JPH05232314A - Dichroic mirror - Google Patents

Dichroic mirror

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Publication number
JPH05232314A
JPH05232314A JP3458492A JP3458492A JPH05232314A JP H05232314 A JPH05232314 A JP H05232314A JP 3458492 A JP3458492 A JP 3458492A JP 3458492 A JP3458492 A JP 3458492A JP H05232314 A JPH05232314 A JP H05232314A
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Prior art keywords
wavelength region
light
dichroic mirror
multilayer film
material
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JP3458492A
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Japanese (ja)
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JP2935765B2 (en
Inventor
Kunio Kurobe
邦夫 黒部
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Fuji Photo Optical Co Ltd
富士写真光機株式会社
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Priority to JP4034584A priority Critical patent/JP2935765B2/en
Publication of JPH05232314A publication Critical patent/JPH05232314A/en
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Publication of JP2935765B2 publication Critical patent/JP2935765B2/en
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Abstract

PURPOSE: To obtain a dichroic mirror which acts as a half mirror for a specified wavelength region and as a total reflection mirror for the rest of wavelength region.
CONSTITUTION: This dichroic mirror is obtd. by successively base multilayer film 2 which totally reflects light in <2700nm wavelength region and almost totally transmits light in >2700nm wavelength region, a Ge first surface layer 3, and a ZnS second surface layer 4 on a glass substrate 1. This mirror acts as a total reflection mirror for 1500-2700nm wavelength region (near infrared region) and as a half mirror having about 50% transmittance for about >2700nm wavelength region (medium and far infrared region).
COPYRIGHT: (C)1993,JPO&Japio

Description

【発明の詳細な説明】 DETAILED DESCRIPTION OF THE INVENTION

【0001】 [0001]

【産業上の利用分野】本発明は薄膜による光の干渉を利用して、特定の波長領域の光のみを反射し、残りの波長領域の光を透過するダイクロイックミラーに関するものである。 BACKGROUND OF THE INVENTION The present invention utilizes the interference of light by thin film, reflects only light of a specific wavelength region, to a dichroic mirror which transmits light in other wavelength regions.

【0002】 [0002]

【従来の技術】従来から、ガラス面上に蒸着した多層膜の薄膜干渉を利用して、このガラス面に入射した光のうち特定の波長領域の光のみを反射し、残りを透過するといったダイクロイックミラーが知られている。 Heretofore, utilizing thin film interference of the multilayer film deposited on a glass surface, the dichroic like this of the light incident on the glass surface reflects only the light of a specific wavelength region, and transmits the remainder mirror is known.

【0003】上記多層膜は高屈折率物質と低屈折率物質を交互に所定の厚みで積層することにより形成し、積層する物質の種類とその膜厚により反射と透過の切換波長をコントロールできることが知られている。 [0003] The multilayer film is formed by laminating a predetermined thickness of the high refractive index material and a low refractive index material alternately, to be able to type and control the switching 換波 length of transmitted and reflected by the film thickness of the laminated substances Are known.

【0004】 [0004]

【発明が解決しようとする課題】ところで、このようなダイクロイックミラーを用いて物体の分光測定を行なう場合に、反射光と透過光のうちいずれか一方を分光放射計に入射させて物体からの射出光の分光放射率を測定するとともに他方をカメラに入射させて物体の輪郭を得、 [SUMMARY OF THE INVENTION Incidentally, in the case of performing spectral measurements of an object using such a dichroic mirror, emitted from the object by the incidence of either the spectroradiometer of the reflected light and transmitted light is incident and the other on the camera as well as measuring the spectral emissivity of the light to obtain the contour of the object,
最後にこれら2つの情報を合わせるような手法が知られている。 Finally techniques such as Together these two pieces of information are known.

【0005】しかしながら、このような物体の分光測定においては、物体からの射出光の分光放射率を全波長領域にわたってなるべく多くの光量により測定しておきたいという要求も多く、その一方でカメラからは物体の輪郭の情報を得るだけでよいからカメラへの入射光量はある程度小さくてもよいとされる場合も多い。 However, in the spectroscopic measurement of such objects, many requests that the spectral emissivity of the light emitted from the object want measured by as many light intensity over the entire wavelength region, from the other hand the camera the amount of incident light from only needs to obtain contour information of the object to the camera is also often are or may be somewhat smaller.

【0006】例えば、熱線を放射する物体からの光のうち、特定の赤外波長領域の光のみを赤外カメラに入射させて物体の輪郭を撮影するとともに、残りの光を分光放射計に入射させて熱線の分光放射率を得るような場合には、赤外カメラの感度を例えば3000〜5000nmとしておき、ダイクロイックミラーにより3000〜5000nmの波長領域の光の一部のみ透過させて赤外カメラに入射させ、 [0006] For example, among the light from the object that emits heat rays incident only light of a specific infrared wavelength region while photographing the outline of the object to be incident on the infrared camera, the remaining light in the spectroradiometer If allowed to so as to obtain a spectral emissivity of the heat ray can leave the sensitivity of the infrared camera for example and 3000~5000Nm, dichroic by transmitting only a part of the light in the wavelength region of 3000~5000Nm by dichroic mirror to the infrared camera allowed to enter,
残りの全光量はダイクロイックミラーにより反射させて分光放射計に入射せしめ、物体から放射される全ての波長領域についてなるべく多くの光量を用いて分光測定を行なうようにするのが望ましい。 The remaining total amount of light allowed enter the spectroradiometer is reflected by the dichroic mirror, preferable to carry spectrometry using as much amount of light for all the wavelength range emitted from an object is desirable.

【0007】本発明はこのような事情に鑑みなされたもので、所定波長領域の光に対してはハーフミラーとして、残りの波長領域の光に対しては全反射ミラーとして機能するダイクロイックミラーを提供することを目的とするものである。 [0007] The present invention has been made in view of such circumstances, as a half mirror with respect to light of a predetermined wavelength region, provides a dichroic mirror that functions as a total reflection mirror for the light of the remaining wavelength region it is an object of the present invention to be.

【0008】 [0008]

【課題を解決するための手段】本発明のダイクロイックミラーは、透明基板上に、所定値以下の波長領域の光を略全反射せしめ、該所定値より大きい波長領域の光を高透過率点以上の割合で透過せしめる、第1の物質からなる薄層と第2の物質からなる薄層を交互に積層せしめてなる基礎多層膜を設け、この基礎多層膜上に、前記所定値より大きい波長領域の光を、該基礎多層膜の入射時に対して前記高透過率点より小さい割合で透過せしめる、 The dichroic mirror of the present invention, in order to solve the problem] has, on a transparent substrate, allowed substantially totally reflect light of a predetermined value or less in the wavelength region, the light of greater wavelength region than the predetermined value or more high transmission point allowed to transmission at the rate of, the first consisting of material thin layer and underlying multilayer film comprising brought alternately laminating a thin layer of the second material is provided, on the basis multilayer film, larger wavelength region than the predetermined value the light and allowed transmittance in smaller proportions than the high transmittance points for time of incidence of the fundamental multilayer film,
前記第1の物質からなる薄層と前記第2の物質からなる薄層を各々1層ずつ有してなる表層膜を設けてなることを特徴とするものである。 And it is characterized in that formed by providing a surface layer film formed by a one by the first of each one layer and a thin layer of the second thin layer made of a material consisting of material.

【0009】また、上記「高透過率点」とは所定値より大きい波長領域の光を透過する率が、上記基礎多層膜のみによってはこの点より小さくなることがなく、上記表層膜を設けることにより初めてこの点より小さくなるような透過率の基準点を示し、例えば90%という高透過率の値に設定される。 Further, the rate and the "high transmittance point" that transmits light of a greater wavelength region than the predetermined value, the basic multilayer film only without smaller than this point by providing the surface layer film first it shows the reference point becomes smaller such permeability than this point, is set to the value of the high transmittance of, for example, 90% by.

【0010】 [0010]

【作用および発明の効果】上記構成によれば、まず、透明基板上に第1の物質からなる薄層と第2の物質からなる薄層を交互に積層せしめてなる基礎多層膜を設けて、 According to the above configuration, according to the action and the present invention, first, by providing a first formed of a material thin layer and underlying multilayer film comprising brought alternately laminating a thin layer of the second material on a transparent substrate,
所定値以下の波長領域の光を略全反射せしめるとともにこの所定値より大きい波長領域の光を高透過率点より大きい割合で透過せしめている。 Light of greater wavelength region than the predetermined value with allowed to substantially totally reflect light of a predetermined value or less in the wavelength region are allowed transmission at a greater rate than the high transmittance point.

【0011】このような基礎多層膜のみからなるいわゆる一般的なダイクロイックミラーは所定波長の前後で略全反射と略全透過を切り換えるように機能し、一般に、 [0011] Such basic multilayer film called common dichroic mirror comprising only functions to switch substantially total reflection almost totally transmitted before and after the predetermined wavelength, in general,
薄層の積層数の増減によって所定波長領域の光の透過率を大幅に増減させることは困難であると考えられていた。 Possible to significantly increase or decrease the transmittance of light of a predetermined wavelength region by the lamination number of increase or decrease of the thin layer has been considered to be difficult.

【0012】事実、本出願人の実験によっても例えば20 [0012] In fact, for example, 20 by the applicant of the experimental
層程度までは薄層の積層数の増減と上記透過率の増減との関連性は余り認められておらず、その透過率を例えば To about layers associated with the increase or decrease in the number of stacked decrease and the transmittance of the thin layer is not observed too, the transmittance e.g.
90%以下とすることはできなかった。 It was not possible to 90% or less.

【0013】しかしながら、本出願人はこの基礎多層膜上に第1の物質からなる表面薄層と第2の物質からなる表面薄層を設けると上記透過率が大幅に減少し、しかもこれらの表面薄層の厚みを調整することでこの透過率を例えば70%とすることも50%とすることも可能であることを見い出した。 [0013] However, the applicant has the first providing the skin layer composed of skin layers and the second material comprising a material the transmittance is significantly reduced on the basis multilayer film, yet these surfaces has been found that be this transmission example 70% by adjusting the thickness of the thin layer is also possible to 50%.

【0014】本発明のダイクロイックミラーはこのような事実に基づきなされたもので、これにより、所定波長領域の光に対しては所望の透過率を有するハーフミラーとして、残りの波長領域の光に対しては通常の全反射ミラーとして機能することが可能となる。 [0014] The dichroic mirror of the present invention has been made based on such facts, by which, with respect to light in a predetermined wavelength region as a half mirror having a desired transmittance with respect to light of other wavelength region it is possible to function as a normal full reflection mirror Te.

【0015】 [0015]

【実施例】以下、本発明の実施例について図面を参照して説明する。 EXAMPLES The following will be described with reference to the accompanying drawings embodiments of the present invention.

【0016】図2は、本発明の第1の実施例に係るダイクロイックミラーの層構成を示す概略図である。 [0016] Figure 2 is a schematic diagram showing a layer structure of a dichroic mirror according to the first embodiment of the present invention. このダイクロイックミラーはゲルマニウム(Ge)基板1上に基礎多層膜2、Ge(屈折率4.00)からなる第1表面層3およびZnS(屈折率2.10)からなる第2表面層4を蒸着法を用いてこの順に積層してなるものである。 The dichroic mirror by vapor deposition a second surface layer 4 made of germanium (Ge) basis on the substrate 1 a multilayer film 2, Ge first surface layer 3 made of (refractive index 4.00) and ZnS (refractive index 2.10) it is those which are laminated in this order.

【0017】上記基礎多層膜2は、ZnSからなる薄層を奇数層に、Geからなる薄層を偶数層にして23層積層してなるもので全膜厚が10〜15μm程度となるように形成されている。 [0017] The basic multi-layer film 2, a thin layer of ZnS odd layer, such that the total thickness becomes about 10~15μm with those obtained by laminating 23 layers with a thin layer made of Ge in an even layer It is formed.

【0018】また、上記Geからなる第1表面層3は4 Further, the first surface layer 3 made of the Ge 4
nd=2400nm程度、上記ZnSからなる第2表面層4 nd = 2400 nm approximately, a second surface layer 4 made of the ZnS
は4nd=2644nm程度となるような厚みに形成されている。 Is formed to a thickness such that about 4nd = 2644nm.

【0019】この第1の実施例に係るダイクロイックミラーの透過特性を図1に示す。 [0019] indicating the transmission characteristic of the dichroic mirror according to the first embodiment in FIG.

【0020】この図1に示す透過特性から、このダイクロイックミラーは1500〜2700nm程度の波長領域(近赤外領域)においては全反射ミラー、2700nm程度以上の波長領域(中間、遠赤外領域)においては透過率50%程度のハーフミラーとして機能することが明らかである。 [0020] from the transmission characteristics shown in FIG. 1, in the dichroic mirror is a total reflection mirror in the wavelength region of about 1500~2700Nm (near infrared region), 2700 nm of about or more wavelength region (intermediate, far infrared region) it is evident that functions as a half mirror about 50% transmission.

【0021】一方、図2に示す層構成のうちガラス基板1上に基礎多層膜2のみを設けたダイクロイックミラーの透過特性を図3に示す。 Meanwhile, Figure 3 shows the transmission characteristic of the dichroic mirror provided with only basic multilayer film 2 on a glass substrate 1 of the layer structure shown in FIG.

【0022】図1と図3の比較から、第1表面層3と第2表面層4を設けたことにより、透過領域(波長2700n [0022] From a comparison of FIGS. 1 and 3, by providing the first surface layer 3 and the second surface layer 4, the transmissive region (wavelength 2700n
m程度以上の領域)における透過率を小さくすることができた。 It was possible to reduce the transmittance in more regions) about m.

【0023】なお、上記図1と図3の透過特性は入射角を45°に設定したときの値に基づく。 [0023] Incidentally, the transmission characteristic of FIG. 1 and FIG. 3 is based on the value when the angle of incidence was set at 45 °.

【0024】次に、図4は、本発明の第2の実施例に係るダイクロイックミラーの層構成を示す概略図である。 Next, FIG. 4 is a schematic diagram showing the layer structure of a dichroic mirror according to the second embodiment of the present invention.
このダイクロイックミラーはガラス基板11上に基礎多層膜12、TiO 2 (屈折率2.33)からなる第1表面層13およびSiO 2 (屈折率1.47)からなる第2表面層14を蒸着法を用いてこの順に積層してなるものである。 The dichroic mirror is the second surface layer 14 made of a basic multi-layer film 12, the first surface layer 13 made of TiO 2 (refractive index 2.33) and SiO 2 (refractive index 1.47) on the glass substrate 11 by vapor deposition it is those formed by laminating in order.

【0025】上記基礎多層膜には、TiO 2からなる薄層を奇数層に、SiO 2からなる薄層を偶数層にして20 [0025] The aforementioned basic multilayer film, a thin layer made of TiO 2 in odd layer, and a thin layer of SiO 2 on an even layer 20
層積層してなるもので全膜厚が10〜15μm程度となるように形成されている。 All film thickness at those formed by the layer stack is formed such that about 10 to 15 [mu] m.

【0026】また、上記TiO 2からなる第1表面層13 Further, the first surface layer 13 made of the TiO 2
は4nd=3064nm程度、上記SiO 2からなる第2表面層14は4nd=2760nm程度となるような厚みに形成されている。 The 4nd = 3064nm about, the second surface layer 14 made of the SiO 2 is formed to a thickness such that about 4nd = 2760nm.

【0027】この第2の実施例に係るダイクロイックミラーの透過特性を図5に示す。 [0027] indicating the transmission characteristic of the dichroic mirror according to the second embodiment in FIG.

【0028】この図5に示す透過特性から、このダイクロイックミラーは 740nm程度より小さい波長領域(可視光領域)においては全反射ミラー、 740nm程度以上の波長領域(赤外領域)においては透過率70%程度のハーフミラーとして機能することが明らかである。 [0028] from the transmission characteristics shown in FIG. 5, the dichroic mirror is a total reflection mirror in the small wavelength side of about 740nm (visible light region), the transmittance of 70% in the 740nm about more wavelength region (infrared region) it is clear that the function as the extent of a half mirror.

【0029】一方、図4に示す層構成のうちガラス基板 On the other hand, a glass substrate of the layer structure shown in FIG. 4
11上に基礎多層膜12のみを設けたダイクロイックミラーの透過特性を図6に示す。 The transmission characteristics of the dichroic mirror provided with only basic multilayer film 12 on the 11 shown in FIG.

【0030】図5と図6の比較から、第1表面層13と第2表面層14を設けたことにより、透過領域(波長 740n [0030] From a comparison of FIGS. 5 and 6, by providing the first surface layer 13 and the second surface layer 14, transmissive areas (Wavelength 740n
m程度以上の領域)における透過率を小さくすることができた。 It was possible to reduce the transmittance in more regions) about m.

【0031】なお、上記図5と図6の透過特性は入射角を13°に設定したときの値に基づく。 It should be noted, the transmission characteristic of FIG. 5 and FIG. 6 is based on the value when the angle of incidence was set at 13 °.

【0032】なお、本発明のダイクロイックミラーとしては上述した実施例のものに限られるものではなく、基礎多層膜、第1の表面薄層および第2の表面薄層を構成する材料および各々の膜については種々の態様をとり得る。 It should be noted, is not limited to those of the dichroic embodiments described above as dichroic mirror of the present invention, basic multilayer film material and each of the film constituting the first skin layer and second skin layer for it may take various aspects. 例えば上記2つの実施例において第1表面層3、13 For example, the first surface layer in the above two embodiments 3 and 13
および第2表面層4、14の層厚を変えることにより透過領域の透過率を所望の値に設定することが可能である。 And it is possible to set the transmission ratio of the transmission region to a desired value by changing the thickness of the second surface layer 4, 14.

【0033】また、例えば第1の実施例において第2表面層4を構成する材料としてZnSの代わりに、これと略同様の屈折率を有するZrO 2 、TiO 2およびSi Further, for example, in place of ZnS as a material constituting the second surface layer 4 in the first embodiment, ZrO 2, TiO 2 and Si with which substantially the same refractive index
O等を使用することも可能である。 It is also possible to use O or the like.

【0034】また、上記実施例においては入射角度を13 Further, the angle of incidence in the above Example 13
°および45°に設定しているが、入射角度を0〜45°のいずれの角度に設定しても同様の効果を得ることができる。 It is set to ° and 45 °, but may be set the incident angle to any angle of 0 to 45 ° to obtain the same effect. さらに、上記実施例はハーフミラーとして用いる場合について説明しているが、表層膜上にさらに基板を接合し、ハーフプリズムとして用いることも可能である。 Furthermore, the above embodiments have described the case where used as the half mirror, further bonding a substrate on a surface film, it is also possible to use as the half prism.

【図面の簡単な説明】 BRIEF DESCRIPTION OF THE DRAWINGS

【図1】本発明の第1実施例に係るダイクロイックミラーの透過特性を示すグラフ Graph showing the transmission characteristic of the dichroic mirror according to the first embodiment of the present invention; FIG

【図2】本発明の第1実施例に係るダイクロイックミラーの層構成を示す概略図 Schematic view showing the layer structure of a dichroic mirror according to the first embodiment of the present invention; FIG

【図3】本発明の第1実施例に係るダイクロイックミラーにおいて表層膜を除去したときの透過特性を示すグラフ Graph showing the transmission characteristics when removing the surface layer film in a dichroic mirror according to the first embodiment of the present invention; FIG

【図4】本発明の第2実施例に係るダイクロイックミラーの層構成を示す概略図 Schematic view showing the layer structure of a dichroic mirror according to the second embodiment of the present invention; FIG

【図5】本発明の第2実施例に係るダイクロイックミラーの透過特性を示すグラフ Graph showing the transmission characteristic of the dichroic mirror according to the second embodiment of the present invention; FIG

【図6】本発明の第2実施例に係るダイクロイックミラーにおいて表層膜を除去したときの透過特性を示すグラフ Graph showing the transmission characteristics when removing the surface layer film in a dichroic mirror according to the second embodiment of the invention; FIG

【符号の説明】 DESCRIPTION OF SYMBOLS

1,11 ガラス基板 2,12 基礎多層膜 3,13 第1表面層 4,14 第2表面層 1,11 glass substrate 2, 12 basic multilayer 3,13 first surface layer 4, 14 a second surface layer

Claims (1)

    【特許請求の範囲】 [The claims]
  1. 【請求項1】 透明基板上に、 所定値以下の波長領域の光を略全反射せしめ、該所定値より大きい波長領域の光を高透過率点以上の割合で透過せしめる、第1の物質からなる薄層と第2の物質からなる薄層を交互に積層せしめてなる基礎多層膜を設け、 この基礎多層膜上に、前記所定値より大きい波長領域の光を、該基礎多層膜の入射時に対して前記高透過率点より小さい割合で透過せしめる、前記第1の物質からなる薄層と前記第2の物質からなる薄層を各々1層ずつ有してなる表層膜を設けてなることを特徴とするダイクロイックミラー。 To 1. A transparent substrate, allowed substantially totally reflect light of a predetermined value or less in the wavelength region, allowed to transmit light of wavelengths greater area than the predetermined value at a rate of more high transmittance point, from a first material the becomes thin layer and underlying multilayer film comprising brought alternately laminating a thin layer of the second material is provided, on the basis multilayer film, the light of the greater wavelength region than a predetermined value, the time of incidence of the fundamental multilayer film by comprising providing said high allowed to transmitting a smaller proportion than the transmittance point, the first surface layer film formed includes a thin layer of a thin layer made of the second material by each one layer made of a material for dichroic mirrors, wherein.
JP4034584A 1992-02-21 1992-02-21 Method of manufacturing a dichroic mirror Expired - Fee Related JP2935765B2 (en)

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JP4034584A JP2935765B2 (en) 1992-02-21 1992-02-21 Method of manufacturing a dichroic mirror

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JP4034584A JP2935765B2 (en) 1992-02-21 1992-02-21 Method of manufacturing a dichroic mirror

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JPH05232314A true JPH05232314A (en) 1993-09-10
JP2935765B2 JP2935765B2 (en) 1999-08-16

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012002542A1 (en) * 2010-07-01 2012-01-05 株式会社ニコン Optical members and microscope

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012002542A1 (en) * 2010-07-01 2012-01-05 株式会社ニコン Optical members and microscope
US8773761B2 (en) 2010-07-01 2014-07-08 Nikon Corporation Optical member and microscope
JP5673679B2 (en) * 2010-07-01 2015-02-18 株式会社ニコン Microscope

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