JPH05261921A - Ink jet type print head and manufacture thereof - Google Patents
Ink jet type print head and manufacture thereofInfo
- Publication number
- JPH05261921A JPH05261921A JP6239192A JP6239192A JPH05261921A JP H05261921 A JPH05261921 A JP H05261921A JP 6239192 A JP6239192 A JP 6239192A JP 6239192 A JP6239192 A JP 6239192A JP H05261921 A JPH05261921 A JP H05261921A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric body
- ink
- print head
- nozzle
- ink jet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2002/14306—Flow passage between manifold and chamber
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、インクジェット式プリ
ンタに用いる印字ヘッドに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a print head used in an ink jet printer.
【０００２】[0002]
【従来の技術】従来のインクジェット式印字ヘッドは、
図９に示す様に、インクタンクを構成する容器の壁面に
複数のノズル開口２２１を形成すると共に、各ノズル開
口と対応するように伸縮方向を一致させて圧電体２３０
を配設して構成されている。この印字ヘッドは、駆動信
号を圧電素子に印加して圧電体を伸縮させ、この時に発
生するインクの動圧によりインク滴をノズル開口から吐
出させて印刷用紙にドットを形成するものである。この
様なヘッドは、ガラス（プラスチック）のベース基板２
１０とガラス（プラスチック）薄板等の弾性振動板２５
２との間に複数のインクキャビティ２２０、ノズル２２
１、インク供給路２２２と、各インク供給路２２２に通
じインクをとどめ置くインク溜部２４０を形成し、電極
４３１を両面に形成した圧電体２３０の板をインクキャ
ビティの面積程度に切断した後、各インクキャビティの
上にガラス薄板を挟んで接着した構造を有している。2. Description of the Related Art A conventional ink jet print head is
As shown in FIG. 9, a plurality of nozzle openings 221 are formed on the wall surface of the container that constitutes the ink tank, and the expansion / contraction directions are aligned so as to correspond to the nozzle openings, and the piezoelectric body 230 is formed.
Are arranged. This print head applies a drive signal to a piezoelectric element to expand and contract the piezoelectric body, and the dynamic pressure of ink generated at this time causes ink droplets to be ejected from nozzle openings to form dots on a printing paper. Such a head has a glass (plastic) base substrate 2
10 and elastic diaphragm 25 such as glass (plastic) thin plate
2 and a plurality of ink cavities 220, nozzles 22
1. After forming the ink supply path 222 and the ink reservoir 240 for communicating with each ink supply path 222 and retaining the ink, and cutting the plate of the piezoelectric body 230 having the electrodes 431 formed on both sides into the area of the ink cavity, It has a structure in which a thin glass plate is sandwiched and bonded onto each ink cavity.
【０００３】又、ＰＺＴ等の圧電体と金属板、セラミッ
クとの積層材とで構成された梁状部材の長手方向の両端
が支持されている圧力発生部材と、飛翔媒体であるイン
クとこのインクの吐出口であるノズルとを有し、印加電
圧により圧力発生器から圧力を発生させ、インクをノズ
ルから吐出させるオンデマンド型のインクジェットヘッ
ドが特公昭６０−８９５３号公報で開示されている。こ
のヘッドは、圧力発生部材がノズル形成基板に対してほ
ぼ直角に変位することと、ノズルメニスカスのインク流
路が短いため、インクの吐出効率及び吐出安定性が高
く、インク中に気泡・ゴミ等の異物が混入した場合で
も、この影響を受けずに正常動作が可能であるという利
点を有している。Further, a pressure-generating member in which both ends in the longitudinal direction of a beam-shaped member composed of a laminated material of a piezoelectric material such as PZT and a metal plate and a ceramic is supported, ink as a flying medium, and this ink. Japanese Patent Publication No. Sho 60-8953 discloses an on-demand type ink jet head which has a nozzle which is an ejection port of No. 3, and which causes a pressure generator to generate a pressure by an applied voltage to eject ink from the nozzle. In this head, since the pressure generating member is displaced substantially at right angles to the nozzle forming substrate and the ink flow path of the nozzle meniscus is short, ink ejection efficiency and ejection stability are high, and bubbles, dust, etc. in the ink are high. Even if foreign matter is mixed in, there is an advantage that normal operation is possible without being affected by this.
【０００４】又、特公昭６１−２０２４号公報では、連
続した弾性振動板上に、連続した圧電体を接着し、ノズ
ル開口に対応させて電極を選択的に形成する事で、選択
的に圧力発生部材を駆動する構造が開示されている。こ
の構造は、ノズル数が増加しても、圧電体をノズル数分
だけ接着する工数を削減できるという利点を有してい
る。Further, in Japanese Patent Publication No. 61-2024, a continuous piezoelectric body is bonded onto a continuous elastic diaphragm, and electrodes are selectively formed corresponding to the nozzle openings, so that the pressure is selectively applied. A structure for driving a generating member is disclosed. This structure has an advantage that even if the number of nozzles is increased, the number of steps for bonding the piezoelectric body by the number of nozzles can be reduced.
【０００５】又、特公昭６２−１３４２６７号公報で
は、ヘッド本体にメタライズしたセラミックスを用い圧
電体を拡散接合した構造が開示されている。この構造は
接着剤による圧力損失、バラツキを低減できるという利
点を有している。Further, Japanese Patent Publication No. 62-134267 discloses a structure in which a piezoelectric body is diffusion-bonded to a head body by using metallized ceramics. This structure has an advantage that pressure loss and variation due to the adhesive can be reduced.
【０００６】[0006]
【発明が解決しようとする課題】しかしながら、上記の
ような構造のヘッドでは、 １、圧電体４３０の接着時における作業性が悪い。However, in the head having the above-described structure, 1. Workability is poor when the piezoelectric body 430 is bonded.
【０００７】２、接着の不均一さによる特性のばらつき
が大きい。2. Large variations in characteristics due to non-uniform adhesion.
【０００８】３、接着部の剥離が起こり易い。3. Peeling of the adhesive portion is likely to occur.
【０００９】４、切断加工時の内部歪による特性のばら
つきが大きい。4. There are large variations in characteristics due to internal strain during cutting.
【００１０】５、駆動信号用配線パターン、共通電極の
引き回しが困難。5. It is difficult to route the drive signal wiring pattern and the common electrode.
【００１１】６、特公昭６２−１３４２６７号公報のヘ
ッド構造では、メタライズセラミックスを精度良く高密
度に加工することが必要となり、飛躍的なコストアップ
につながる。6. In the head structure of Japanese Patent Publication No. 62-134267, it is necessary to process metallized ceramics with high precision and high density, which leads to a dramatic increase in cost.
【００１２】などの問題点を有していた。There are problems such as the above.
【００１３】又、これらの問題はプリンタの性能を向上
させるためにノズル数を増やしたり、ノズル密度を高く
するほど、よりクローズアップされてきていた問題であ
った。Further, these problems have been more closely addressed as the number of nozzles is increased or the nozzle density is increased in order to improve the performance of the printer.
【００１４】そこで本発明はこれらの問題点を解決する
ことで、その目的とするところは、多ノズル数でも均一
な特性を有する信頼性の高いインクジェット式印字ヘッ
ドをきわめて低コストに提供することである。Therefore, the present invention solves these problems, and an object of the present invention is to provide a highly reliable ink jet print head having uniform characteristics even with a large number of nozzles at an extremely low cost. is there.
【００１５】[0015]
【課題を解決するための手段】本発明のインクジェット
式印字ヘッドは、ノズル開口に対応させて圧力発生部材
が配置され、圧力発生部材への駆動信号によりインクが
ノズル開口から外部に放出されるようにしたインクジェ
ット式印字ヘッドにおいて、該圧力発生部材が、少なく
とも連続した圧電体と、該圧電体上に前記ノズルに対応
して配設された弾性振動板と駆動信号用配線パターンに
より構成されていることを特徴としている。In the ink jet type print head of the present invention, a pressure generating member is arranged corresponding to a nozzle opening, and ink is discharged to the outside from the nozzle opening by a drive signal to the pressure generating member. In the ink jet print head described above, the pressure generating member is composed of at least a continuous piezoelectric body, an elastic diaphragm disposed on the piezoelectric body in correspondence with the nozzle, and a drive signal wiring pattern. It is characterized by
【００１６】更には、前記弾性振動板と前記駆動信号用
配線パターンは、圧電体上に厚膜印刷法により形成され
ていることを特徴としている。Further, the elastic diaphragm and the drive signal wiring pattern are formed on a piezoelectric body by a thick film printing method.
【００１７】更には、前記弾性振動板と前記駆動信号用
配線パターンは、圧電体上にメッキ法により形成されて
いることを特徴としている。Further, the elastic diaphragm and the drive signal wiring pattern are formed on a piezoelectric body by a plating method.
【００１８】[0018]
【実施例】本発明の第１の実施例を図１〜図３を用いて
説明する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A first embodiment of the present invention will be described with reference to FIGS.
【００１９】図１は本発明の第１の実施例のインクジェ
ット式印字ヘッドの構造図である。ガラスで出来たベー
ス基板２１０上に、キャビティ２２０、ノズル２２１、
インク供給路２２２、インク溜部２４０が形成されてい
る。圧電体２３０は、片面に共通電極２５１、もう一方
の面に弾性振動板２５３、駆動信号用配線パターン２５
３が形成されている。圧電体２３０、共通電極２５１、
弾性振動板２５２によって、圧力発生部材２６０が形成
されている。共通電極２５１はグランドに、また、駆動
信号用配線パターン２５３は駆動回路（図示されていな
い）に接続され、駆動信号によって圧力発生部材２６０
を駆動しインクを飛翔させる。ベース基板２１０のキャ
ビティ２２０等の形成側と共通電極２５１を対面させ、
キャビティ２２０と圧力発生部材２６０とが対向するよ
うに接合し、本実施例のインクジェットヘッドを得る。FIG. 1 is a structural diagram of an ink jet type print head according to a first embodiment of the present invention. On the base substrate 210 made of glass, the cavity 220, the nozzle 221,
An ink supply path 222 and an ink reservoir 240 are formed. The piezoelectric body 230 has a common electrode 251 on one side, an elastic diaphragm 253 on the other side, and a drive signal wiring pattern 25.
3 is formed. Piezoelectric body 230, common electrode 251,
The elastic vibrating plate 252 forms a pressure generating member 260. The common electrode 251 is connected to the ground, the drive signal wiring pattern 253 is connected to a drive circuit (not shown), and the pressure generation member 260 is driven by the drive signal.
To drive the ink to fly. The formation side of the cavity 220 and the like of the base substrate 210 and the common electrode 251 face each other,
The cavity 220 and the pressure generating member 260 are joined so as to face each other, and the ink jet head of this embodiment is obtained.
【００２０】次に、図２と図３を用いて圧力発生部材２
６０の製造方法について説明する。ＰｂＯ、ＴｉＯ2、
ＺｒＯ2、添加剤を調合、混合した後８００〜１０００
℃で仮焼、粉砕しバインダーを添加する事によりペース
ト状にしたチタン酸ジルコン酸鉛系複合ペロブスカイト
セラミックス等の圧電材料からなる圧電体をドクターブ
レード法等でシート状にした後、焼結する方法や、或
は、バルク状で焼結した後に薄く切り出し、ラップして
厚み精度を確保した圧電体２３０を得る。Next, referring to FIGS. 2 and 3, the pressure generating member 2 will be described.
A method of manufacturing 60 will be described. PbO, TiO2,
800-1000 after compounding and mixing ZrO2 and additives
A method in which a piezoelectric body made of a piezoelectric material such as lead zirconate titanate-based composite perovskite ceramics, which is made into a paste by calcination at ℃, pulverization and addition of a binder, is formed into a sheet by the doctor blade method, etc. and then sintered. Alternatively, or after being sintered in bulk, it is cut into thin pieces and lapped to obtain a piezoelectric body 230 with a sufficient thickness accuracy.
【００２１】その後、圧電体２３０の片面に共通電極２
５１として厚膜印刷法、メッキ法、スパッタリング法等
により、Ｎｉ等の導電材料を０．５μｍ程度形成する。Then, the common electrode 2 is formed on one surface of the piezoelectric body 230.
As 51, a conductive material such as Ni is formed to a thickness of about 0.5 μm by a thick film printing method, a plating method, a sputtering method, or the like.
【００２２】圧電体２３０のもう一方の面には、図３に
示す様に弾性振動板２５２と、駆動信号用配線パターン
２５３を形成する。弾性振動板２５２は、ノズル開口に
対応するように所望の位置に所望の形状、厚みで形成す
る必要があり、駆動信号用配線パターン２５３は、所望
のピッチ、形状で形成する必要がある。ここでの、弾性
振動板２５２と駆動信号用配線パターン２５３の形成方
法としては、 （１）スクリーンマスクにより所望の位置、形状、厚み
でＮｉ、Ｍｏ、Ｔｎ等の金属ペーストを印刷、焼成する
ことで弾性振動板２５２と駆動信号用配線パターン２５
３を形成する厚膜印刷法。On the other surface of the piezoelectric body 230, an elastic diaphragm 252 and a drive signal wiring pattern 253 are formed as shown in FIG. The elastic diaphragm 252 needs to be formed in a desired shape and thickness at a desired position corresponding to the nozzle opening, and the drive signal wiring pattern 253 needs to be formed in a desired pitch and shape. Here, the elastic diaphragm 252 and the drive signal wiring pattern 253 are formed by: (1) printing and firing a metal paste of Ni, Mo, Tn or the like at a desired position, shape and thickness with a screen mask. With the elastic diaphragm 252 and the drive signal wiring pattern 25
3 thick film printing method.
【００２３】（２）フォト法や、印刷法を用いてレジス
トを弾性振動板部と駆動信号配線パターン部が露出する
ように形成し、その部分にＮｉなどの金属を析出させる
無電解メッキ法。(2) An electroless plating method in which a resist is formed by a photo method or a printing method so that the elastic diaphragm portion and the drive signal wiring pattern portion are exposed, and a metal such as Ni is deposited on the exposed portion.
【００２４】（３）弾性振動板２５２と駆動信号配線パ
ターン２５３を形成する側の圧電体全面にスパッタリン
グ法で導電薄膜を形成し、その上面にフォト法や印刷法
で弾性振動板部と駆動信号配線パターン部が隠れるよう
にレジストを形成する。その後、レジストの形成されて
いない部分の導電薄膜をエッチングし、弾性振動板２５
２と駆動信号配線パターン２５３と同形状の導電薄膜層
を形成する。しかる後、電解メッキ法により所望の弾性
振動板厚みになるまで、Ｎｉ等の金属を析出させるメッ
キ法。(3) A conductive thin film is formed on the entire surface of the piezoelectric body on which the elastic diaphragm 252 and the drive signal wiring pattern 253 are formed by a sputtering method, and the elastic diaphragm and the drive signal are formed on the upper surface by a photo method or a printing method. A resist is formed so that the wiring pattern portion is hidden. After that, the conductive thin film in the portion where the resist is not formed is etched, and the elastic diaphragm 25
A conductive thin film layer having the same shape as 2 and the drive signal wiring pattern 253 is formed. After that, a plating method in which a metal such as Ni is deposited by electrolytic plating until the elastic diaphragm has a desired thickness.
【００２５】が考えられる。It is possible to consider
【００２６】次に本発明の第２の実施例を図４〜図９を
用いて説明する。Next, a second embodiment of the present invention will be described with reference to FIGS.
【００２７】本実施例によれば圧力発生部材２６０を構
成している圧電体２３０を大きなシート状のまま加工せ
ずに使用し、加工性のよい弾性体を加工しているだけの
ため、きわめて作業性がよく、圧力発生部材２６０を高
密度に精度良く形成することが出来る。According to this embodiment, the piezoelectric body 230 constituting the pressure generating member 260 is used as it is without being processed as a large sheet, and only an elastic body having good workability is processed. The workability is good, and the pressure generating member 260 can be formed with high density and high precision.
【００２８】図４は本発明の第２の実施例のインクジェ
ット式印字ヘッドの構造図である。本実施例は大きく分
けてノズル側部材Ａ１と振動子側部材Ａ２とに分けられ
る。厚さ７００μｍのＳｉ単結晶基板（図４参照）を用
いて、Ｓｉ単結晶部４１にノズル２２１、インク供給路
２２２が形成され、４つのインク供給路２２２はインク
供給路交差部２３において統合されている。ノズル２２
１上には、これを覆うように厚さ３５μｍの圧電体２３
０が配設されている。圧電体２３０上には、ノズル２２
１側に全面を覆ってＣｒ、Ｎｉ、Ａｕよりなる厚さ０．
５μｍ程度の共通電極２５１が配設されており、また、
ノズル２２１の反対側の面には、厚さ２０μｍのＮｉで
形成された弾性振動板２５２がノズル２２１上に、駆動
信号用配線パターン２５３がこれにつづいて配設されて
いる。ノズル２２１上の圧電体２３０、弾性振動板２５
２、共通電極２５１が圧力発生部材２６０となる。更
に、インク供給路交差部２３上にインク供給口２２が設
けられている。ノズル２２１の大きさは、圧電体側が１
０３０μｍ×１０３０μｍ、出口側が４３μｍ×４３μ
ｍである。ノズル２２１に供給するインク５０をとどめ
置くインク溜部２４０は圧電体２３０に対してノズルと
反対側に配置されており、インク供給口２２、インク供
給路２２２を通してノズル２２１に通じている。FIG. 4 is a structural diagram of an ink jet type print head according to a second embodiment of the present invention. This embodiment is roughly divided into a nozzle side member A1 and a vibrator side member A2. The nozzle 221 and the ink supply path 222 are formed in the Si single crystal part 41 using a Si single crystal substrate (see FIG. 4) having a thickness of 700 μm, and the four ink supply paths 222 are integrated at the ink supply path intersection 23. ing. Nozzle 22
The piezoelectric body 23 having a thickness of 35 μm is formed on the surface of the piezoelectric body 23 so as to cover it.
0 is set. The nozzle 22 is provided on the piezoelectric body 230.
The total thickness on the 1st side is made of Cr, Ni, Au.
A common electrode 251 of about 5 μm is provided, and
On the surface opposite to the nozzle 221, an elastic vibrating plate 252 made of Ni and having a thickness of 20 μm is arranged on the nozzle 221 and a drive signal wiring pattern 253 is arranged thereon. Piezoelectric body 230 on nozzle 221 and elastic diaphragm 25
2. The common electrode 251 serves as the pressure generating member 260. Further, the ink supply port 22 is provided on the ink supply path intersection 23. The size of the nozzle 221 is 1 on the piezoelectric body side.
030μm × 1030μm, outlet side is 43μm × 43μ
m. The ink reservoir 240 for holding the ink 50 to be supplied to the nozzle 221 is arranged on the side opposite to the nozzle with respect to the piezoelectric body 230, and communicates with the nozzle 221 through the ink supply port 22 and the ink supply passage 222.
【００２９】図５〜図９を用いて本発明の一実施例のイ
ンクジェット式印字ヘッドの製造工程について説明す
る。A manufacturing process of an ink jet type print head according to an embodiment of the present invention will be described with reference to FIGS.
【００３０】はじめにノズル側部材Ａ１に関して図５〜
図７を用いて説明する。ノズル側部材Ａ１は図５に示す
ようにＳｉ単結晶基板４０を用いて製造する。Ｓｉ単結
晶基板４０の両面（Ｓｉ単結晶の［１００］面）に、熱
酸化により、厚さ０．１μｍのＳｉＯ2膜４２を形成す
る。これにより、Ｓｉ単結晶基板４０はＳｉ単結晶部４
１とＳｉＯ2膜より成る３層構造となる。First, referring to FIG.
This will be described with reference to FIG. The nozzle side member A1 is manufactured using a Si single crystal substrate 40 as shown in FIG. A SiO 2 film 42 having a thickness of 0.1 μm is formed on both surfaces of the Si single crystal substrate 40 ([100] surface of Si single crystal) by thermal oxidation. As a result, the Si single crystal substrate 40 has the Si single crystal portion 4
It has a three-layer structure composed of 1 and a SiO 2 film.
【００３１】次の工程を図６を用いて説明する。図６
（ａ）は上面図であり、（ｂ）はｎ−ｎ’面の断面図で
ある。Ｓｉ単結晶基板４０の片面のＳｉＯ2膜４２をフ
ォトリソグラフィ技術によって、図６に示すように、Ｓ
ｉ単結晶の［１１０］の方向（図上矢印Ｘ−Ｘ’、Ｙ−
Ｙ’の方向）に辺を持つように取り去る。The next step will be described with reference to FIG. Figure 6
(A) is a top view, (b) is a sectional view of the nn 'plane. The SiO 2 film 42 on one surface of the Si single crystal substrate 40 is formed by photolithography as shown in FIG.
[110] direction of the i single crystal (arrows XX ′, Y− in the figure)
Remove it so that it has a side in the Y'direction).
【００３２】次の工程を図７を用いて説明する。図７
（ａ）は上面図であり、（ｂ）は図上ｐ−ｐ’面の断面
図である。図６のＳｉ単結晶基板４０をピロカテコー
ル、エチレンジアミンと水の混合液を用いエッチングす
る。この後、ＳｉＯ2膜４２を除去する。すると、Ｓｉ
単結晶部４１は異方性エッチングされ図７に示したよう
にノズル２２１、インク供給路２２２、インク供給口交
差部２３が形成される。インク供給部２１のサイズは幅
８０μｍ、深さ５６μｍ、長さ８０μｍである。また、
ノズル２２１は図上、左右上下に１３５５μｍピッチで
形成されている。The next step will be described with reference to FIG. Figure 7
(A) is a top view and (b) is a sectional view of a pp 'plane in the figure. The Si single crystal substrate 40 of FIG. 6 is etched using a mixed solution of pyrocatechol, ethylenediamine and water. After that, the SiO 2 film 42 is removed. Then Si
The single crystal part 41 is anisotropically etched to form a nozzle 221, an ink supply path 222, and an ink supply port intersection 23 as shown in FIG. The size of the ink supply unit 21 is 80 μm in width, 56 μm in depth, and 80 μm in length. Also,
The nozzles 221 are formed on the left, right, top, and bottom at a pitch of 1355 μm in the figure.
【００３３】図８、図９を用いて振動子側部材Ａ２の製
造工程について説明する。図８に示す圧電体２３０は厚
さ３５μｍのチタン酸ジルコン酸鉛系複合ペロブスカイ
トセラミック等の圧電材料である。圧電体２３０の両面
には片面に厚さ０．５μｍ程度にＣｒ，Ｎｉ，Ａｕ等か
らなる共通電極２５１をメッキ、スパッタリング等で形
成する。また、もう一方の面には実施例１で記載した
（２）の方式と同様の方式で図８の状態の振動子側部材
Ａ２の弾性振動板１１と駆動信号用配線パターン１３を
形成した。ここで、弾性振動板のサイズは８００μｍ×
８００μｍであり、図８に示すようにノズル２２１に対
応するように、左右上下に１３５５μｍピッチで形成さ
れている。又、配線部２５３の幅は８０μｍとした。The manufacturing process of the vibrator side member A2 will be described with reference to FIGS. A piezoelectric body 230 shown in FIG. 8 is a piezoelectric material such as a lead zirconate titanate-based composite perovskite ceramic having a thickness of 35 μm. On both surfaces of the piezoelectric body 230, a common electrode 251 made of Cr, Ni, Au or the like is formed on one surface to a thickness of about 0.5 μm by plating, sputtering or the like. Further, on the other surface, the elastic diaphragm 11 and the drive signal wiring pattern 13 of the vibrator-side member A2 in the state of FIG. 8 were formed by a method similar to the method (2) described in Example 1. Here, the size of the elastic diaphragm is 800 μm ×
It is 800 μm, and is formed at a pitch of 1355 μm on the left, right, up, and down so as to correspond to the nozzles 221, as shown in FIG. The width of the wiring portion 253 was 80 μm.
【００３４】以上のようにして形成されたノズル側部材
Ａ１と振動子側部材Ａ２をポリイミド系接着剤、アクリ
ル系紫外線硬化型の接着剤を用いて接合し、インク供給
路交差部２３上の圧電体２３０にレーザー等を用いて穴
を開け、インク供給口２２を形成する。インク供給口２
２の直径は２５０μｍである。このようにして、第１図
に示すようなインクジェットヘッドを得る。The nozzle-side member A1 and the vibrator-side member A2 formed as described above are joined together using a polyimide adhesive or an acrylic ultraviolet curing adhesive, and the piezoelectric material on the ink supply path intersection 23 is bonded. A hole is made in the body 230 using a laser or the like to form the ink supply port 22. Ink supply port 2
The diameter of 2 is 250 μm. In this way, an inkjet head as shown in FIG. 1 is obtained.
【００３５】以上述べてきたように、本実施例のインク
ジェットヘッドは、圧力発生部材２６０を構成している
圧電体２３０を大きなシート状のまま加工せずに使用
し、加工性のよい弾性体１１を加工しているだけのた
め、きわめて作業性がよく、圧力発生部材を高密度に形
成することが出来る。また、インク溜部２４０が圧力発
生部材２６０に対してノズル２２１と反対側に配設され
ているため、インク溜部２４０がノズル２２１の配置を
妨げる事なく十分に大きく設けることが出来る。更に、
ノズル側部材Ａ１としてＳｉ単結晶基板４０を用い、異
方性エッチングによって製造しているため、きわめて高
精度の流路抵抗の小さなノズル２２１、インク供給路２
２２が形成できる。従って、ノズルを高密度に数多く配
設することが出来、インク飛翔特性の安定したインクジ
ェットヘッドがきわめて低コストで提供できる。As described above, in the ink jet head of this embodiment, the piezoelectric body 230 constituting the pressure generating member 260 is used as it is in a large sheet shape without being processed, and the elastic body 11 having good workability is used. Since it is only processed, the workability is extremely good and the pressure generating member can be formed with high density. Further, since the ink reservoir 240 is disposed on the side opposite to the nozzle 221 with respect to the pressure generating member 260, the ink reservoir 240 can be provided sufficiently large without hindering the arrangement of the nozzle 221. Furthermore,
Since the Si single crystal substrate 40 is used as the nozzle-side member A1 and is manufactured by anisotropic etching, the nozzle 221 and the ink supply path 2 are extremely highly accurate and have a small flow path resistance.
22 can be formed. Therefore, a large number of nozzles can be arranged at high density, and an ink jet head with stable ink flying characteristics can be provided at an extremely low cost.
【００３６】[0036]
【発明の効果】本発明によれば、圧力発生部材が一枚の
連続した圧電体と、ノズルに対応した弾性振動板から形
成され、又、圧電体と弾性振動板との接合に接着剤を使
用していないので、圧力発生部材を高密度に精度よく配
設した、均質な特性を有するインクジェットヘッドを提
供することが出来る。According to the present invention, the pressure generating member is formed of one continuous piezoelectric body and the elastic vibration plate corresponding to the nozzle, and an adhesive is used to bond the piezoelectric body and the elastic vibration plate. Since it is not used, it is possible to provide an inkjet head having uniform characteristics in which pressure generating members are arranged with high density and high accuracy.
【図１】本発明のインクジェット式印字ヘッドの第１の
実施例の構造を示す斜視図。FIG. 1 is a perspective view showing the structure of a first embodiment of an ink jet print head of the present invention.
【図２】本発明の第１の実施例のインクジェット式印字
ヘッドの製造工程を示す断面図。FIG. 2 is a cross-sectional view showing the manufacturing process of the ink jet type print head of the first embodiment of the invention.
【図３】（ａ）本発明の第１の実施例のインクジェット
式印字ヘッドの製造工程を示す上面図。 （ｂ）本発明の第１の実施例のインクジェット式印字ヘ
ッドの製造工程を示す断面図。FIG. 3A is a top view showing the manufacturing process of the ink jet print head of the first embodiment of the invention. (B) Sectional drawing which shows the manufacturing process of the inkjet type print head of the 1st Example of this invention.
【図４】（ａ）本発明の第２の実施例のインクジェット
式印字ヘッドの製造方法を示す上面図。 （ｂ）本発明の第２の実施例のインクジェット式印字ヘ
ッドの製造方法を示すｍ−ｍ’断面図。FIG. 4A is a top view showing the method of manufacturing the ink jet print head of the second embodiment of the present invention. FIG. 6B is a sectional view taken along the line MM ′ showing the method for manufacturing the ink jet print head according to the second embodiment of the present invention.
【図５】本発明の第２の実施例のインクジェット式印字
ヘッドの製造工程を示す断面図。FIG. 5 is a cross-sectional view showing the manufacturing process of the ink jet type print head according to the second embodiment of the invention.
【図６】（ａ）本発明の第２の実施例のインクジェット
式印字ヘッドの製造工程を示す上面図。 （ｂ）本発明の第２の実施例のインクジェット式印字ヘ
ッドの製造工程を示すｎ−ｎ’断面図。FIG. 6A is a top view showing a manufacturing process of the ink jet print head of the second embodiment of the invention. (B) nn 'cross-sectional view showing the manufacturing process of the ink jet type print head of the second embodiment of the present invention.
【図７】（ａ）本発明の第２の実施例のインクジェット
式印字ヘッドの製造工程を示す上面図。 （ｂ）本発明の第２の実施例のインクジェット式印字ヘ
ッドの製造工程を示すｐ−ｐ’断面図。FIG. 7A is a top view showing the manufacturing process of the ink jet print head of the second embodiment of the invention. (B) pp 'sectional drawing which shows the manufacturing process of the inkjet type print head of the 2nd Example of this invention.
【図８】（ａ）本発明の第２の実施例のインクジェット
式印字ヘッドの製造工程を示す上面図。 （ｂ）本発明の第２の実施例のインクジェット式印字ヘ
ッドの製造工程を示すｑ−ｑ’断面図。FIG. 8A is a top view showing the manufacturing process of the ink jet type print head according to the second embodiment of the invention. (B) qq 'sectional drawing which shows the manufacturing process of the inkjet type print head of the 2nd Example of this invention.
【図９】従来のインクジェット式印字ヘッドの構造を示
す斜視図。FIG. 9 is a perspective view showing the structure of a conventional ink jet print head.
２１０・・・ベース基板 ２２０・・・キャビティ ２２１・・・ノズル ２２２・・・インク供給路 ２３０・・・圧電体 ２４０・・・インク溜部 ２５１・・・共通電極 ２５２・・・弾性振動板 ２５３・・・駆動信号用配線パターン ２６０・・・圧力発生部材 ４０・・・Ｓｉ単結晶基板 ４２・・・ＳｉＯ2膜210 ... Base substrate 220 ... Cavity 221 ... Nozzle 222 ... Ink supply path 230 ... Piezoelectric body 240 ... Ink reservoir 251 ... Common electrode 252 ... Elastic vibration plate 253・ ・ ・ Drive signal wiring pattern 260 ・ ・ ・ Pressure generating member 40 ・ ・ ・ Si single crystal substrate 42 ・ ・ ・ SiO 2 film
Claims (3)
配置され、圧力発生部材への駆動信号によりインクがノ
ズル開口から外部に放出されるようにしたインクジェッ
ト式印字ヘッドにおいて、前記圧力発生部材が、少なく
とも連続した圧電体と、この圧電体上に前記ノズルに対
応して配設された弾性振動板とプリンタ駆動回路と弾性
振動板を電気的に接続する駆動信号用配線パターンによ
り構成されていることを特徴とするインクジェット式印
字ヘッド。1. An ink jet print head in which a pressure generating member is arranged corresponding to a nozzle opening, and ink is discharged to the outside from the nozzle opening by a drive signal to the pressure generating member. , At least a continuous piezoelectric body, an elastic diaphragm disposed on the piezoelectric body corresponding to the nozzle, a drive signal wiring pattern for electrically connecting the printer drive circuit and the elastic diaphragm. An inkjet print head characterized in that
ターンは、圧電体上に厚膜印刷法により形成されている
ことを特徴とする請求項１記載のインクジェット式印字
ヘッドの製造方法。2. The method of manufacturing an ink jet print head according to claim 1, wherein the elastic diaphragm and the drive signal wiring pattern are formed on a piezoelectric body by a thick film printing method.
ターンは、圧電体上にメッキ法により形成されているこ
とを特徴とする請求項１記載のインクジェット式印字ヘ
ッドの製造方法。3. The method according to claim 1, wherein the elastic diaphragm and the drive signal wiring pattern are formed on a piezoelectric body by a plating method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6239192A JP3175269B2 (en) | 1992-03-18 | 1992-03-18 | Inkjet print head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6239192A JP3175269B2 (en) | 1992-03-18 | 1992-03-18 | Inkjet print head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH05261921A true JPH05261921A (en) | 1993-10-12 |
| JP3175269B2 JP3175269B2 (en) | 2001-06-11 |
Family
ID=13198789
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6239192A Expired - Fee Related JP3175269B2 (en) | 1992-03-18 | 1992-03-18 | Inkjet print head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3175269B2 (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0733480A1 (en) * | 1995-03-23 | 1996-09-25 | SHARP Corporation | Ink jet head allowing highly dense arrangement of nozzles |
| WO1999004976A1 (en) * | 1997-07-25 | 1999-02-04 | Seiko Epson Corporation | Ink jet recording head and ink jet recorder |
| JPH11157069A (en) * | 1997-11-26 | 1999-06-15 | Seiko Epson Corp | Ink jet recording head |
| WO1999042292A1 (en) * | 1998-02-18 | 1999-08-26 | Sony Corporation | Piezoelectric actuator, method of manufacture, and ink-jet print head |
| US6217158B1 (en) | 1996-04-11 | 2001-04-17 | Seiko Epson Corporation | Layered type ink jet recording head with improved piezoelectric actuator unit |
| US6450626B2 (en) | 1999-12-24 | 2002-09-17 | Matsushita Electric Industrial Co., Ltd. | Ink jet head, method for producing the same, and ink jet type recording apparatus |
| US6869170B2 (en) | 2000-10-16 | 2005-03-22 | Seiko Epson Corporation | Ink-jet recording head having a vibration plate prevented from being damaged and ink-jet recording apparatus for using the same |
| US7533972B2 (en) | 2004-02-06 | 2009-05-19 | Fujifilm Corporation | Inkjet head and manufacturing method thereof |
| US20140267499A1 (en) * | 2013-03-15 | 2014-09-18 | Ricoh Company, Ltd. | Droplet discharging head and image forming apparatus |
-
1992
- 1992-03-18 JP JP6239192A patent/JP3175269B2/en not_active Expired - Fee Related
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0733480A1 (en) * | 1995-03-23 | 1996-09-25 | SHARP Corporation | Ink jet head allowing highly dense arrangement of nozzles |
| US6217158B1 (en) | 1996-04-11 | 2001-04-17 | Seiko Epson Corporation | Layered type ink jet recording head with improved piezoelectric actuator unit |
| US6315400B1 (en) | 1997-07-25 | 2001-11-13 | Seiko Epson Corporation | Ink jet recording head and ink jet recorder |
| WO1999004976A1 (en) * | 1997-07-25 | 1999-02-04 | Seiko Epson Corporation | Ink jet recording head and ink jet recorder |
| JPH11157069A (en) * | 1997-11-26 | 1999-06-15 | Seiko Epson Corp | Ink jet recording head |
| KR100764323B1 (en) * | 1998-02-18 | 2007-10-05 | 소니 가부시끼 가이샤 | Piezoelectric actuator, method of manufacture, and ink-jet printhead |
| CN1329196C (en) * | 1998-02-18 | 2007-08-01 | 索尼株式会社 | Piezoelectric actuator, method of manufacture, and ink-jet print head |
| WO1999042292A1 (en) * | 1998-02-18 | 1999-08-26 | Sony Corporation | Piezoelectric actuator, method of manufacture, and ink-jet print head |
| US6450626B2 (en) | 1999-12-24 | 2002-09-17 | Matsushita Electric Industrial Co., Ltd. | Ink jet head, method for producing the same, and ink jet type recording apparatus |
| US6869170B2 (en) | 2000-10-16 | 2005-03-22 | Seiko Epson Corporation | Ink-jet recording head having a vibration plate prevented from being damaged and ink-jet recording apparatus for using the same |
| US7533972B2 (en) | 2004-02-06 | 2009-05-19 | Fujifilm Corporation | Inkjet head and manufacturing method thereof |
| US20140267499A1 (en) * | 2013-03-15 | 2014-09-18 | Ricoh Company, Ltd. | Droplet discharging head and image forming apparatus |
| US9238367B2 (en) * | 2013-03-15 | 2016-01-19 | Ricoh Company, Ltd. | Droplet discharging head and image forming apparatus |
Also Published As
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|---|---|
| JP3175269B2 (en) | 2001-06-11 |
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