JPH0518258B2 - - Google Patents

Info

Publication number
JPH0518258B2
JPH0518258B2 JP58163920A JP16392083A JPH0518258B2 JP H0518258 B2 JPH0518258 B2 JP H0518258B2 JP 58163920 A JP58163920 A JP 58163920A JP 16392083 A JP16392083 A JP 16392083A JP H0518258 B2 JPH0518258 B2 JP H0518258B2
Authority
JP
Japan
Prior art keywords
dimensional
log
lsi
yield
layers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58163920A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6054465A (ja
Inventor
Junji Sakurai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP58163920A priority Critical patent/JPS6054465A/ja
Publication of JPS6054465A publication Critical patent/JPS6054465A/ja
Publication of JPH0518258B2 publication Critical patent/JPH0518258B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D88/00—Three-dimensional [3D] integrated devices

Landscapes

  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Design And Manufacture Of Integrated Circuits (AREA)
JP58163920A 1983-09-05 1983-09-05 三次元集積回路装置 Granted JPS6054465A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58163920A JPS6054465A (ja) 1983-09-05 1983-09-05 三次元集積回路装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58163920A JPS6054465A (ja) 1983-09-05 1983-09-05 三次元集積回路装置

Publications (2)

Publication Number Publication Date
JPS6054465A JPS6054465A (ja) 1985-03-28
JPH0518258B2 true JPH0518258B2 (https=) 1993-03-11

Family

ID=15783332

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58163920A Granted JPS6054465A (ja) 1983-09-05 1983-09-05 三次元集積回路装置

Country Status (1)

Country Link
JP (1) JPS6054465A (https=)

Also Published As

Publication number Publication date
JPS6054465A (ja) 1985-03-28

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