. It is something to send to. In addition, the curing device receives the lead frame sent from the die bonder device,
After heating to solidify the adhesive, it is sent out toward the bonding device arranged in the subsequent stage, and
The bonding apparatus receives the lead frame and bonds the leads formed on the lead frame and the pads on the IC chip mounted on the lead frame with a wire made of gold, aluminum or the like. To do.

The bonding apparatus is disclosed in Japanese Patent Laid-Open No. Hei 3
Since it is disclosed in Japanese Laid-Open Patent Publication No. 155140, detailed description of each mechanism included will be omitted.

In FIG. 13, a bonding head 202 is provided on a main body 201 (illustrated by a chain double-dashed line) of this bonding apparatus. Bonding head 202
Includes a camera having a camera head, a lens, and an illuminating lamp, and is mounted on a moving table that is equipped with an XY table driving mechanism (not shown) and can be moved two-dimensionally.

A bonding stage (not shown: a stage for carrying a portion of the entire length of the lead frame L \ F on which an IC chip to be bonded and a plurality of IC chips before and after the bonding are mounted are carried by the bonding head 202. The lead frame L \ F and the IC chip, which are the parts to be bonded, are imaged, and the leads of the lead frame and the pads on the IC chip are bonded. This lead frame L \ F
Is adjusted and adjusted to the optimum spacing position by the first guide rail 203a and the second guide rail 203b.
A third transport mechanism 204 is provided in parallel with the first and second guide rails 203a and 203b. The third transport mechanism 204 is composed of a plurality of pulleys and a belt wound around the pulleys, and is driven by a motor 204g. And, in the vicinity of the third transport mechanism 204,
Sensor 205 for detecting arrival of lead frame L \ F
Are arranged.

Next, the conveying means on the lead frame receiving side will be described.

The transfer means is composed of first and second transfer mechanisms 20.
6, 207. The first and second transport mechanisms 206 and 207 are driven by one motor 208.

First and second transport mechanisms 206 and 207
Are provided in parallel on the loader unit 209 in a direction parallel to the longitudinal direction of the first and second guide rails 203a and 203b. The end of the loader unit 209 is connected to the tip of the rod of the front-rear slide cylinder 210, and the first and second guide rails 203a,
The main body 20 in the direction J orthogonal to the longitudinal direction of 203b.
The upper surface of 1 is movable. The timing of moving the cylinder (switching means) 210 back and forth is controlled by a control circuit such as a microprocessor (not shown), and the operating position of the rod of the cylinder is the center of the first and second transfer mechanisms 206 and 207. Control is performed so that the centers of the first and second guide rails 203a and 203b and the center of the third transport mechanism 204 (shown by a chain line) coincide with each other. The first and second transport mechanisms 206, 2
Reference numeral 07 has substantially the same configuration as the above-described third transport mechanism 204, and includes a plurality of pulleys and a belt wound around the pulleys. In addition, the first and second transport mechanisms 206, 20
7 includes first and second guide rails 203a, 203
Lead frame detection sensors 211 and 212 are arranged near the lead frame supply side to b.

Next, the fourth and fifth transport mechanisms 213, 2
Reference numeral 14 has the same configuration as the first and second transport mechanisms 206 and 207 described above, and is provided on the lead frame delivery side. The third and fourth transport mechanisms 213 and 21
4 is also 1 like the first and second transport mechanisms 206 and 207.
It is driven by one motor 215. Further, lead frame detection sensors 216 and 217 are provided.

Fourth and fifth transport mechanisms 213 and 214
Are provided in parallel on the unloader unit 218 in a direction parallel to the longitudinal direction of the first and second guide rails 203a and 203b. This unloader unit 21
The end of 8 is connected to the tip of the rod of the front-back slide cylinder 219, and the first and second guide rails 2
The upper surface of the main body 201 is movable in a direction J orthogonal to the longitudinal direction of 03a and 203b.

In the vicinity of the second transport mechanism 207,
A lead frame pusher cylinder 220 for pushing the lead frame L \ F on the second transport mechanism 207 onto the guide rails 203a and 203b is arranged.

Next, the operation of the bonding apparatus having the above structure will be described.

First, from the state shown in FIG. 13, the rod of the cylinder 210 on the lead frame receiving side is projected and the loader unit 209 moves forward, so that the second transport mechanism 207 is moved.
Are aligned with the third transport mechanism 204 and the fifth transport mechanism 214. In this state, each transport mechanism 2
04, 206, 207, 213, 214 are driven, and at the same time, the lead frame L \ F that has passed through the curing device in the previous stage is supplied in the direction of the arrow and brought onto the second transport mechanism 207. This lead frame L \ F detects the sensor 21
When 2 is detected, each transport mechanism is stopped. After that, the cylinder 210 is operated in the absorbing direction, and the loader unit 209 is returned to the position shown in FIG.

Next, the lead frame pusher cylinder 220 is operated, and the lead frame L \ F on the second transport mechanism 207 is moved to the first and second guide rails 20.
3a, 203b is extruded. This guide rail 2
The lead frames L \ F sent to the parts 03a and 203b are clamped by a carrying means (not shown) and are intermittently fed one pitch at a time, and then heated to a predetermined temperature and bonded on the bonding stage. Next, the lead frame L \ bonded on the bonding stage
F is carried out onto the fourth transport mechanism 213, detected by the lead frame detection sensor 216, and the rotation of the motor is stopped. Then, the cylinder 219 is operated in the projecting direction and the unloader unit 218 moves forward. Then, each of the above-mentioned transport mechanisms is operated, and the lead frame L \ F to which the bonding is performed is sent out to the subsequent stage.

As described above, the conventional bonding apparatus has a structure in which the lead frames L \ F supplied one by one from the die bonder apparatus at the preceding stage through the curing apparatus are sequentially received and bonded.

[0016]

However, in such a conventional bonding apparatus, when considering that the type of the lead frame to be bonded is changed, each of the transfer mechanisms for transferring the lead frame is It is necessary to perform work for replacement or adjustment so as to correspond to a newly handled lead frame, and there is a disadvantage that a great deal of labor and time must be spent.

Further, in the above-mentioned conventional bonding apparatus, although the efficiency of the bonding work has been improved to some extent, there is a tendency that further speeding up is desired recently.

The present invention has been made in view of the above-mentioned drawbacks of the prior art. It is possible to deal with various lead frames quickly and easily, and at the same time, the bonding work can be speeded up. It is an object of the present invention to provide a highly reliable bonding apparatus having a simple structure and easy operation control.

[0019]

A bonding apparatus according to the present invention comprises a bonding stage, a moving table movable at least in two dimensions and a bonding means having a bonding arm mounted on the moving table, and a semiconductor component, respectively. A bonding apparatus having a loader for sequentially taking out the frames from a magazine capable of accommodating a plurality of mounted frames and sending the frames onto the bonding stage, and an unloader for accommodating the bonded frames in the magazine. ,
A magazine carrying means for carrying and carrying the magazine,
A magazine transfer means for transferring a magazine on the magazine transfer means to a direction intersecting a magazine transfer direction by the magazine transfer means and bringing it to the loader and the unloader, and being close to the loader and the unloader. Holding means arranged to hold the magazine, and first magazine moving means for moving the magazine from the loader and the unloader onto the holding means,
Second magazine moving means for moving the magazine on the holding means onto the magazine conveying means, the magazine conveying means being arranged at a position substantially the same as the bonding stage, facing the moving table. It is configured to be installed.

[0020]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, a wire bonding apparatus as an embodiment of the present invention will be described with reference to the accompanying drawings.
In addition, although wire bonding is described as an example in the present embodiment, the present invention is of course applicable to tape bonding and the like.

As shown in FIG. 1, for example, four wire bonding apparatuses 1 according to the present invention are installed side by side in a line as a line.

As shown in FIG. 2, on the main body 2 of the wire bonding apparatus 1 and at the rear, a movable table 3 which is movable in two dimensions and a driving means (not shown) for driving the movable table 3 are provided. XY drive mechanism 5 and a bonding head 7 mounted on the moving table 3.
And a bonding stage 9 (this bonding stage refers to a stage portion that carries a portion to which an IC chip to be bonded and a plurality of IC chips before and after the bonding are mounted in the entire length of a lead frame described later. That is).

Although not described in detail because it is well known, the bonding head 7 has a capillary (not shown) at its tip.
A bonding arm 11 mounted directly above the bonding stage 9 and the bonding arm 1
A contact / separation means (not shown) for supporting and supporting the lead frame 1 on the bonding stage 9 with respect to the lead frame (described later).
And a camera (not shown) for picking up an image of the IC chip on the lead frame, and the like.

A loader 15 and an unloader 16 are provided so as to sandwich the bonding stage 9 from the left and right. The loader 15 carries a magazine (described later), sequentially takes out the lead frames arranged and housed in the magazine, and sends the lead frames to the bonding stage 9. Further, the unloader 16 uses the bonding stage 9
The lead frame bonded above is stored in a magazine. These loader 15 and unloader 16 are configured as follows.

As shown in the figure, the loader 15 has an elevating member 17 formed to have a substantially L-shaped cross section and capable of carrying one magazine, and the elevating member 17 in the vertical direction (direction of arrow Z and And a guide member (not shown) for guiding in the opposite direction). The magazine is detachable from the elevating member 17.
It is fixed to the elevating member 17 by a locking means (not shown) mounted on the device 7. Behind the elevating member 17, a long worm 19 is rotatably provided so as to extend in the vertical direction in which the elevating member 17 should move. A ball screw may be used instead of this worm 19. The same applies to worms used in other mechanical parts described later.

A belt wheel 20 is fitted on the upper end of the worm 19. A motor 21 is disposed near the belt wheel 20, and a belt 23 is wound around the belt wheel 22 and the belt wheel 22 fixed to the output shaft of the motor.

On the other hand, a nut (not shown) is fixed to the rear surface of the elevating member 17, and the nut is attached to the worm 1.
It is screwed to 9.

The lifting member 17 and the worm 19 described above.
, Belt wheels 20, 22, a motor 21, and a belt 23
And the above-mentioned nut screwed into the worm 19 are collectively referred to as magazine positioning means. That is, the magazine positioning means appropriately moves and positions the carried magazine in the lead frame arranging direction of the magazine by controlling the operation of the motor 21.

The loader 15 also has a frame take-out means 24 for taking out the lead frames one by one from the magazine positioned by the magazine positioning means and sending the lead frames onto the bonding stage 9. As shown in the figure, the frame take-out means 24 comprises a pusher 25 for abutting each lead frame in the magazine so as to project the lead frame out of the magazine, and an air cylinder 26 for reciprocating the pusher 25.

On the other hand, the unloader 16 has substantially the same structure as the loader 15 described above. That is, the unloader 16 has an elevating member 27 that is formed to have a substantially L-shaped cross section and can carry one magazine.
And a guide member (not shown) for guiding the elevating member 27 in the up-down direction (the arrow Z direction and the opposite direction). The magazine is attachable to and detachable from the elevating member 27, and is fixed to the elevating member 27 by a locking means (not shown) mounted on the elevating member 27. Behind the elevating member 27, a long worm 29 is provided so as to extend in the vertical direction in which the elevating member 27 should move.
Is rotatably provided. A belt wheel 30 is fitted on the upper end of the worm 29. A motor 31 is arranged near the belt wheel 30, and a belt 33 is wound around the belt wheel 32 and the belt wheel 30 fixed to the output shaft of the motor.

On the other hand, a nut (not shown) is fixed to the rear surface of the lifting member 27, and the nut is attached to the worm 2.
It is screwed to 9.

The lifting member 27 and the worm 29 described above.
, Belt wheels 30, 32, motor 31, and belt 33
And the above nut that is screwed into the worm 29 are collectively referred to as magazine positioning means. That is, the magazine positioning means controls the operation of the motor 31 to appropriately move and position the carried magazine in the lead frame arrangement direction of the magazine.

Further, the unloader 16 has a frame accommodating means (not shown) for accommodating the lead frame bonded on the bonding stage 9 into the magazine carried on the elevating member 27. ing. In addition, this frame storing means is the loader 1 described above.
5 has the same structure as the frame extracting means 24.

On the other hand, as shown in the figure, on the main body 2 and in the front part, a magazine carrying means 4 for carrying a magazine and carrying it from the vicinity of the loader 15 to the vicinity of the unloader 16.
1 is provided. More specifically, the magazine transporting unit 41 is arranged so as to face the moving table 3 with the bonding stage 9 interposed therebetween, and at the substantially same height position as the bonding stage 9.

As shown in the figure, the magazine conveying means 41 is
For example, 18 relatively long belt wheels 43 and 44 extending in parallel with each other (for convenience of explanation, only 4 of these 18 are denoted by reference numeral 44),
A pair of endless belts 45, which are wound around the belt wheels 43 and 44 in parallel and carry a magazine for carrying the magazine, and belt wheels 43 and 44 for driving the belt 45.
And a torque applying means (not shown) such as a motor for applying a torque to any of the above. The belt 45 does not carry the magazine by itself, but a carrying member (not shown) attached below the upper side of the belt receives the load of the magazine.

As is apparent from the figure, the magazine transporting means 41 is set so that its entire length is equal to or slightly larger than the width dimension of the main body 2. As a result, as shown in FIG. 1, a plurality of wire bonding apparatuses 1 are provided in each of the magazine conveying means 41.
It is possible to arrange each of the wire bonding apparatuses 1 in a line so that the transfer paths of the above are continuous so as to be continuous with each other. That is, when a plurality of wire bonding apparatuses 1 are lined up in a line as described above, the magazine conveying means 41 included in each wire bonding apparatus 1 receives the magazine supplied from the former stage and performs the bypass conveyance toward the latter stage. Since it is possible to do so, it is not necessary to individually mount or collect a magazine for each of the wire bonding apparatuses 1, and if a plurality of magazines are supplied from the wire bonding apparatus 1 arranged in the preceding stage, they can be bypass-transported. Then, the lead frames in the respective magazines can be bonded by allocating them to the respective wire bonding devices in the latter stage, and the collection of the magazines can be performed entirely through the wire bonding device arranged in the last stage.

Next, the first magazine transfer means for transferring a magazine between the magazine transfer means 41 and the loader 15 and the second magazine transfer means for transferring a magazine between the magazine transfer means 41 and the unloader 16 will be described. To do. The two magazine transfer means are arranged so that the magazines move in the front-rear direction (the arrow X direction and the opposite direction) perpendicular to the horizontal direction (arrow Y direction and the opposite direction) which is the lead frame feeding direction on the bonding stage 9. ).

First of all, the first magazine transfer means has a separating means 51 for slightly lifting the magazine on the magazine conveying means 41 upward to separate it from the magazine conveying means 41.
And a delivery means 52 for delivering the magazine on the detaching means 51 onto the elevating member 17 included in the loader 15. When the magazine is transferred by the transfer means 52, two guide members 55 are provided between the loader 15 and the magazine transfer means 41 while supporting the magazine and fixed to the main body 2. ing.

First, the structure of the separating means 51 will be described in detail below.

As shown in the figure, the separating means 51 is formed in a generally U-shape as a whole and is arranged so as to extend in the up-down direction (the arrow Z direction and the opposite direction), and has an upper end portion 1 Movable base 59 that can carry one magazine
A guide member (not shown) for movably guiding the movable base 59 in the vertical direction, and a long worm provided in parallel with the guide member and coupled to the lower end of the movable base 59 at the upper end. 61 and a drive means 62 for moving the worm 61 up and down. Although not shown, the drive means 62 is composed of a nut screwed into the worm 61, a motor for rotating the nut to drive the worm 61, and the like. Further, as is particularly clear from FIG. 3, an elongated receiving plate 59a for receiving the magazine is provided at the upper end of the movable base 59. As shown in FIG. 2, the receiving plate 59a is located below the magazine carrying surface of the magazine conveying means 41 when the movable base 59 is at the lowest position. That is, as shown in the figure, both belts 45 provided in the magazine conveying means 41 are partially bent in a substantially V shape by the four belt wheels 44, and the receiving plate 59a is in the V-shaped bent portion. Have been inserted into. Further, as shown, the movable base 59 is inserted between the belts 45.

On the other hand, the delivery means 52 is the air cylinder 6
4 and a pressing plate 65 attached to the rod 64a of the air cylinder 64.

As shown in FIG. 2, a holding means 66 capable of holding a magazine is arranged near the front of the loader 15. The holding means 66 is composed of two holding members 67 that are parallel to each other. Further, behind the loader 15, there is arranged a delivery means 68 for delivering the magazine carried by the elevating member 17 of the loader 15 onto the holding means 66. The delivery means 68 is formed in a substantially U shape and extends in the front-rear direction (the arrow X direction and the opposite direction), and a guide member for guiding the arm 69 movably in the front-rear direction (Fig. (Not shown), a worm 71 provided in parallel with the guide member and coupled to the rear end of the arm 69, and a drive means 72 for reciprocating the worm 71. Although not shown, the driving means 72 is composed of a nut screwed into the worm 71, a motor for rotationally driving the worm 71 to drive the worm 71, and the like. A pressing plate 69a for pressing the magazine on the elevating member 17 is provided at the front end of the arm 69.

The above-mentioned delivery means 68 and the above-mentioned magazine positioning means (including the above-mentioned elevating member 17 and the motor 21) included in the loader 15 are collectively referred to as a first magazine moving means. The first magazine moving means is for moving the magazine on the elevating member 17 onto the holding means 66, as will be described later. As is clear here,
As described above, as a component of the first magazine moving means for moving the magazine on the loader 15 onto the holding means 66, the magazine positioning means forming a part of the loader 15 itself is also used. That is, the total elevating stroke of the elevating member 17 of the loader 15 is higher than the elevating stroke required to take out the lead frame from the magazine in the bonding work described later up to the height position of the holding means 66. It is set as an additional stroke for bringing a magazine. Since the magazine positioning means, which is a constituent element of the loader 15, is also utilized as a constituent element of the first magazine moving means as described above, the number of parts, the weight and the cost of the wire bonding apparatus as a whole can be reduced. Has been achieved.

On the other hand, the delivery means 68, which is a constituent element of the first magazine moving means, and the detaching means 51, which is a constituent element of the first magazine transferring means, are collectively referred to as a second magazine moving means. This second magazine moving means is
As will be described later, it is for moving the magazine in the standby state on the holding means 66 to the lower magazine transporting means 41. As described above, the delivery means 68 and the detaching means 51, which are the constituent elements of the first magazine moving means and the first magazine transferring means, respectively, are also used as the constituent elements of the second magazine moving means. Further reductions in the number of parts, weight reduction, and cost reduction are achieved.

Next, the second magazine transfer means for transferring the magazine between the magazine transfer means 41 and the unloader 16 will be described.

This second magazine transfer means is constructed in substantially the same manner as the above-mentioned first magazine transfer means, and the magazine on the magazine transfer means 41 is slightly lifted upward and separated from the magazine transfer means 41. Means 81
And a delivery means 82 for delivering the magazine on the detaching means 81 onto the elevating member 27 included in the unloader 16. When the magazine is transferred by the transfer means 82, the unloader 16 and the magazine transfer means 4 are used.
Two guide members 85 for supporting and guiding the magazine are provided between the main body 1 and the main body 1, and are fixed to the main body 2.

First, the structure of the separating means 81 will be described in detail below.

As shown in the figure, the detaching means 81 is formed in a generally U-shape as a whole and is arranged so as to extend in the up-down direction (the arrow Z direction and the opposite direction), and its upper end portion has a length of 1 mm. Movable base 89 that can carry one magazine
A guide member (not shown) for movably guiding the movable base 89 in the vertical direction, and a long worm which is provided in parallel with the guide member and is coupled to the lower end of the movable base 89 at its upper end. 91 and a drive means 92 for moving the worm 91 up and down. Although not shown, the driving means 92 is composed of a nut screwed into the worm 91, a motor for rotationally driving the worm 91 to drive the worm 91, and the like. The movable base 89
Is formed in the same manner as the movable base 59 included in the detaching means 51 which is a component of the first magazine transfer means described above, and has two elongated receiving plates 89a for receiving the magazine. As shown in the figure, the receiving plate 89a is positioned below the magazine carrying surface of the magazine conveying means 41 when the movable base 89 is at the lowest position. That is, as shown in the drawing, both belts 45 provided in the magazine transporting means 41 are partially bent into a substantially V shape by the belt wheel 44, and the receiving plate 89 is provided.
a is loosely inserted in this V-shaped bent portion. Further, as shown, the movable base 89 is inserted between the belts 45.

On the other hand, the delivery means 82 is the air cylinder 9
4 and a pressing plate 95 attached to the rod 94a of the air cylinder 94.

As shown in FIG. 2, a holding means 96 capable of carrying a magazine is arranged near the front of the unloader 16. The holding means 96 comprises two holding members 97 which are parallel to each other. Then, behind the unloader 16, the delivery means 98 for delivering the magazine carried by the lifting member 27 of the unloader 16 onto the holding means 96.
Are arranged. The delivery means 98 is formed in a substantially U shape and is in the front-back direction (the arrow X direction and the opposite direction).
At an end, a member (not shown) that guides the arm 99 movably in the front-rear direction, and a member that is provided in parallel with the guide member and is coupled to the rear end of the arm 99 at one end. It has a worm 101 and a drive means 102 for reciprocating the worm 101. In addition,
Although not shown, the driving means 102 is a worm 101.
And a motor for rotating the worm 101 so as to drive the worm 101. A pressing plate 99a for pressing the magazine on the elevating member 27 is provided at the front end of the arm 99.

The delivery means 98 described above and the magazine positioning means (including the lifting member 27 and the motor 31) included in the unloader 16 are collectively referred to as a first magazine moving means. The first magazine moving means is
As will be described later, the holding means 96 holds the magazine on the elevating member 27.
It is for moving up. As is clear here, as a component of the first magazine moving means for moving the magazine on the unloader 16 onto the holding means 96 in this way, the magazine positioning means forming a part of the unloader 16 itself is also used. There is. That is, the total lifting stroke of the lifting member 27 of the unloader 16 is
In the bonding work to be described later, since it is set as an elevating stroke required for accommodating the lead frame in the magazine, a stroke for bringing the magazine up to the height position of the holding means 96 located further above is set. is there. Since the magazine positioning means, which is a constituent element of the unloader 16, is also utilized as a constituent element of the first magazine moving means as described above, the number of parts, the weight and the cost of the wire bonding apparatus as a whole can be reduced. Has been achieved.

On the other hand, the delivery means 98 which is a constituent element of the first magazine moving means and the detaching means 81 which is a constituent element of the second magazine transferring means described above are collectively referred to as a second magazine moving means. This second magazine moving means is
As will be described later, this is for moving the magazine in the standby state on the holding means 96 to the lower magazine transporting means 41. As described above, since the delivery means 98 and the removal means 81, which are the constituent elements of the first magazine moving means and the second magazine transferring means, respectively, are also used as the constituent elements of the second magazine moving means, the wire bonding apparatus Further reduction of the number of parts as a whole,
The weight and cost are reduced.

As is clear from the above description, the magazine transporting means 41 is arranged facing the moving table 3 across the bonding stage 9 and at the same height position as the bonding stage 9, while the loader is used. With respect to the first and second magazine transfer means for transferring the magazine between the magazine transfer means 41 and the unloader 16, the magazine is transferred in a direction intersecting the frame feed direction on the bonding stage 9. It is configured. That is, the arrangement positions of the magazine transporting means 41 and the first and second magazine transporting means are set so that they do not confuse with the moving table 3 and the bonding stage 9. Therefore, complication of the structures of the magazine conveying means 41, the first and second magazine transferring means, the moving table 3, the bonding stage 9 and the like is avoided.

Next, the operation of the wire bonding apparatus 1 having the above structure will be described with reference to FIGS. 4 to 12. The following operations are controlled by a control means such as a microcomputer (not shown).

When the operation button or the like for starting the work is operated, the belt 45 of the magazine conveying means 41 provided in each of the four wire bonding apparatuses 1 shown in FIG. 1 is operated, and in response thereto, the respective belts 45 are operated. Magazines are sequentially supplied from a supply device (not shown) arranged in the preceding stage of the wire bonding device 1, and each of the wire bonding devices 1 is supplied as shown in FIG.
On the magazine conveying means 41 of the separating means 51 and 8
Two magazines M are brought in, one above one. As shown in the figure, a plurality of lead frames L \ F each having an IC chip as a semiconductor component mounted therein are arranged and housed in a magazine M positioned directly above the detaching means 51. Further, the lead frame is not accommodated in the magazine M positioned directly above the detaching means 81 and is empty. Note that these magazines M are formed in a substantially rectangular parallelepiped shape, and both front and rear ends are open.

As shown in FIG. 4, when the two magazines M that have been conveyed reach the positions directly above the separating means 51 and 81, respectively, this is detected by a sensor (not shown), and the magazine conveying means 41 is detected based on the detection signal. Can be stopped. Then, as shown in FIG. 5, the releasing means 51 and 81 are actuated, and the movable bases 59 and 89 respectively provided in the releasing means 51 and 81 are slightly raised from the lowest position. As a result, the two magazines M on the magazine conveying means 41 are lifted by the movable bases 59 and 89 and separated from the magazine conveying means 41.

Next, as shown in FIGS. 6 and 7, the air cylinders 64 provided in the transfer means 52 and 82,
The protrusion operation of 94 is performed, and both air cylinders 64, 94
The pressing plates 65 and 95 provided at the tip of the rod push the magazines M on the detaching means 51 and 81, and the magazines M pass through the guide members 55 and 85 and the loader 15 and the unloader 16 respectively.
Are transferred onto the lifting members 17 and 27 respectively possessed by. 6 and 7, the delivery means 52 and 82
Is drawn in a state of being separated from the magazine M, but this is for the purpose of avoiding complication of the drawing, and both are actually located close to each other. Further, as shown in FIGS. 6 and 7, each magazine M is delivered to the loader 15 and the unloader 16, and at the same time, the movable bases 59 and 89 of the detaching means 51 and 81 carrying both the magazines M until then. Is lowered to the lowest position again.

When the magazine M is placed on the elevating members 17 and 27 of the loader 15 and the unloader 16 as described above, this is detected by a sensor (not shown) and a detection signal is emitted. Then, as shown in FIG. 8, the pusher 25 of the frame take-out means 24 is operated, and the loader 15
Of the plurality of lead frames L \ F arranged in the upper magazine M, for example, the uppermost lead frame is taken out onto the bonding stage 9. As shown in FIGS. 7 and 8, the air cylinders 64 and 94 of the delivery means 52 and 82 are retracted and returned to their original state.
The lead frame L \ F taken out onto the bonding stage 9 is clamped by a transfer mechanism (not shown) and is intermittently fed by the arrangement pitch of the IC chips carried by the lead frame L \ F. Heated to temperature. Then, at the same time, the bonding head 7 and the XY drive mechanism 5 are operated, and the pads (electrodes) on the IC chip and the leads formed in the lead frame L \ F are bonded by wires.

When the lead frame L \ F is bonded as described above, the lead frame is provided with a frame accommodating means (not shown) provided in the unloader 16 (this frame accommodating means is substantially the same as the frame extracting means 24 described above). It is stored in an empty magazine M on the unloader 16. After that, the loader 15 and the unloader 16 are operated, and the elevating bases 17 and 27 respectively provided therein are raised by one pitch of the lead frame array pitch in the magazine M. As a result, on the loader 15, the lead frame located at the lower stage of the above-mentioned bonded lead frame L \ F is positioned corresponding to the bonding stage 9. Then, the same operation as that for the first lead frame is performed on the second lead frame, bonding is performed, and the lead frame is stored in the magazine M on the unloader 16. After that, the series of operations described above is repeated for all the lead frames in the magazine on the loader 15 to perform bonding.

In the above operation, the magazine M
Among the lead frames L \ F in the above, the uppermost one is sequentially taken out and bonded.
During the bonding operation, the magazine M is once raised to a large extent, and the lead frame L \ F at the bottom of the magazine M is raised.
You may take out in order and bond.

During the above-mentioned bonding work, the first magazine transfer means composed of the separating means 51 and the delivering means 52 and the second magazine forming means comprising the separating means 81 and the delivering means 82.
Each of the magazine transfer means is operated to take in two new magazines on the magazine transport means 41 and wait them on the guide members 55 and 85.
As described above, when the two magazines of the first set are loaded on the loader 15 and the unloader 16 and the two magazines of the second set are taken in from the magazine transporting means 41 and made to stand by, the following effects are obtained. Played. In other words, by incorporating this second set of magazines, the magazine transport means 41 becomes empty by that amount,
Subsequent magazines can be efficiently transported, and the speed of continuous operation is promoted. Further, after the first set of magazines mounted on the loader 15 and the unloader 16 has been sent onto the holding means 66 and 96 as described below,
Since the second set of magazines in the standby state on the guide members 55 and 85 can be immediately introduced into the loader 15 and the unloader 16 to start bonding, further improvement in working efficiency is achieved.

Thus, when bonding is completed for all the lead frames L \ F in the magazine M, as shown in FIG.
As shown in FIG. 7, the elevating members 17 and 27 of the loader 15 and the unloader 16 are largely lifted, and both magazines M are brought to the height positions of the holding means 66 and 96. Then, in this state, as shown in FIG.
And 98 are actuated to move the arms 69 and 99 of the worm 7.
It moves forward together with 1, 101 and pushes both magazines M forward. Therefore, as shown in the drawing, each magazine M is delivered to the holding means 66 and 96, respectively, and enters a standby state. In this way, since the magazine M can be put on standby,
As will be described later, the magazine M is transferred to the magazine conveying means 41.
It becomes easy to set the timing so as not to collide with another magazine (not shown) that flows on the magazine transporting unit 41 when it is sent up.

Further, according to this structure, the magazine M is returned from the loader 15 and the unloader 16 onto the magazine conveying means 41, and conversely, the magazine is taken into the loader 15 and the unloader 16 from the magazine conveying means 41. The timing is very easy to set. That is,
The magazine M containing the bonded lead frame L \ F and the empty magazine M are only ejected onto the magazine conveying means 41 and transferred to a predetermined collecting place, so that collision between the magazines can be avoided. This is because it suffices to check whether or not there is another magazine on the magazine conveying means 41. Also, therefore, signal processing (control) of whether or not the magazine is present is easy,
Higher reliability.

As shown in FIG. 10, after the magazine M is moved to the holding means 66, 96 and put in the standby state, the loader 15 that has carried the magazine M until then.
Also, the elevating members 17 and 27 of the unloader 16 are lowered.

When the magazine M in the standby state on the holding means 66, 96 as described above is sent to the lower magazine conveying means 41, the following operation is performed.

As shown in FIG. 10, first, the separating means 51
And 81 are actuated, each of which has a movable base 5
9, 89 are raised to the highest position. Thereby, the receiving plates 59a, 8 at the upper ends of the movable bases 59, 89 are provided.
9a reaches the same height position as the holding means 66, 96. In this state, as shown in FIG. 11, the transfer means 68 and 98 are operated and the arms 69 and 99 are further advanced. Therefore, as shown in the figure, both magazines M have holding means 66, 96.
The receiving plate 59 of the movable bases 59 and 89 (shown in FIG. 10)
a, 89a. Thereafter, as shown in FIG. 12, the detaching means 51 and 81 are actuated, the movable bases 59 and 89 carrying the magazine M respectively descend to the lowest position, and the magazine M is placed on the magazine conveying means 41. Placed.

Thereafter, the belt 45 of the magazine conveying means 41
Is driven, the magazine M is carried out toward the subsequent stage, and the magazine M accommodating the lead frame L \ F after bonding is collected. Also, an empty magazine M
Is sent back to a supply device (not shown) arranged in front of each wire bonding device 1 and reused.

After that, the above series of operations are repeated,
Bonding is continuously performed on the lead frames housed in the magazines sequentially supplied from the preceding stage.

In the above embodiment, when loading both magazines M on the magazine transport means 41 into the loader 15 and the unloader 16, the delivery means 52 and 82 push these magazines M horizontally backward, and When the magazines M on the loader 15 and the unloader 16 are sent out again onto the magazine conveying means 41, first, the magazines M are pushed horizontally forward by the transfer means 68 and 98 and brought onto the detaching means 51 and 81. After that, the detaching means 51 and 81 are descended, but the magazine M can be transported by following the opposite path. However, in this case, the delivery means 52 and 82 are arranged so as to be raised to the same height position as the holding means 66 and 96, and the other delivery means 68 and 98 are arranged at the same height position as the magazine transport means 41. It is necessary to lower it.

That is, first, the detaching means 51 and 81 are largely moved up to raise the both magazines M on the magazine transporting means 41 to the maximum, and they are brought to the same height position as the holding means 66 and 96. In this state, the transfer means 52 and 82 are operated to push the respective magazines M rearward and transfer them to the elevating members 17 and 27 of the loader 15 and the unloader 16.
Then, after the bonding work is completed, the elevating members 17 and 27 are moved down to the lowest level to lower both magazines M to the same height position as the magazine conveying means 41. In this state, the separating means 51 and 81 are moved down to lower the receiving plates 59a and 89a of the movable bases 59 and 89 provided therein to a position where these magazines M can be received. Next, the delivery means 68 and 98 are operated to push the magazines M forward and deliver them to the receiving plates 59a and 89a. Then, the movable bases 59 and 89 of the separating means 51 and 81 are lowered to the lowest position. As a result, both magazines M are placed on the magazine transport means 41.

The movable table 3 and the bonding stage 9 are arranged so as to intersect at right angles to the magazine transport direction by the magazine transport means 41 by appropriately changing and using the magazine transport means disclosed in this embodiment. It is also possible that the magazine transport direction and the lead frame feed direction are orthogonal to each other.

[0072]

As described above, since the bonding apparatus according to the present invention is equipped with the magazine, it suffices to substantially replace the magazine when changing the type of the frame, and one frame can be used for various types of frames. There is an effect that it can be handled and that various frames can be dealt with quickly and easily. Further, the bonding apparatus according to the present invention has a magazine transfer means for transferring a magazine, and a magazine transfer means for transferring the magazine between the loader and unloader and the magazine transfer means. Due to such a constitution, a plurality of bonding apparatuses can be arranged in a line as a line so that the conveying paths of the magazine conveying means provided in each of them are continuous with each other, and can be continuously operated. There is an effect that a further speedup is achieved. Further, in the bonding apparatus according to the present invention, the magazine carrying means is arranged facing the moving table and at the same height as the bonding stage, while the magazine carrying means carries the magazine carrying means by the magazine carrying means. The magazine is configured to be transported in a direction intersecting the direction. That is, the arrangement positions of the above-mentioned magazine transport means and magazine transfer means are set so that they do not confuse with the moving table and the bonding stage. Therefore, the structure of the magazine conveying means, the magazine transferring means, the moving table, the bonding stage and the like is prevented from being complicated, the structure of the bonding apparatus as a whole is extremely simple, and the repair and adjustment are easy. Further, in the bonding apparatus according to the present invention, it is possible to effectively use the magazine whose frame has been discharged and which has become empty, so that the number of magazines to be prepared can be reduced. In the bonding apparatus according to the present invention, holding means capable of holding the magazine is provided in the vicinity of the loader and the unloader, and first magazine moving means for moving the magazine on the loader and the unloader onto the holding means,
A second magazine moving means for moving the magazine on the holding means onto the magazine carrying means. Due to such a configuration, when collecting the magazine containing the bonded frame and the empty magazine, it is not necessary to immediately return the magazine from the loader and the unloader onto the magazine conveying means, and the magazine can be replaced by the first magazine described above. The magazine moving means can move it once onto the holding means and make it stand by there. Therefore, when this magazine is sent to the magazine carrying means by the second magazine moving means, it is easy to set the timing so as not to collide with other magazines flowing on the magazine carrying means. .. Further, according to such a configuration, it is very easy to set the timing of returning the magazine from the loader and unloader to the magazine transporting means, and conversely, taking in the magazine from the magazine transporting means to the loader and the unloader. effective. That is, the magazine containing the bonded frame and the empty magazine are only ejected onto the magazine conveying means and transferred to a predetermined collecting place. Therefore, in order to avoid collision between the magazines, the magazine conveying means is used. This is because it is enough to check whether there is another magazine on the top. Further, therefore, there is also an effect that signal processing (control) as to whether or not there is a magazine on the magazine conveying means is easy and reliability is high.

[Brief description of drawings]

FIG. 1 is a perspective view showing a state in which a plurality of wire bonding apparatuses according to the present invention are arranged in a line.

FIG. 2 is a perspective view of a wire bonding apparatus according to the present invention.

FIG. 3 is an enlarged view of a part of the wire bonding apparatus shown in FIG.

4 is an operation explanatory view of the wire bonding apparatus shown in FIG.

5 is an operation explanatory view of the wire bonding apparatus shown in FIG.

6 is an operation explanatory view of the wire bonding apparatus shown in FIG.

FIG. 7 is an operation explanatory view of the wire bonding apparatus shown in FIG.

FIG. 8 is an operation explanatory view of the wire bonding apparatus shown in FIG.

9 is an operation explanatory view of the wire bonding apparatus shown in FIG.

10 is an operation explanatory view of the wire bonding apparatus shown in FIG.

11 is an operation explanatory view of the wire bonding apparatus shown in FIG.

FIG. 12 is an operation explanatory view of the wire bonding apparatus shown in FIG.

FIG. 13 is a perspective view of a conventional bonding apparatus.

[Explanation of symbols]

1 Wire Bonding Device 3 Moving Table 5 XY Driving Mechanism 9 Bonding Stage 11 Bonding Arm 15 Loader 16 Unloader 24 Frame Extracting Means 41 Magazine Conveying Means 51, 81 Detaching Means 52, 68, 82, 98 Delivery Means 55, 85 Guide Member 66 , 96 holding means

Claims (5)

[Claims] 1. A bonding stage and at least two
Bonding means having a movable table movable in the dimensional direction and a bonding arm mounted on the movable table, and the frames are sequentially taken out from a magazine capable of accommodating a plurality of frames on which semiconductor components are mounted, respectively, and the bonding is performed. A loader that sends it on stage,
A bonding apparatus having an unloader for accommodating the bonded frame in a magazine, the magazine carrying means carrying and carrying the magazine, and the magazine carrying means for carrying the magazine on the magazine carrying means by the magazine carrying means. Holding means that is provided in proximity to the loader and the unloader and that can hold the magazine, the magazine transferring means being moved in a direction intersecting the direction and brought to the loader and the unloader. A first magazine moving means for moving the magazine from the loader and the unloader onto the holding means, and a second magazine moving means for moving the magazine on the holding means onto the magazine transport means; The conveying means faces the moving table and the bonding Stage substantially bonding apparatus characterized by comprising disposed at the same height. 2. The bonding apparatus according to claim 1, wherein the magazine transporting unit can receive the magazine supplied from the front stage and perform bypass transport toward the rear stage. 3. The loader and the unloader are respectively
There is a magazine positioning unit that carries the magazine and moves and positions it in the frame arrangement direction of the magazine, and the first magazine moving unit includes the magazine positioning unit and the magazine on the magazine positioning unit. The bonding apparatus according to claim 1 or 2, further comprising: a delivery means that delivers the holding means onto the holding means. 4. The magazine transferring means comprises a separating means for separating the magazine from the magazine conveying means, and a transferring means for transferring the magazine on the separating means to the loader and the unloader, and the second magazine. 4. The bonding apparatus according to claim 3, wherein the moving means includes a delivering means included in the first magazine moving means and the detaching means. 5. When the magazines are mounted on the loader and the unloader, the magazine transfer means is used to take in the magazines from the magazine transfer means and make them stand by. Item 5. A bonding apparatus according to any one of items 4.