JPH05151734A - Extremely low floating slider for magnetic recording - Google Patents

Extremely low floating slider for magnetic recording

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Publication number
JPH05151734A
JPH05151734A JP31222491A JP31222491A JPH05151734A JP H05151734 A JPH05151734 A JP H05151734A JP 31222491 A JP31222491 A JP 31222491A JP 31222491 A JP31222491 A JP 31222491A JP H05151734 A JPH05151734 A JP H05151734A
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JP
Japan
Prior art keywords
slider
head
magnetic recording
medium
magnetostrictive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP31222491A
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Japanese (ja)
Inventor
Hiroyuki Awano
Youken Kin
博之 粟野
容權 金
Original Assignee
Hitachi Ltd
株式会社日立製作所
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Filing date
Publication date
Application filed by Hitachi Ltd, 株式会社日立製作所 filed Critical Hitachi Ltd
Priority to JP31222491A priority Critical patent/JPH05151734A/en
Publication of JPH05151734A publication Critical patent/JPH05151734A/en
Application status is Pending legal-status Critical

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Abstract

PURPOSE: To provide the slider for extremely low floating of ≤0.1μ which does not require a sensor and enables mounting of multiheads.
CONSTITUTION: A head 3 and a magnetostrictive actuator 6 are mounted to a cantilever beam 2 on the base of the slider and the front end of this cantilever beam 2 is supported by an elastic spring 4. The magnetostrictive body 6 receives shrinkage force by the magnetic field leaking from a medium and the head 3 is brought near to a medium when the slider floats to about 0.1μm. The elastic spring 4 has force to maintain the recording at a specified distance from or in contact with the medium. The higher recording density is attained, the construction is simplified and the number of parts is decreased. In addition, there is no need for a control circuit and the high accuracy is obtd. The need for assembly stages is eliminated and the mass production and cost reduction are enabled.
COPYRIGHT: (C)1993,JPO&Japio

Description

【発明の詳細な説明】 DETAILED DESCRIPTION OF THE INVENTION

【0001】 [0001]

【産業上の利用分野】本発明は、磁気ディスク装置,フレキシブルディスク装置,光ディスク装置などの磁気記録装置に係り、特に、ヘッドと媒体との一定な極低浮上高や接触力を保つスライダに関する。 BACKGROUND OF THE INVENTION The present invention relates to a magnetic disk apparatus, flexible disk apparatus, relates to a magnetic recording apparatus such as an optical disk apparatus, particularly to a slider to maintain a constant very low flying height and contact force between the head and the medium.

【0002】 [0002]

【従来の技術】磁気記録装置において、高記録密度化に伴って、スライダの極低浮上化が期待されるようになってきた。 BACKGROUND OF THE INVENTION Magnetic recording apparatus, with an increase in recording density, very low flying height of the slider has come to be expected. 従来の磁気記録装置のスライダでは、スライダの形状とジンバルの押し付け力を工夫して低い浮上高を得た。 The slider of the conventional magnetic recording apparatus, to obtain a low flying height by devising the shape and the pressing force of the gimbal the slider. しかし、この方法では0.1μ 以下の浮上高を得ることは難しいと知られている。 However, this method is known to be difficult to obtain the following fly height 0.1 [mu].

【0003】アイイーイーイー トランザクションズ [0003] Eye E Ii Transactions
オン マグネティクス(IEEETransactions on Magnetic On Magnetics (IEEETransactions on Magnetic
s)Vol.26,No.5,pp. s) Vol.26, No.5, pp. 2478−2483(1 2478-2483 (1
990)にはスライダに圧電素子を装着してヘッドを動かし、コンタクトレコーディングを行う公知例が記載されている。 The 990) to move the head by mounting a piezoelectric element on the slider, known example of performing a contact record is described.

【0004】特開昭62−167681号公報と特開昭62−3476 [0004] JP-A-62-167681 JP and JP-A-62-3476
号公報には、第一スライダに第二スライダを装着し、極低浮上を行う公知例が記載されている。 No. In Japanese, a second slider mounted on the first slider, known example of performing very short distance is described.

【0005】 [0005]

【発明が解決しようとする課題】従来のアクチュエータを組み込んだ極低浮上スライダでは、なんらかのセンサを用いて浮上高や接触力を測定し、その情報によりアクチュエータを駆動して一定の浮上高や接触力を制御した。 THE INVENTION Problems to be Solved] In the extremely low flying slider incorporating a conventional actuator, measuring the flying height and contact force using some sensors, constant flying height and contact force by driving the actuator by the information It was controlled. しかし、このような方法では、アクチュエータ以外にセンサも装着することになるので、スライダの構造が複雑になり、部品数も増え、さらにアクチュエータを制御する回路が必要となる。 However, in such a method, since the sensor in addition to the actuator will be mounted, the structure of the slider is complex, even more parts count, it is necessary circuitry to further control the actuator.

【0006】従来の第一スライダに第二スライダを装着し極低浮上を行うスライダでは、第二スライダが大きく、一括多数製作が不可能である。 [0006] to a conventional first slider in the slider to perform the mounting and ultra-low floating the second slider, the second slider is large, it is impossible to lump many production. 従って、第一スライダごとに多数の第二スライダを装着することは困難であり、その上組立工程が複雑になる。 Therefore, mounting the plurality of second slider for each first slider is difficult, its upper assembly process is complicated.

【0007】本発明の目的は、センサを必要としない、 [0007] It is an object of the present invention does not require a sensor,
マルチヘッドの装着可能な極低浮上用スライダを提供することにある。 It is to provide a wearable extremely low flying slider multihead.

【0008】 [0008]

【課題を解決するための手段】上記の目的は、スライダを0.1μ 程度の高さで浮上させ、さらにヘッドのみを媒体の方に近付けることで達成される。 The purpose of the Means for Solving the Problems], the slider is floated at a height of about 0.1 [mu], it is further accomplished by bringing the only head towards the medium. 即ち、ヘッドが上下方向に動くように作りそのヘッドに弾性ばねを設けて剛性を高める。 That is, the head increases the rigidity by providing a resilient spring on the head made to move in the vertical direction. さらに媒体からのもれ磁界により歪み変位を起こす磁歪体膜,ヘッド,弾性ばねをスライダに装着した構造を半導体集積技術である成膜,フォトリソグラフィ,犠牲層技術により一括工程で作製することにより達成される。 Further magnetostrictive film causing distortion displacement due to the leakage magnetic field from the medium achieved, the head, the deposition is an elastic spring semiconductor integrated technology a structure mounted on the slider, photolithography, by manufacturing in a batch process by sacrificial layer technique It is. 磁歪体は、印加磁界に対して負の歪みを起こす磁歪体を使う。 Magnetostrictive body, use a magnetostrictive material to cause a negative distortion with respect to the applied magnetic field. 磁歪体膜はストライプ状に作製する。 Magnetostrictive film is prepared in a stripe pattern.

【0009】 [0009]

【作用】本発明において、磁歪体膜はヘッドを動かすアクチュエータと、ヘッドと媒体との浮上高を測定するセンサの役割を果たす。 [Action] In the present invention, serves sensors magnetostrictive film measuring an actuator for moving the head, the flying height of the head and the medium. 即ち、媒体からのもれ磁界により磁歪体は収縮運動を行い、片持ち梁は媒体の方に曲る。 That is, the magnetostrictive member by a leakage magnetic field from the medium performs contraction motion, cantilever flex towards the medium.
その力は磁歪体に加わる磁界に比例して大きくなるので、磁歪体と媒体との距離、即ち、浮上高に影響される。 Since the force increases in proportion to the magnetic field applied to the magnetostrictive body, the distance between the magnetostrictive body and the medium, i.e., it is affected by the flying height.

【0010】弾性ばねはヘッドをスライダに固定し、ヘッドと片持ち梁の剛性を上げる役割を果たす。 [0010] role resilient spring which secures the head to the slider, raise the rigidity of the head and the cantilever. さらに、 further,
浮上高や接触力を調整する働きをする。 It serves to adjust the flying height and contact force. 磁歪体は媒体に近付くほど強い磁界が加われ、磁歪体はもっと媒体に近付こうとする。 Magnetostrictive body Kuwaware a strong magnetic field closer to the media, the magnetostrictive body will try to approach the more media. そのとき、弾性ばねからその反対方向の力が働き、ヘッドは一定な浮上高や接触力を保つことができる。 Then, work is the opposite direction of the force from the elastic spring, the head can be kept constant flying height and contact force.

【0011】片持ち梁は根元の幅を広く,先方の幅を細く作り、速い動作にも追従できるように剛性を高める。 [0011] The cantilever beam is wider at the base, making narrow the other party of the width, increasing the rigidity to be able to follow in fast action.

【0012】磁歪体が歪みを起こすときには、伸び(あるいは縮み)方向と垂直な方向には縮み(あるいは伸び)運動をする。 [0012] When the magnetostrictive body is causing the distortion, elongation (or contraction) in the direction perpendicular to the direction to the shrinkage (or growth) movement. このようなことは得たい方向の歪みを小さくする要因となる。 Such is a factor to reduce the distortion in the direction to be obtained. この影響を小さくするため、磁歪体膜を伸縮運動を行う方向のストライプ状に作製する。 To reduce this effect, making the direction of the stripe to perform stretching movement magnetostrictive film.

【0013】 [0013]

【実施例】本発明を磁気ディスク装置のスライダに適用した場合の一実施例を図1に示す。 An example of a case where EXAMPLES The present invention is applied to a slider of a magnetic disk apparatus shown in FIG. 図1において、スライダ1の底面に片持ち梁2を作製する。 1, to produce a cantilever 2 on the bottom surface of the slider 1. ヘッド3が上下方向の運動ができるように、片持ち梁2にヘッド3を設ける。 As the head 3 can vertical movement, the head 3 is provided in a cantilever 2. 片持ち梁2の先方とスライダ1の間に弾性ばね4 Elastic spring 4 between the cantilever 2 other party and the slider 1
を装着し、ヘッドの剛性を高める。 The mounting, increase the rigidity of the head.

【0014】片持ち梁2で、媒体5との対向面に磁歪体膜6を作製する。 [0014] In the cantilever 2 to produce a magnetostrictive film 6 on the surface facing the medium 5. スライダ1が0.1μ程度に浮上すると、媒体5からのもれ磁界により磁歪体6は歪む力を受ける。 When the slider 1 flies about 0.1 [mu], magnetostrictive body 6 by the leakage magnetic field from the medium 5 is subjected to distortion forces. 磁歪体6は、図2に示すような負の歪みを起こす材料を使う。 Magnetostrictive body 6, using materials that cause negative distortion as shown in FIG. 例えば、Ni,Co,Fe,NiFe For example, Ni, Co, Fe, NiFe
24 ,CoFe 24 ,Sm 2 Fe 17 ,Tb 2 Fe 17 ,Dy 2 O 4, CoFe 2 O 4 , Sm 2 Fe 17, Tb 2 Fe 17, Dy
2 Fe 17 ,Ho 2 Fe 17 ,Er 2 Fe 17 ,Tm 2 Fe 17 ,S 2 Fe 17, Ho 2 Fe 17 , Er 2 Fe 17, Tm 2 Fe 17, S
mFe 3 ,ErFe 3 ,TmFe 3 ,Er 4 Fe 13 ,TmF mFe 3, ErFe 3, TmFe 3 , Er 4 Fe 13, TmF
13 ,SmFe 2 ,ErFe 2 ,TmFe 2 ,CoPd 4 e 13, SmFe 2, ErFe 2 , TmFe 2, CoPd 4,
NiPd 4などの磁歪体が使える。 Magnetostrictive material such as NiPd 4 can be used.

【0015】磁歪体膜6が受ける力によって片持ち梁2 [0015] The cantilever beam by the force of the magnetostrictive film 6 is subjected to 2
は、図3で示すように、媒体5の方に曲り、ヘッド3と媒体5との距離は0.1μ 以下に縮まる。 As shown in Figure 3, bending towards the medium 5, the distance between the head 3 and the medium 5 shrinks below 0.1 [mu]. 片持ち梁2が媒体5に近付くと図4のように磁界はより強くなる。 Field as shown in FIG. 4 when the cantilever beam 2 approaches the medium 5 is stronger. その時、片持ち梁2が媒体5に近付けば近付くほど磁歪体6には大きな歪みが生じ、片持ち梁2はさらに媒体5の方に曲がるようになる。 At that time, the cantilever 2 is caused a large distortion to the magnetostrictive body 6 the closer to the medium 5, the cantilever 2 is as further bent towards the medium 5. 弾性ばね4は、その力を打ち消してヘッド3と媒体5との間一定な浮上高あるいは接触力を維持するようにばね係数を決めて作製する。 Elastic spring 4 is manufactured decided spring constant to maintain a constant flying height or the contact force between the head 3 and the medium 5 to cancel its power.

【0016】磁歪体6に加わる磁界は媒体5からのもれ磁界なので、トラックに沿って図5のように空間的に変化する。 [0016] Since the magnetic field applied to the magnetostrictive member 6 is a leakage magnetic field from the medium 5, spatially changes as shown in FIG. 5 along the track. しかし、磁歪体は磁界強さのみに影響され歪むので、磁歪体6は図6のような磁界に比例して歪むことになる。 However, magnetostrictive body so distorted is affected only to the magnetic field strength, the magnetostrictive body 6 will be distorted in proportion to the magnetic field as shown in Figure 6. そして、磁歪体6は幅広く数十トラックにわたるように作製し、媒体5の数十トラックの磁界によって発生する磁歪を平均するようにする。 The magnetostrictive body 6 is fabricated to span a wide range of several tens of tracks, so as to average the magnetostriction generated by the magnetic field of several tens of tracks on the medium 5. このようなことで、図6のような円周方向位置の磁界による磁歪変動を減らし、磁歪体が浮上高による磁界変化に主に影響されることになる。 In this reason, reducing the magnetostriction variation caused by the magnetic field in the circumferential direction position as shown in FIG. 6, the magnetostrictive body is to be influenced mainly the magnetic field change due to fly height.

【0017】図7には、本発明における弾性ばねの一実施例を示している。 [0017] FIG. 7 shows an embodiment of a resilient spring in the present invention. 弾性ばねの固定部7はスライダ1の後面に固定され、弾性ばねを支えており、その他の弾性ばねはスライダの後面から浮いている。 The fixing part 7 of the elastic spring is fixed to the rear surface of the slider 1, which support the elastic spring, other elastic spring is floated from the surface of the slider. 図7で弾性ばねは平行ばね8で構成されている。 Elastic spring in Figure 7 is constituted by a parallel spring 8. 弾性ばねは片持ち梁2 Elastic spring cantilever 2
の先方に接合されている。 It is joined to the other party of. 弾性ばねのばね係数はばねの数,幅,長さにより決る。 The spring coefficient of the elastic spring determined the number of springs, the width, the length. 片持ち梁2の形状は、片持ち梁の剛性を高めるために根元を幅広く,先方が細い形状にする。 The shape of the cantilever 2, a wide range of base in order to increase the rigidity of the cantilever, other party to the narrow shape.

【0018】図8は、本発明における磁歪体膜形状の一実施例を示している。 [0018] Figure 8 shows an embodiment of a magnetostrictive film configuration in the present invention. 磁歪体が歪みを越すときには、伸び(あるいは縮み)方向と垂直な方向には縮み(あるいは伸び)運動をする。 When the magnetostrictive body Kos strain extends (or contraction) in the direction perpendicular to the contraction (or elongation) movement. このようなことは得ようとする方向の歪みを小さくするため、磁歪体の形状を伸縮運動方向にストライプ状に作製する。 Such order to reduce the distortion in a direction to be obtained things, to produce the shape of the magnetostrictive body expansion and contraction direction in stripes.

【0019】図9には、本発明によるヘッド,アクチュエータ,弾性ばねをスライダに複数個装着した一実施例を示す。 [0019] Figure 9, the head according to the present invention, an actuator, an embodiment in which a plurality mounted an elastic spring to the slider shown. ヘッドが上下方向に動くので、マルチヘッドとしても使える。 Since the head is moved in the vertical direction, it can also be used as a multi-head.

【0020】本発明におけるスライダは、半導体の集積技術である成膜,フォトリソグラフィ,犠牲層技術により一括工程で作製できる。 The slider can be made in a batch process film formation which is a semiconductor integrated technology, photolithography, by sacrificial layer techniques in [0020] the present invention. その工程は以下の通りである。 The process is as follows. すなわち、まず、図10のようにスライダの基板1 That is, first, the substrate of the slider as shown in FIG. 10 1
0にヘッド,アクチュエータを埋め込めるように溝11 0 to the head, so that embed actuator groove 11
を作る。 make. その溝11に成膜,フォトリソグラフィ技術で、図11のような犠牲層12,ヘッド3,磁歪体膜6 Deposited in the groove 11, a photolithography technique, the sacrificial layer 12 as shown in FIG. 11, the head 3, magnetostrictive film 6
を作る。 make. ここで、片持ち梁2の先方は加工の余裕13を考慮して少々長く作る。 Here, other party of the cantilever 2 is make a little long taking into account the processing of the margin 13. 図12にはパタニングしたスライダを示す。 The Figure 12 shows the slider is patterned. 犠牲層12はまだ除去しないまま、図13 Sacrificial layer 12 is still without removing 13
のようにスライダを列方向に切り出す。 Cut the slider in the column direction as. 図13の上面、 Top of Figure 13,
即ち、スライダの後面をラップ加工して弾性ばね4を作製する。 That is, the rear surface of the slider and lapped to produce a resilient spring 4. 図14はその断面を示しており、弾性ばね4はリソグラフィによりパタニングされている。 Figure 14 shows a cross section, elastic spring 4 is patterned by lithography. 次に、図1 Next, as shown in FIG. 1
3のスライダ基板からスライダを1個ずつ切り出して加工する。 From 3 of the slider substrate by cutting the slider one by one for processing. 最後に、犠牲層12をウェットエッチングして除去すればスライダが出来上がる。 Finally, the slider is completed by removing by wet etching the sacrificial layer 12.

【0021】 [0021]

【発明の効果】本発明によれば、スライダが0.1μ 程度に浮上してもヘッドは磁歪アクチュエータにより媒体の方に近付けるので、0.1μ以下のヘッドと媒体の距離を得ることができる。 According to the present invention, since the slider head also emerged about 0.1 [mu] closer towards the medium by the magnetostrictive actuator, can be obtained the distance below the head and the medium 0.1 [mu]. また、ヘッドと媒体との一定な接触力を維持することができる。 Further, it is possible to maintain a constant contact force between the head and the medium. 従って、磁気記録の高密度化ができる。 Accordingly, it is a high density of magnetic recording.

【0022】本発明では、磁歪体が媒体からのもれ磁界を感知してヘッドの浮上高を調整する。 [0022] In the present invention, the magnetostrictive body adjusts the flying height of the head by sensing a leakage magnetic field from the medium. 即ち、磁歪体がセンサとアクチュエータの役割を果たすので、構造が単純となり、部品数を減らすことができる。 That is, since the role of the magnetostrictive body sensors and actuators, the structure is simplified, it is possible to reduce the number of parts. さらに、磁歪アクチュエータと弾性ばねを含む系を適当に設計することで、一定な浮上高や接触力を得ることができるので制御回路が要らなくなる。 Further, by appropriately designing a system comprising a magnetostrictive actuator and an elastic spring, the control circuit is not needed because it is possible to obtain a constant flying height and contact force.

【0023】ヘッド,アクチュエータ,弾性ばねは半導体集積技術で作られる。 The head, actuator, elastic spring is made of a semiconductor integration technique. 従って、高精度でかつ組立工程が要らなくなり量産に向いているので、低価格化が図られる。 Therefore, since high accuracy is and the assembly process is facing no longer production need, cost reduction can be achieved. そして、複数個の可動ヘッドを同時にスライダに装着できるので、マルチヘッド機構としても使えることになり、磁気記録装置の小型化や高性能化も図られる。 Since a plurality of the movable head can be simultaneously mounted on the slider, it will be also used as a multi-head mechanism, downsizing and higher performance of the magnetic recording device is also reduced.

【図面の簡単な説明】 BRIEF DESCRIPTION OF THE DRAWINGS

【図1】本発明の一実施例を示す磁気記録装置のスライダの説明図。 Illustration of a slider of a magnetic recording apparatus according to an embodiment of the present invention; FIG.

【図2】本発明のアクチュエータとして使う磁歪体の磁界強さと磁歪の関係を示す説明図。 FIG. 2 is an explanatory diagram showing the relationship between magnetic field strength and the magnetostriction of the magnetostrictive body used as an actuator of the present invention.

【図3】本発明の一実施例を示す図で、片持ち梁,磁歪体膜,弾性ばねの作用を示す説明図。 [Figure 3] a diagram showing an embodiment of the present invention, explanatory view showing a cantilever beam, magnetostrictive films, the action of the resilient spring.

【図4】媒体からのもれ磁界に関する説明図。 FIG. 4 is an explanatory diagram relating to the leakage magnetic field from the medium.

【図5】円周方向における媒体からのもれ磁界を示す特性図。 [5] characteristic diagram showing the leakage magnetic field from the medium in the circumferential direction.

【図6】円周方向におけるもれ磁界の絶対値を示す特性図。 [6] characteristic diagram showing the absolute value of the leakage magnetic field in the circumferential direction.

【図7】本発明における弾性ばねの一実施例を示す斜視図。 Perspective view showing an embodiment of a resilient spring in the present invention; FIG.

【図8】本発明における磁歪体膜形状の一実施例を示す説明図。 Explanatory view showing an embodiment of a magnetostrictive film configuration in the present invention; FIG.

【図9】本発明の機構を複数個装着したスライダの一実施例を示す斜視図。 Figure 9 is a perspective view showing one embodiment of a plurality mounting the slider mechanism of the present invention.

【図10】ヘッドとアクチュエータ用の溝を設けたスライダ基板を示す斜視図。 Figure 10 is a perspective view showing a slider substrate provided with a groove for the head and the actuator.

【図11】本発明における成膜,フォトリソグラフィしたスライダ溝の断面図。 [11] film formation in the present invention, cross-sectional view of the slider groove and photolithography.

【図12】本発明におけるパタニングしたスライダを示す斜視図。 Perspective view of a slider which is patterned in the present invention; FIG.

【図13】本発明におけるスライダ後面を加工したスライダ基板を示す斜視図。 Figure 13 is a perspective view showing a slider substrate obtained by processing the slider rear surface in the present invention.

【図14】本発明におけるスライダの断面図。 Sectional view of the slider in FIG. 14 the present invention.

【符号の説明】 DESCRIPTION OF SYMBOLS

1…スライダ、2…片持ち梁、3…ヘッド、4…ばね、 1 ... slider, 2 ... cantilever, 3 ... head, 4 ... spring,
5…記録媒体、6…磁歪体。 5 ... recording medium, 6 ... magnetostrictive body.

Claims (6)

    【特許請求の範囲】 [The claims]
  1. 【請求項1】磁気記録装置のスライダにおいて、上下運動が可能な構造のヘッドに弾性ばねと上下方向の力を発生する磁歪体アクチュエータをもち、前記ヘッドと媒体との隙間を0.1μ 以下に一定に保つことあるいはヘッドと媒体との接触力を一定に保つことを特徴とする磁気記録用極低浮上スライダ。 In the slider according to claim 1 A magnetic recording device, having a magnetostrictive material actuator for generating a force between the elastic spring head structure capable vertical motion up and down direction, the gap between the head and the medium below 0.1μ magnetic recording very low flying slider, characterized in that to keep the contact force between it or the head and the medium is kept constant in the constant.
  2. 【請求項2】請求項1において、印加磁界に対して収縮歪みを起こす磁歪材料からなる磁気記録用極低浮上スライダ。 2. A according to claim 1, the magnetic recording very low flying slider made of magnetostrictive material causing shrinkage tension to the applied magnetic field.
  3. 【請求項3】請求項1または2において、前記ヘッドと磁歪体膜を含む片持ち梁の根元が幅広く、先方が細い形状の磁気記録用極低浮上スライダ。 3. An apparatus according to claim 1 or 2, wherein the head and the root are widely cantilever including magnetostrictive film, magnetic recording very low flying slider of groups of the preceding thin shape.
  4. 【請求項4】請求項1または2において、収縮方向と平行方向に溝を設けたストライプ状の磁歪体膜からなる磁気記録用極低浮上スライダ。 4. The method of claim 1 or 2 the magnetic recording very low flying slider comprising a stripe-shaped magnetostrictive film having a groove in the contracting direction and the parallel direction.
  5. 【請求項5】請求項1において、前記ヘッド,前記ばね,前記アクチュエータを複数個装着する磁気記録用極低浮上スライダ。 5. The method of claim 1, wherein the head, the spring, the magnetic recording extremely low flying slider plurality mounting the actuator.
  6. 【請求項6】請求項1において、成膜,フォトリソグラフィ,犠牲層技術により一括工程で作製する磁気記録用極低浮上スライダ。 6. The method of claim 1, film formation, photolithography, magnetic recording very low flying slider to produce in a batch process by sacrificial layer technique.
JP31222491A 1991-11-27 1991-11-27 Extremely low floating slider for magnetic recording Pending JPH05151734A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP31222491A JPH05151734A (en) 1991-11-27 1991-11-27 Extremely low floating slider for magnetic recording

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP31222491A JPH05151734A (en) 1991-11-27 1991-11-27 Extremely low floating slider for magnetic recording

Publications (1)

Publication Number Publication Date
JPH05151734A true JPH05151734A (en) 1993-06-18

Family

ID=18026682

Family Applications (1)

Application Number Title Priority Date Filing Date
JP31222491A Pending JPH05151734A (en) 1991-11-27 1991-11-27 Extremely low floating slider for magnetic recording

Country Status (1)

Country Link
JP (1) JPH05151734A (en)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005322395A (en) * 2004-04-30 2005-11-17 Headway Technologies Inc Recording head, reproducing head, reproducing and recording head and displacement method of reproducing and recording head
US7154696B2 (en) * 2004-02-11 2006-12-26 Hitachi Global Storage Technologies Netherlands B.V. Tunable fly height using magnetomechanical effect in a magnetic head
US7283327B1 (en) 2004-05-28 2007-10-16 Western Digital (Fremont), Llc Magnetic write head having resistive heater coil
US7372665B1 (en) 2005-01-18 2008-05-13 Western Digital (Fremont), Llc Magnetic recording head with resistive heating element located near the write coil
US7428124B1 (en) 2005-01-18 2008-09-23 Western Digital (Fremont), Llc Magnetic recording head with resistive heating element and thermal barrier layer
US7430098B1 (en) 2005-01-18 2008-09-30 Western Digital (Fremont), Llc Perpendicular magnetic recording head with dynamic flying height heating element
US7660080B1 (en) * 2004-04-30 2010-02-09 Western Digital (Fremont), Llc Read/write head with dynamic flying height control by magnetostriction
JP2011086342A (en) * 2009-10-15 2011-04-28 Hitachi Ltd Method and device for initializing magnetic recording medium
US7948713B2 (en) * 2007-01-12 2011-05-24 Tdk Corporation Magnetic head slider using giant magnetostrictive material
US8958178B2 (en) 2009-07-29 2015-02-17 HGST Netherlands B.V. Reducing slider bounce in a hard disk drive

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7154696B2 (en) * 2004-02-11 2006-12-26 Hitachi Global Storage Technologies Netherlands B.V. Tunable fly height using magnetomechanical effect in a magnetic head
JP2005322395A (en) * 2004-04-30 2005-11-17 Headway Technologies Inc Recording head, reproducing head, reproducing and recording head and displacement method of reproducing and recording head
US7660080B1 (en) * 2004-04-30 2010-02-09 Western Digital (Fremont), Llc Read/write head with dynamic flying height control by magnetostriction
US7385789B2 (en) * 2004-04-30 2008-06-10 Headway Technologies, Inc. Magnetostrictive actuator in a magnetic head
US7283327B1 (en) 2004-05-28 2007-10-16 Western Digital (Fremont), Llc Magnetic write head having resistive heater coil
US7430098B1 (en) 2005-01-18 2008-09-30 Western Digital (Fremont), Llc Perpendicular magnetic recording head with dynamic flying height heating element
US7428124B1 (en) 2005-01-18 2008-09-23 Western Digital (Fremont), Llc Magnetic recording head with resistive heating element and thermal barrier layer
US7372665B1 (en) 2005-01-18 2008-05-13 Western Digital (Fremont), Llc Magnetic recording head with resistive heating element located near the write coil
US7729086B1 (en) 2005-01-18 2010-06-01 Western Digital (Fremont), Llc Perpendicular magnetic recording head with dynamic flying height heating element disposed below turns of a write coil
US7729087B1 (en) 2005-01-18 2010-06-01 Western Digital (Fremont), Llc Magnetic recording head with resistive heating element located near the write coil
US7948713B2 (en) * 2007-01-12 2011-05-24 Tdk Corporation Magnetic head slider using giant magnetostrictive material
US8958178B2 (en) 2009-07-29 2015-02-17 HGST Netherlands B.V. Reducing slider bounce in a hard disk drive
JP2011086342A (en) * 2009-10-15 2011-04-28 Hitachi Ltd Method and device for initializing magnetic recording medium

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