JPH0512099B2 - - Google Patents

Info

Publication number
JPH0512099B2
JPH0512099B2 JP24624985A JP24624985A JPH0512099B2 JP H0512099 B2 JPH0512099 B2 JP H0512099B2 JP 24624985 A JP24624985 A JP 24624985A JP 24624985 A JP24624985 A JP 24624985A JP H0512099 B2 JPH0512099 B2 JP H0512099B2
Authority
JP
Japan
Prior art keywords
grinding
grinding wheel
workpiece
chuck
rotation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP24624985A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62107951A (ja
Inventor
Toshuki Mori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Disco Corp
Original Assignee
Disco Abrasive Systems Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Disco Abrasive Systems Ltd filed Critical Disco Abrasive Systems Ltd
Priority to JP24624985A priority Critical patent/JPS62107951A/ja
Publication of JPS62107951A publication Critical patent/JPS62107951A/ja
Publication of JPH0512099B2 publication Critical patent/JPH0512099B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Grinding Of Cylindrical And Plane Surfaces (AREA)
JP24624985A 1985-11-05 1985-11-05 表面研削装置 Granted JPS62107951A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24624985A JPS62107951A (ja) 1985-11-05 1985-11-05 表面研削装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24624985A JPS62107951A (ja) 1985-11-05 1985-11-05 表面研削装置

Publications (2)

Publication Number Publication Date
JPS62107951A JPS62107951A (ja) 1987-05-19
JPH0512099B2 true JPH0512099B2 (cs) 1993-02-17

Family

ID=17145717

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24624985A Granted JPS62107951A (ja) 1985-11-05 1985-11-05 表面研削装置

Country Status (1)

Country Link
JP (1) JPS62107951A (cs)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0732252A (ja) * 1993-07-22 1995-02-03 Hitachi Ltd ワーク自転型研削加工方法、ワーク自転型研削盤及びシリコンウェハ並びにセラミック基板
JP4455750B2 (ja) * 2000-12-27 2010-04-21 株式会社ディスコ 研削装置
JP5254539B2 (ja) * 2006-08-09 2013-08-07 株式会社ディスコ ウエーハ研削装置
JP6846176B2 (ja) * 2016-11-24 2021-03-24 株式会社ディスコ 研削装置

Also Published As

Publication number Publication date
JPS62107951A (ja) 1987-05-19

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