JPH05142405A - Micromotor - Google Patents

Micromotor

Info

Publication number
JPH05142405A
JPH05142405A JP30495191A JP30495191A JPH05142405A JP H05142405 A JPH05142405 A JP H05142405A JP 30495191 A JP30495191 A JP 30495191A JP 30495191 A JP30495191 A JP 30495191A JP H05142405 A JPH05142405 A JP H05142405A
Authority
JP
Japan
Prior art keywords
formed
micromotor
rotating disk
semiconductor substrate
diffraction grating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP30495191A
Other languages
Japanese (ja)
Inventor
Toshihiko Osada
俊彦 長田
Original Assignee
Fujitsu Ltd
富士通株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd, 富士通株式会社 filed Critical Fujitsu Ltd
Priority to JP30495191A priority Critical patent/JPH05142405A/en
Publication of JPH05142405A publication Critical patent/JPH05142405A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03HHOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00Holographic processes or apparatus using light, infra-red or ultra-violet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/0005Adaptation of holography to specific applications
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03HHOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H2230/00Form or shape of the hologram when not registered to the substrate
    • G03H2230/10Microhologram not registered to the substrate

Abstract

(57) [Abstract] [Purpose] An object of the present invention is to increase the added value to realize a micromotor suitable for, for example, an optical scanner device and to expand the usage of the micromotor. [Structure] Equally spaced protrusions (3a) are formed on the outer periphery of a rotating disk (3) made of a conductive material formed on a semiconductor substrate (2), and fixed electrodes (4) facing the protrusions are formed. A micromotor formed on a semiconductor substrate, wherein a reflective holographic diffraction grating (6) is formed on the surface of the rotating disk.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a micromotor, and more particularly to a lightweight and thin micromotor manufactured by making full use of semiconductor manufacturing technology and miniaturization processing technology, and more particularly to a micromotor having an increased added value.

[0002]

2. Description of the Related Art A micromotor is a microminiature rotor (for example, having a diameter of 100 μm) made of polysilicon on a semiconductor substrate.
m) is rotatably arranged, and the fixed electrodes are formed on the semiconductor substrate in the same number as the equally spaced projections facing the equally spaced projections formed on the outer peripheral portion of the rotor. By shifting the voltage phase, the rotor is caused to rotate.

[0003]

However, such a conventional micromotor is not suitable for applications requiring a rotational force because of its extremely small rotational torque, and its use is limited. There is. Therefore, an object of the present invention is to increase the added value to realize a micromotor suitable for, for example, an optical scanner device and to expand the usage of the micromotor.

[0004]

In order to achieve the above-mentioned object, the present invention forms equidistant projections on the outer peripheral portion of a rotating disk made of a conductive material formed on a semiconductor substrate, and
In a micromotor in which a fixed electrode facing the protrusion is formed on the semiconductor substrate, a reflective holographic diffraction grating is formed on the surface of the rotating disk.

[0005]

In the present invention, when the holographic diffraction grating that rotates integrally with the rotating disk is irradiated with, for example, laser light, the reflected laser light is scanned as the holographic diffraction grating rotates, and, for example, an optical scanner device. A micromotor applicable to is realized.

[0006]

Embodiments of the present invention will be described below with reference to the drawings. 1 to 5 are views showing an embodiment of a micromotor according to the present invention. In FIG. 1, reference numeral 1 denotes a micromotor. The micromotor 1 has a rotating disk 3 made of a conductive material (eg, polysilicon) and a large number of fixed electrodes 4 on a semiconductor substrate (eg, silicon substrate) 2. And configure.

A large number (the same number as the fixed electrodes 4) of equally-spaced protrusions 3a (see FIG. 4A) are formed on the outer peripheral portion of the rotating disk 3, and a tapered circular shape is formed at the center thereof. Hole 3
b is formed, and the circular hole 3b is formed in the semiconductor substrate 2
It engages with the shaft portion 5 integrated with a small amount of play. Here, the shaft portion 5 has a minimum inner diameter (d
min) and a flange 5a having an outer diameter larger than that of the flange 5a. The maximum outer diameter of the reverse taper portion 5b is set to be slightly smaller than the maximum inner diameter (dmax) of the circular hole 3b.

Further, in each of the areas obtained by partitioning the surface of the rotating disk 3 into a plurality of areas in the radial direction, a reflection type holographic diffraction grating is provided.
ing) 6 is formed. 2 and 3 are manufacturing process diagrams of the above micromotor. The steps will be described below. <Step of FIG. 2A> First, a polysilicon film 8 having a thickness of about 4.5 μm is attached to a first sacrificial oxide film 7 having a thickness of about 3 μm grown on the semiconductor substrate 2. The polysilicon 8 is arranged in a circular shape, and a large number of equally-spaced protrusions 3 are formed on the outer peripheral portion thereof.
a is formed, and a cylindrical hole 8a is further formed in the central portion. <Step of FIG. 2 (b)> Next, the cylindrical hole 8a is etched to form the rotary disc 3 of this embodiment having a tapered circular hole 3b, and then the step of FIG. 2 (c)>. The first sacrificial oxide film 7 is over-etched through the circular hole 3b. <Process of FIG. 2 (d)> Next, the second sacrificial oxide film 9 having a thickness of about 1 μm is grown so as to cover the rotating disk 3 and the circular hole 3b, and the second sacrificial oxide film near the center of the circular hole 3b is grown. 9 is removed, and the semiconductor substrate 2 is exposed from there. <Process of FIG. 3A> Polysilicon 10 having a thickness of about 3 μm is grown inside the circular hole 3b.
Is integrated with the exposed portion (A) of the semiconductor substrate 2. <Step of FIG. 3 (b)> Next, after lapping (polishing) the surface of the rotating disk 3 to have a smoothness of, for example, several tens of angstroms, a reflective holographic diffraction grating 6 is formed on the surface. Form. In order to form the diffraction grating, for example, an interference fringe formed by dividing the laser light into two light beams by a beam splitter and making each light beam into a parallel light beam or a divergent light beam and irradiating the surface of the rotating disk 3 from two directions is used. May be.

At the same time, the lapping process is a process for removing the protruding portion (B) of the polysilicon 10 to form the shaft portion 5. Here, the end surface of the shaft portion 5 and the surface of the rotary disk 3 are brought to the same level by the lapping process, but since the rotary disk 3 and the shaft portion 5 are engaged with each other in a tapered shape, the rotary circle from the shaft portion 5 is rotated. There is no danger that the plate 3 will fall out. <Process of FIG. 3C> Finally, the first sacrificial oxide film 7 and the second sacrificial oxide film 7 are formed.
After removing the sacrificial oxide film 9, a large number of fixed electrodes (not shown) are formed on the semiconductor substrate 2 to complete the micromotor 1.

As shown in FIG. 4A, the micromotor 1 of the present embodiment manufactured as described above applies a voltage with a phase shift to each of a plurality of fixed electrodes 4 to thereby fix the fixed electrodes. An electric force acts between the rotating disk 3 and the equally-spaced projections 3a of the rotating disk 3 to rotate the rotating disk 3, and at the same time, the holographic diffraction grating 6 on the surface of the rotating disk 3 also rotates.

Here, as shown in FIG. 4B, if the rotating holographic diffraction grating 6 is irradiated with laser light, the reflected laser light can be scanned in synchronization with the rotation. Therefore, the micromotor can be applied to the optical scanner device, and for example, the mechanism of the POS device, the laser printer, etc. can be simplified, downsized, lightened, and the power consumption can be reduced.

Further, as shown in FIG. 5, if a plurality of (two in the figure) micromotors are simultaneously irradiated with laser light, the holographic diffraction grating of each micromotor can reflect the laser light, and a plurality of micromotors can be reflected. Since the laser beam can be simultaneously scanned, it is particularly preferable to apply the present invention to a POS device in which a plurality of light beams are used to improve the barcode reading accuracy.

As described above, according to the present embodiment, the reflective holographic diffraction grating 6 is formed on the surface of the rotary disk 3 of the micromotor 1 to enhance the added value.
For example, it can be applied to an optical scanner device, and the application of the micromotor can be expanded to a POS device, a laser printer, or the like that uses the optical scanner device.

In this embodiment, the circular disc 3 of the micromotor 1 is formed with a tapered circular hole 3b, and
Since the circular hole 3b is engaged with the inversely tapered shaft portion 5, the surface of the rotary disc 3 and the end surface of the shaft portion 5 are separated from each other by the lapping process performed when the holographic diffraction grating 6 is formed. Even if the same level is reached, there is no danger that the rotary disc 3 will fall out. By the way, in the conventional micromotor, the shaft portion has a cylindrical shape (the same shape as the cylindrical hole 8a in the step of FIG. 2A), and a wide portion is provided at the shaft end portion to prevent the shaft from falling off. However, if the above lapping process is performed, the wide portion of the shaft end portion is lost, and thus the rotary disc cannot be prevented from falling out with the same structure.

[0015]

According to the present invention, the surface of the rotating disk is divided into a plurality of radial regions, and a reflective holographic diffraction grating is formed in each region to increase the added value. It is possible to realize a micromotor suitable for the device and expand the usage of the micromotor.

[Brief description of drawings]

FIG. 1 is a sectional view of an embodiment.

FIG. 2 is a manufacturing process diagram of an example.

FIG. 3 is a manufacturing process diagram of an example.

FIG. 4 is a conceptual diagram of an optical scanner device to which a micromotor according to an embodiment is applied.

FIG. 5 is a conceptual diagram of another optical scanner device to which the micromotor according to the embodiment is applied.

[Explanation of symbols]

 2: semiconductor substrate 3: rotating disk 3a: equally spaced protrusions 4: fixed electrode 6: holographic diffraction grating

Claims (1)

[Claims]
1. An equidistant projection (3a) is provided on the outer peripheral portion of a rotating disk (3) made of a conductive material and formed on a semiconductor substrate (2).
And a fixed electrode (4) opposed to the protrusion is formed on the semiconductor substrate, wherein a reflective holographic diffraction grating (6) is formed on the surface of the rotating disk. And a micro motor.
JP30495191A 1991-11-20 1991-11-20 Micromotor Withdrawn JPH05142405A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP30495191A JPH05142405A (en) 1991-11-20 1991-11-20 Micromotor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP30495191A JPH05142405A (en) 1991-11-20 1991-11-20 Micromotor

Publications (1)

Publication Number Publication Date
JPH05142405A true JPH05142405A (en) 1993-06-11

Family

ID=17939280

Family Applications (1)

Application Number Title Priority Date Filing Date
JP30495191A Withdrawn JPH05142405A (en) 1991-11-20 1991-11-20 Micromotor

Country Status (1)

Country Link
JP (1) JPH05142405A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1995034943A1 (en) * 1994-06-10 1995-12-21 Case Western Reserve University Micromotors with utilitarian features and methods of their fabrication
US5705318A (en) * 1994-06-06 1998-01-06 Case Western Reserve University Micromotors and methods of fabrication
US5788468A (en) * 1994-11-03 1998-08-04 Memstek Products, Llc Microfabricated fluidic devices
US5822839A (en) * 1997-06-03 1998-10-20 Eastman Kodak Company Method for making a micromotor in a ceramic substrate
US6029337A (en) * 1994-06-06 2000-02-29 Case Western Reserve University Methods of fabricating micromotors with utilitarian features

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5705318A (en) * 1994-06-06 1998-01-06 Case Western Reserve University Micromotors and methods of fabrication
US6029337A (en) * 1994-06-06 2000-02-29 Case Western Reserve University Methods of fabricating micromotors with utilitarian features
WO1995034943A1 (en) * 1994-06-10 1995-12-21 Case Western Reserve University Micromotors with utilitarian features and methods of their fabrication
US5788468A (en) * 1994-11-03 1998-08-04 Memstek Products, Llc Microfabricated fluidic devices
US5822839A (en) * 1997-06-03 1998-10-20 Eastman Kodak Company Method for making a micromotor in a ceramic substrate

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Legal Events

Date Code Title Description
A300 Withdrawal of application because of no request for examination

Free format text: JAPANESE INTERMEDIATE CODE: A300

Effective date: 19990204