JPH05219760A - Electrostatic actuator - Google Patents

Electrostatic actuator

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Publication number
JPH05219760A
JPH05219760A JP2302692A JP2302692A JPH05219760A JP H05219760 A JPH05219760 A JP H05219760A JP 2302692 A JP2302692 A JP 2302692A JP 2302692 A JP2302692 A JP 2302692A JP H05219760 A JPH05219760 A JP H05219760A
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Prior art keywords
electrodes
pair
movable
plurality
stator
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JP2302692A
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Japanese (ja)
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JP3144500B2 (en )
Inventor
Wataru Nakagawa
Michihiko Tsuruoka
亘 中川
亨彦 鶴岡
Original Assignee
Fuji Electric Co Ltd
富士電機株式会社
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Abstract

PURPOSE: To make it possible to obtain a large displacement with simple construction by connecting a plurality of movable electrodes or movable elements to a stator, having a pair of fixed electrodes divided through insulators, through support springs each other, and applying voltage through the support springs.
CONSTITUTION: A plurality of movable electrodes 2A-2N are connected to a stator having a pair of fixed electrodes 1A and 1B divided through insulators 3 through a plurality of elastic support members 4 each other, DC voltage is applied through the support members 4 from the electrodes 1A and 1B so that adjacent electrodes become reverse polarities each other, and electrostatic force acted on between electrodes is utilized to displace the movable electrodes.
COPYRIGHT: (C)1993,JPO&Japio

Description

【発明の詳細な説明】 DETAILED DESCRIPTION OF THE INVENTION

【0001】 [0001]

【産業上の利用分野】この発明は、電極間の静電力を利用して物体を変位させる、外形がミリメートル以下の超小型の静電式アクチュエータに関する。 BACKGROUND OF THE INVENTION This invention is to displace the object by using an electrostatic force between the electrodes, an electrostatic actuator of the following micro outer shape millimeters.

【0002】 [0002]

【従来の技術】図8にこの種の従来例を示す。 BACKGROUND ART FIG. 8 showing a conventional example of this kind. これは、 this is,
櫛歯状の固定電極Kと可動電極Mとを適当なギャップを設けて互いに噛み合わせ、両者に電圧を印加することにより、櫛歯の長手方向に変位させ、櫛歯数に比例する静電駆動力を得るものである。 A comb-shaped fixed electrode K and the movable electrode M is provided with suitable gaps engagement with each other, by applying a voltage to both, is displaced in the longitudinal direction of the comb teeth, the electrostatic drive in proportion to the number of comb teeth it is to obtain a force. の如く電圧を印加したときは矢印R1の方向に、またの如く電圧を印加したときは矢印R2の方向にそれぞれ変位する。 It is as when applying a voltage of in the direction of arrow R1, when applying or voltage as is displaced respectively in the direction of arrow R2. なお、Hは支持部(固定部)を示す。 Incidentally, H is shown supporting portion (fixed portion). この場合に作用する静電駆動力Fはεを比誘電率、ε 0を真空の誘電率、dをギャップ間距離、nを櫛歯数、tを歯厚、Vを印加電圧とすれば、 F=ε・ε 0・n・t・V 2 /2d …(1) として表わされる。 The electrostatic driving force F to the epsilon dielectric constant which acts in this case, epsilon 0 the dielectric constant of vacuum, gap the d distance, n the number of comb teeth, the tooth thickness of t, when the applied voltage V, expressed as F = ε · ε 0 · n · t · V 2 / 2d ... (1).

【0003】図9に別の従来例を示す。 [0003] shows another conventional example in FIG. これは、固定電極Kと可動電極Mとを対向配置し、両者に電圧を印加して矢印Fの如きギャップ間を小さくする方向の静電駆動力を得るものである。 This fixed electrode K and the movable electrode M is opposed, is intended to obtain an electrostatic driving force in the direction by applying a voltage to reduce the inter such gaps arrow F to both. この場合の静電駆動力Fはεを比誘電率、ε 0を真空の誘電率、dをギャップ間距離、S The electrostatic driving force F to the epsilon dielectric constant in this case, epsilon 0 the dielectric constant of vacuum, a gap distance of d, S
を対向面積、Vを印加電圧とすれば、 F=ε・ε 0・S・V 2 /2d 2 …(2) として表わされる。 The facing area, if the V and the applied voltage is expressed as F = ε · ε 0 · S · V 2 / 2d 2 ... (2).

【0004】 [0004]

【発明が解決しようとする課題】しかしながら、上記いずれのものも変位量が極めて小さいためその適用範囲や用途が制限され、大きな変位量が要求される用途には適用できないという問題がある。 However [0006], the are any of the amount of displacement is very small because its scope or applications that are limited, for applications where large displacement is required can not be applied. したがって、この発明の課題は特に大きな変位量を発生し得るようにすることにある。 Accordingly, an object of the invention is to make it particularly may generate a large amount of displacement.

【0005】 [0005]

【課題を解決するための手段】このような課題を解決するため、第1の発明では、絶縁体を介して分割された1 SUMMARY OF THE INVENTION To solve such problems, the first invention, divided through the insulator 1
対の固定電極を持つ固定子に対し複数の可動電極を複数の弾性支持部材を介して連結し、隣り合う電極同士が互いに異なる極性となるように各固定電極から弾性支持部材を介して電圧を印加し、各電極間に作用する静電力を利用して可動電極を変位させることを特徴としている。 A plurality of movable electrodes to the stator with a fixed electrode pairs are connected via a plurality of elastic support members, a voltage via the elastic supporting member from the fixed electrodes as between adjacent electrodes is different polarities applied to, it is characterized in that to displace the movable electrode by utilizing an electrostatic force acting between the electrodes.
この第1の発明では、前記複数の弾性支持部材のばね定数を、互いに異ならせることができる。 In the first aspect of the invention, the spring constant of the plurality of elastic supporting members, can be made different from each other.

【0006】第2の発明では、絶縁体を介して分割された1対の固定電極を持つ固定子に対し、1対の櫛歯電極を持つ複数の可動子を複数の弾性支持部材を介して連結し、前記可動子の1対の櫛歯電極が互いに異なる極性となるように各固定電極から弾性支持部材を介して電圧を印加し、この1対の櫛歯電極間に作用する静電力を利用して可動子を変位させることを特徴としている。 [0006] In the second invention, with respect to the stator with a fixed electrode of a pair of the divided through an insulator, a plurality of movable element having a pair of comb electrodes via a plurality of elastic support members ligated, a voltage is applied via the elastic supporting member from the fixed electrodes as comb electrodes of a pair of the movable member is different polarities, the electrostatic force acting between the pair of comb electrodes It is characterized in that to displace the movable element by using. この第2の発明では、前記各可動子の1対の櫛歯電極の歯を変位方向に対して同方向または平行に配置することができる。 In the second invention, it is possible to place the same direction or parallel to the tooth displacement direction of the comb electrodes of the pair of the movable element.

【0007】 [0007]

【作用】可動電極または可動子を支持ばね(弾性支持部材)を介して互いに連結し、この支持ばねを介して電圧を印加することにより、比較的簡単な構造で大きな変位を得られるようにする。 [Action] via the movable electrode or the support spring a movable member (elastic support member) are connected to each other, by applying a voltage through the support spring, so as to obtain a large displacement with a relatively simple structure .

【0008】 [0008]

【実施例】図1はこの発明の実施例を示す斜視図である。 DETAILED DESCRIPTION FIG. 1 is a perspective view showing an embodiment of the present invention. 同図において、1は固定電極1A,1Bからなる固定子、2は複数の可動電極2A〜2Nからなる可動子、 In the figure, 1 is composed of a fixed electrode 1A, 1B stator 2 comprises a plurality of movable electrodes 2A~2N mover,
3は絶縁体、4は支持ばね(弾性支持部材)、5は摺動部、6はガラス基板をそれぞれ示している。 3 insulator, the supporting spring 4 (elastic support member) 5 is sliding portion 6 denotes a glass substrate, respectively. すなわち、 That is,
固定子1と複数の可動電極2A〜2Nからなる可動子2 The stator 1 and a mover 2 comprising a plurality of movable electrodes 2A~2N
とが支持ばね4を介して互いに連結され、ガラス基板6 Bets are connected to each other via a supporting spring 4, a glass substrate 6
上に配置される。 It is placed on top. 固定子1と第1の可動子2Aとの間および各可動子2Aと2B,2Bと2C…は絶縁体3によって図示のように絶縁され、各可動子2にはその下面全体がガラス基板6に当接しないよう、摺動部5によって支えられている。 The stator 1 and the first and between the movable piece 2A and 2B of the movable element 2A, 2B and 2C ... are insulated as shown by an insulator 3, a glass substrate 6 in its entirety lower surface to each mover 2 so as not to contact the, it is supported by the sliding section 5.

【0009】したがって、固定子1の固定電極1A,1 Accordingly, the stator 1 fixed electrode 1A, 1
B間に図示のような直流電圧Eを印加すると、固定電極1Aと可動電極2A,可動電極2Aと2B,2Bと2C When applying a DC voltage E as shown between B, the fixed electrode 1A and the movable electrode 2A, the movable electrode 2A and 2B, 2B and 2C
…の間には、先の(2)式で示すような静電力が発生する。 ... between the electrostatic forces as shown in the previous equation (2) is generated. 各電極間は支持ばね4を介して互いに連結されているので、電極間の静電力が支持ばねの力に打ち勝てば可動子2は固定子1に引き付けられ、これにより基準位置から矢印方向へと変位(変位量x)することになる。 Since between the electrodes are connected to each other via a supporting spring 4, the movable element 2 when the electrostatic force between the electrodes can defeat the force of the support spring is attracted to the stator 1, thereby from the reference position in the direction of the arrow It will be displaced (displacement x). 可動子2は多数形成することが比較的容易であることから、簡単な構造で大きな変位量を得ることが可能となる。 Mover 2 from it is possible to form a large number is relatively easy, it is possible to obtain a large displacement amount with a simple structure. なお、印加電圧Eと変位xとの関係を示すと、図2 Incidentally, when showing the relationship between the applied voltage E and the displacement x, 2
のようになる。 become that way. 印加電圧E0が、電極間の静電力が支持ばねの力に打ち勝つときの電圧を示す。 Applied voltage E0 indicates the voltage at which the electrostatic force between the electrodes overcomes the force of the support spring. また、ここでは印加電圧を直流としているが、パルス状の電圧により繰り返し駆動するようにしても良いものである。 Although here it is the applied voltage and the DC, but may be repeated driven by pulse voltage.

【0010】図3は図1の変形例を示す斜視図である。 [0010] FIG. 3 is a perspective view showing a modification of FIG.
これは、図1に示すものが電極間を互いに同じばね力を持つ支持ばね4を介して互いに連結しているのに対し、 This is because the linked one another via the support spring 4 as shown in FIG. 1 have the mutually same spring force between the electrodes,
この実施例では固定子1に近いものから遠くに離れるものの順に、支持ばね4のばね力を次第に弱めて行くようにしたものである。 In order of what this away far from close to the stator 1 in the embodiment, the spring force of the support spring 4 is obtained as go weakened gradually. ここでは支持ばね4の幅を順に狭くしてばね力を次第に弱めるようにしているが、こうする代わりにその厚みを変えるようにしても良い。 Here, although as weakened progressively sequentially narrowed to spring force the width of the support spring 4 may be changed its thickness instead of this. こうすれば、印加電圧Eと変位xとの関係を図4のようなステップ状の関係にすることができ、印加電圧Eの大きさに応じた変位xを得ることが可能となる。 This way, the relationship between the applied voltage E and the displacement x can be stepwise relationship as shown in FIG. 4, it becomes possible to obtain a displacement x corresponding to the applied voltage E. 印加電圧E1が、 Applied voltage E1 is,
電極間の静電力が先端の支持ばねの力に打ち勝つときの電圧を示す。 It shows the voltage at which the electrostatic force between the electrodes overcomes the force of the support spring tip.

【0011】図5はこの発明の第3実施例を示す斜視図である。 [0011] FIG. 5 is a perspective view showing a third embodiment of the present invention. これは、図1または図3に示す可動子2と対応する可動子1,22を対となる櫛歯電極21A,21 This is a pair of movable elements 1 and 22 corresponding to the movable element 2 shown in FIG. 1 or FIG. 3 comb electrodes 21A, 21
B、22A,22Bにて構成し、可動子21と22との間および可動子22の先端を連結部材7により互いに結合するようにしたものである。 B, 22A, constituted by 22B, is obtained so as to bind to each other by a connecting member 7 tips and between the movable element 22 of the movable element 21 and 22. そして、この場合も固定子1の固定電極1Aと1Bとの間に図示の如き電圧Eを印加すれば、固定電極1Aと櫛歯電極21A,22Aには正の電圧、また固定電極1Bと櫛歯電極21B,22 Then, by applying a such as shown voltage E between the fixed electrodes 1A and 1B of the stator 1 Again, the fixed electrode 1A and the comb electrode 21A, a positive voltage is 22A, also fixed electrode 1B and the comb tooth electrodes 21B, 22
Bには負の電圧がそれぞれ印加され、各櫛歯電極間には先の(2)式で示すような静電力が働くため両者は矢印方向に互いに吸引され、これに伴い支持ばね4が弾性変形して基準位置から矢印方向へとxだけ変位することになる。 B negative voltage is applied respectively to, both because between each comb electrodes acting electrostatic force as shown in the previous equation (2) is sucked to each other in the direction of the arrow, the supporting spring 4 is elastically Accordingly consisting deformed to the reference position to be displaced only in the arrow direction x. この場合、変位xは例えば図6に示すように印加電圧Eの2乗に比例するので、図1や図3に示すもののようにステップ状に変位するものと比べてリニアな関係にすることができ、精度の良い微小変位を得ることが可能となる。 In this case, the displacement x is proportional to the square of the applied voltage E as shown in FIG. 6, for example, be a linear relationship than those to be displaced stepwise as those shown in FIGS. 1 and 3 can, it is possible to obtain an accurate small displacement. なお、ここでは、可動子を2つとしたが、一般的には複数とすることができる。 Here, it was two and a movable element, generally can be a plurality.

【0012】図7は図5の変形例を示す斜視図である。 [0012] FIG. 7 is a perspective view showing a modification of FIG.
これは、図5に示すものが可動子21,22の櫛歯電極を静電アクチュエータの変位方向に対して直角方向に動作するように配置しているのに対し、ここでは静電アクチュエータの変位方向と同方向に動作するように配置し、固定子1に対して近づくように変位させるようにした点が特徴である。 This is because the one shown in FIG. 5 is arranged to operate at right angles to comb electrodes of the movable member 21 with respect to the displacement direction of the electrostatic actuator, the displacement of the electrostatic actuator here arranged so as to operate in the same direction, a point which is adapted to displace so as to approach with respect to the stator 1 is characterized. なお、その他は図5と同様である。 The other is the same as that in FIG.
この例も可動子の数は2つに限らないことはいうまでもない。 This example also the number of the mover is naturally not limited to two.

【0013】 [0013]

【発明の効果】この発明によれば、可動電極または可動子を支持ばねを介して互いに連結し、この支持ばねを介して電圧を印加するようにしたので、比較的簡単な構造で大きな変位を得ることが可能となる。 Effects of the Invention According to the invention, connected to each other the movable electrode or the movable element via the support spring. Thus a voltage is applied via the support spring, a large displacement with a relatively simple structure It can be obtained to become.

【図面の簡単な説明】 BRIEF DESCRIPTION OF THE DRAWINGS

【図1】この発明の1実施例を示す斜視図である。 1 is a perspective view showing one embodiment of the present invention.

【図2】図1の動作を説明するための説明図である。 2 is an explanatory diagram for explaining the operation of Figure 1.

【図3】図1の変形例を示す斜視図である。 3 is a perspective view showing a modification of FIG.

【図4】図3の動作を説明するための説明図である。 4 is an explanatory diagram for explaining the operation of Figure 3.

【図5】この発明の他の実施例を示す斜視図である。 5 is a perspective view showing another embodiment of the present invention.

【図6】図5の動作を説明するための説明図である。 6 is an explanatory diagram for explaining the operation of Figure 5.

【図7】図5の変形例を示す斜視図である。 7 is a perspective view showing a modification of FIG.

【図8】従来例を示す概要図である。 8 is a schematic diagram showing a conventional example.

【図9】別の従来例を示す概要図である。 9 is a schematic diagram illustrating another conventional example.

【符号の説明】 DESCRIPTION OF SYMBOLS

1…固定子、1A,1B…固定電極、2,21,22… 1 ... stator, 1A, 1B ... fixed electrode, 2,21,22 ...
可動子、2A〜2N,21A,21B,22A,22B Mover, 2A~2N, 21A, 21B, 22A, 22B
…可動電極、3…絶縁体、4…支持ばね、5…摺動部、 ... movable electrode, 3 ... insulator, 4 ... supporting springs, 5 ... sliding portion,
6…ガラス基板、7…連結部材。 6 ... glass substrate, 7 ... connecting member.

Claims (5)

    【特許請求の範囲】 [The claims]
  1. 【請求項1】 絶縁体を介して分割された1対の固定電極を持つ固定子に対し複数の可動電極を複数の弾性支持部材を介して連結し、隣り合う電極同士が互いに異なる極性となるように各固定電極から弾性支持部材を介して電圧を印加し、各電極間に作用する静電力を利用して可動電極を変位させることを特徴とする静電式アクチュエータ。 1. A connected via a plurality of elastic support members a plurality of movable electrodes to the stator with a fixed electrode of a pair of the divided through an insulator, the polarity between adjacent electrodes are different from each other electrostatic actuator, characterized in that each of the fixed electrode via the elastic support member by applying a voltage, to displace the movable electrode by utilizing an electrostatic force acting between the electrodes as.
  2. 【請求項2】 前記複数の弾性支持部材のばね定数を、 Wherein the spring constant of the plurality of elastic support members,
    互いに異ならせることを特徴とする請求項1に記載の静電式アクチュエータ。 Electrostatic actuator according to claim 1, characterized in that different from each other.
  3. 【請求項3】 絶縁体を介して分割された1対の固定電極を持つ固定子に対し、1対の櫛歯電極を持つ複数の可動子を複数の弾性支持部材を介して連結し、前記可動子の1対の櫛歯電極が互いに異なる極性となるように各固定電極から弾性支持部材を介して電圧を印加し、この1 To 3. A stator having a fixed electrode of a pair of the divided through an insulator, a plurality of movable element having a pair of comb electrodes connected via a plurality of elastic support members, wherein a voltage is applied from the fixed electrodes as comb electrodes of the pair of the movable element is different polarities via the elastic support member, the 1
    対の櫛歯電極間に作用する静電力を利用して可動子を変位させることを特徴とする静電式アクチュエータ。 Electrostatic actuator, characterized in that to displace the movable member by using an electrostatic force acting between the pair of comb electrodes.
  4. 【請求項4】 前記各可動子の1対の櫛歯電極の歯を変位方向に対して直角方向に配置することを特徴とする請求項3に記載の静電式アクチュエータ。 4. The electrostatic actuator according to claim 3, characterized in that arranged at a right angle the relative tooth displacement direction of the comb electrodes of the pair of the movable element.
  5. 【請求項5】 前記各可動子の1対の櫛歯電極の歯を変位方向に対して平行に配置することを特徴とする請求項3に記載の静電式アクチュエータ。 Wherein said electrostatic actuator according to claim 3, characterized in that arranged parallel to the teeth direction of displacement of the comb electrodes of the pair of the movable element.
JP2302692A 1992-02-10 1992-02-10 Electrostatic actuator Expired - Fee Related JP3144500B2 (en)

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JP2302692A JP3144500B2 (en) 1992-02-10 1992-02-10 Electrostatic actuator

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JPH05219760A true true JPH05219760A (en) 1993-08-27
JP3144500B2 JP3144500B2 (en) 2001-03-12

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JP2006280181A (en) * 2005-03-30 2006-10-12 Yamaguchi Univ Electrostatic actuator
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