JPH05109044A - Vertical magnetic recording medium - Google Patents

Vertical magnetic recording medium

Info

Publication number
JPH05109044A
JPH05109044A JP29508691A JP29508691A JPH05109044A JP H05109044 A JPH05109044 A JP H05109044A JP 29508691 A JP29508691 A JP 29508691A JP 29508691 A JP29508691 A JP 29508691A JP H05109044 A JPH05109044 A JP H05109044A
Authority
JP
Japan
Prior art keywords
layer
recording medium
magnetic
soft magnetic
magnetic recording
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP29508691A
Other languages
Japanese (ja)
Inventor
Shuichi Hirai
修一 平井
Seiji Fujima
誠司 藤間
Hiroaki Akiyama
浩章 秋山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denka Co Ltd
Original Assignee
Denki Kagaku Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denki Kagaku Kogyo KK filed Critical Denki Kagaku Kogyo KK
Priority to JP29508691A priority Critical patent/JPH05109044A/en
Publication of JPH05109044A publication Critical patent/JPH05109044A/en
Withdrawn legal-status Critical Current

Links

Abstract

PURPOSE:To provide a vertical magnetic recording medium wherein its recording medium noise is low and its recording and reproducing characteristic is excellent. CONSTITUTION:A vertical magnetic recording medium is formed in such a way that a magnetically soft layer 2, a magnetic layer 4, a protective layer 5 and the like are formed sequentially on a substrate 1. The vertical magnetic recording medium is constituted of a laminated body which is composed of a plurality of magnetically soft material layers via a nonmagnetic material intermediate layer 3. Permalloy or the like is used for the magnetically soft material layers. Carbon is used normally as a material for the nonmagnetic material layer. When the magnetically soft layers are constituted in this manner, the size of crystal lite for the magnetically soft material layers which affect the characteristic of the medium can be set at 300Angstrom or lower. As a result, it is possible to obtain the vertical magnetic recording medium whose medium noise can be lowered and whose recording and replay characteristic is excellent.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、軟磁性層、磁性層およ
び保護層からなる垂直磁気記録媒体に関し、特に軟磁性
層が複数層の軟磁性材料層と、非磁性材料中間層の積層
体からなる媒体ノイズの小さい垂直磁気記録媒体に関す
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a perpendicular magnetic recording medium comprising a soft magnetic layer, a magnetic layer and a protective layer, and particularly to a laminated body of a soft magnetic material layer having a plurality of soft magnetic layers and a non-magnetic material intermediate layer. The present invention relates to a perpendicular magnetic recording medium having low medium noise.

【0002】[0002]

【従来の技術】近年、パーソナルコンピューター等の普
及に伴い、ハードディスクドライブに使用されている磁
気記録媒体の需要が急増しており、磁気記録媒体の高密
度化への要求が高くなっている。垂直磁気記録方式は磁
性層が磁化する方向を磁性層の膜面に垂直な方向に向け
る磁気記録方式であり、高密度記録時に磁性層内部の反
磁界が減少するため高密度化に適している。垂直磁気記
録方式により記録再生される垂直磁気記録媒体は、非磁
性基板上にNiFe系合金などの軟磁性層を下地膜とし
て形成し、その上に垂直方向の磁気異方性をもつCoC
r系合金などの磁性層、カーボンなどの保護層を順次形
成した構造となっている。通常これらの下地層、磁性
層、保護層はスパッタリングという方法で形成され、各
層は他の材料の中間層で分離されることなく各々1層で
形成されていた。しかし、通常の垂直磁気記録媒体では
媒体ノイズが高く、その媒体ノイズを低減するために磁
性層を磁性膜と非磁性層とを交互に積層することにより
形成した薄膜磁気記録媒体(特開昭63ー31331
7)が提案されている。
2. Description of the Related Art In recent years, along with the widespread use of personal computers and the like, the demand for magnetic recording media used in hard disk drives has increased rapidly, and the demand for higher density magnetic recording media has increased. The perpendicular magnetic recording method is a magnetic recording method in which the direction in which the magnetic layer is magnetized is oriented in the direction perpendicular to the film surface of the magnetic layer, and the demagnetizing field inside the magnetic layer decreases during high-density recording, which is suitable for high density recording. .. A perpendicular magnetic recording medium for recording / reproducing by a perpendicular magnetic recording system has a soft magnetic layer such as a NiFe alloy formed as an underlayer on a non-magnetic substrate, and a CoC having perpendicular magnetic anisotropy formed thereon.
It has a structure in which a magnetic layer such as an r-based alloy and a protective layer such as carbon are sequentially formed. Usually, these underlayer, magnetic layer, and protective layer were formed by a method called sputtering, and each layer was formed as a single layer without being separated by an intermediate layer of another material. However, a normal perpendicular magnetic recording medium has a high medium noise, and a thin film magnetic recording medium formed by alternately laminating a magnetic film and a non-magnetic layer in order to reduce the medium noise (Japanese Patent Laid-Open No. Sho 63-63). -31331
7) is proposed.

【0003】[0003]

【発明が解決しようとする課題】しかしながら、上述の
薄膜磁気記録媒体でも、媒体ノイズが高く記録再生特性
が悪いという問題点があった。本発明はかかる問題点に
鑑みてなされたものであって、媒体ノイズの原因につい
て鋭意検討した結果、軟磁性層の構成が媒体ノイズに大
きく影響していることを見いだし、本発明を完成するに
至った。
However, even the above-mentioned thin film magnetic recording medium has a problem that the medium noise is high and the recording / reproducing characteristics are poor. The present invention has been made in view of the above problems, and as a result of extensive studies on the cause of the medium noise, it was found that the configuration of the soft magnetic layer has a large influence on the medium noise, and the present invention is completed. I arrived.

【0004】[0004]

【課題を解決するための手段】すなわち、本発明は以下
を要旨とするものである。非磁性基板上に軟磁性層、磁
性層および保護層が形成されてなる垂直磁気記録媒体に
おいて、前記軟磁性層が非磁性材料中間層を介して複数
層の軟磁性材料層からなる積層体であることを特徴とす
る垂直磁気記録媒体である。
That is, the present invention is summarized as follows. In a perpendicular magnetic recording medium having a soft magnetic layer, a magnetic layer and a protective layer formed on a non-magnetic substrate, the soft magnetic layer is a laminated body composed of a plurality of soft magnetic material layers with a non-magnetic material intermediate layer interposed therebetween. A perpendicular magnetic recording medium characterized by the above.

【0005】[0005]

【作用】本発明の垂直磁気記録媒体においては、非磁性
基板上に形成されている軟磁性層が非磁性材料中間層を
介して複数層の軟磁性材料からなる積層体である。垂直
磁気記録媒体の媒体ノイズは媒体の構成や構成材料の材
質や構造の影響を受けるが、垂直磁気記録媒体の場合は
磁性層よりも非磁性基板上の軟磁性層の構成、材質及び
その構造の影響を大きく受ける。
In the perpendicular magnetic recording medium of the present invention, the soft magnetic layer formed on the non-magnetic substrate is a laminate of a plurality of soft magnetic materials with the non-magnetic material intermediate layer interposed therebetween. The medium noise of the perpendicular magnetic recording medium is affected by the medium structure and the material and structure of the constituent material, but in the case of the perpendicular magnetic recording medium, the structure, material and structure of the soft magnetic layer on the non-magnetic substrate rather than the magnetic layer. Greatly affected by.

【0006】すなわち、軟磁性層が非磁性材料中間層を
介して複数層の軟磁性材料層の積層体とすることによ
り、軟磁性層の結晶構造を微細構造にすることができ媒
体ノイズを小さくすることができる。軟磁性層を構成し
ている軟磁性材料層がNiFe系合金で、その軟磁性層
の結晶子の大きさを300Å以下の微細構造にするとノ
イズを小さくすることができ、記録再生特性の良好な垂
直磁気記録媒体を得ることができる。
That is, when the soft magnetic layer is a laminate of a plurality of soft magnetic material layers with the non-magnetic material intermediate layer interposed therebetween, the crystal structure of the soft magnetic layer can be made a fine structure and the medium noise can be reduced. can do. When the soft magnetic material layer constituting the soft magnetic layer is a NiFe-based alloy and the crystallite size of the soft magnetic layer is a fine structure of 300 Å or less, noise can be reduced and good recording and reproducing characteristics can be obtained. A perpendicular magnetic recording medium can be obtained.

【0007】[0007]

【実施例】以下、添付の図面を参照して本発明の実施例
について具体的に説明する。図1は本発明に係わる垂直
磁気記録媒体の概略の構成を示す断面図である。基板1
は例えば厚さが1.27 mm のアルミニウム基板であり、こ
の基板1の上に、非磁性材料中間層3(例えば炭素層5
0Å)を介した2層の軟磁性材料層2からなる軟磁性層
6が形成されている。軟磁性材料層は、例えば厚さが0.
5μm のNiFe合金である。そして、この軟磁性層6
の上に磁性層4が形成され、さらに保護層5が形成され
ている。例えば、磁性層は1000ÅのCoCrTa合
金層であり、保護層は250Åの炭素である。
Embodiments of the present invention will be specifically described below with reference to the accompanying drawings. FIG. 1 is a sectional view showing a schematic structure of a perpendicular magnetic recording medium according to the present invention. Board 1
Is, for example, an aluminum substrate having a thickness of 1.27 mm, on which a non-magnetic material intermediate layer 3 (for example, a carbon layer 5 is formed).
The soft magnetic layer 6 composed of the two soft magnetic material layers 2 is formed via 0Å). The soft magnetic material layer has, for example, a thickness of 0.
It is a NiFe alloy of 5 μm. Then, this soft magnetic layer 6
A magnetic layer 4 is formed on top of this, and a protective layer 5 is further formed. For example, the magnetic layer is a 1000Å CoCrTa alloy layer and the protective layer is 250Å carbon.

【0008】非磁性基板は通常、アルミニウム、アルミ
ニウム合金、ガラス、セラミックス、プラスチックなど
硬度が高く平滑性を容易に出すことができ耐食性の優れ
ているものが使用できる。アルミニウムまたはアルミニ
ウム合金の場合、それら非磁性基板上にNiP合金等の
めっき膜を形成した基板や、それら非磁性基板表面を陽
極酸化した基板等を使用する。ガラス基板の場合、結晶
化ガラスや強化ガラス等を使用する。非磁性基板は化学
的方法、機械的方法または物理的方法等により平滑な表
面に仕上げられている。
As the non-magnetic substrate, it is usually possible to use a material such as aluminum, aluminum alloy, glass, ceramics, plastic, which has a high hardness, can easily provide smoothness and is excellent in corrosion resistance. In the case of aluminum or aluminum alloy, a substrate in which a plating film of NiP alloy or the like is formed on the non-magnetic substrate, a substrate in which the surface of the non-magnetic substrate is anodized, or the like is used. In the case of a glass substrate, crystallized glass or tempered glass is used. The non-magnetic substrate is finished to have a smooth surface by a chemical method, a mechanical method or a physical method.

【0009】軟磁性材料層は、CuMoNiFe、Ni
FeNb等のNiFe系合金、CoZrNb等のCoZ
r系合金、FeAl系合金、MnZnフェライト等の高
透磁率を有する軟磁性合金を使用することができる。軟
磁性材料層の保磁力が2Oeより小さいと媒体ノイズが
大きくなり、逆に10Oe より大きいと記録再生出力が
小さくなり好ましくない。また、軟磁性材料層の合計の
層厚は、層厚が厚いと垂直磁気記録媒体に歪が生じやす
くなるため2um以下が適している。NiFe系合金の
場合、その組成は、重量%でNi60から90重量%が
最適である。
The soft magnetic material layer is made of CuMoNiFe, Ni.
NiFe alloys such as FeNb, CoZ such as CoZrNb
A soft magnetic alloy having a high magnetic permeability such as r-based alloy, FeAl-based alloy, and MnZn ferrite can be used. If the coercive force of the soft magnetic material layer is smaller than 2 Oe, medium noise increases, and if it is larger than 10 Oe, the recording / reproducing output decreases, which is not preferable. Further, the total layer thickness of the soft magnetic material layer is preferably 2 μm or less because a thick layer tends to cause distortion in the perpendicular magnetic recording medium. In the case of a NiFe-based alloy, the optimum composition is 60 to 90% by weight of Ni.

【0010】軟磁性材料層の材質がNiFe系合金であ
る時は、この合金の結晶子の大きさが300Åより大き
いと軟磁性層の構造が微細構造とならないためノイズが
大きく好ましくない。
When the material of the soft magnetic material layer is a NiFe type alloy, if the crystallite size of this alloy is larger than 300Å, the structure of the soft magnetic layer does not become a fine structure, which is not preferable because the noise is large.

【0011】積層体を構成している非磁性材料中間層は
炭素,Ti、Cr,Ge等の非磁性合金を使用すること
ができる。中間層の厚さは、50Å位が適当である。そ
して、軟磁性材料層の層数は非磁性材料中間層を介して
軟磁性材料層を1〜20層、積層した軟磁性層がよい。
また、非磁性基板とこの軟磁性層との密着力を向上させ
るためTi,Cr等の非磁性合金層を非磁性基板と軟磁
性層との間に形成してもよい。
The non-magnetic material intermediate layer forming the laminated body may be made of a non-magnetic alloy such as carbon, Ti, Cr and Ge. A suitable thickness of the intermediate layer is around 50Å. The number of soft magnetic material layers is preferably a soft magnetic layer in which 1 to 20 soft magnetic material layers are laminated with a nonmagnetic material intermediate layer interposed therebetween.
A nonmagnetic alloy layer of Ti, Cr or the like may be formed between the nonmagnetic substrate and the soft magnetic layer in order to improve the adhesion between the nonmagnetic substrate and the soft magnetic layer.

【0012】磁性層の材質は、CoCrTaの他にCo
Cr,CoCrPt等の垂直磁気異方性をもつCo系合
金やフェライト系合金等が使用できる。保護層は通常、
炭素やSi、Zr、Hf,Cr等の酸化物、窒化物、炭
化物等で形成されている。また、保護膜の潤滑性をよく
するため保護膜表面に潤滑層を形成してもよい。
The material of the magnetic layer is CoCrTa or Co.
A Co-based alloy or a ferrite-based alloy having perpendicular magnetic anisotropy such as Cr or CoCrPt can be used. The protective layer is usually
It is formed of carbon, oxides, nitrides, carbides of Si, Zr, Hf, Cr and the like. Further, in order to improve the lubricity of the protective film, a lubricating layer may be formed on the surface of the protective film.

【0013】〔実施例1〕外径95mm、内径25mm、厚
み1.27mmの平滑なガラス基板上に、軟磁性層を非磁性
材料中間層として炭素層(50Å)を介して1層0.5μ
m のNi80Fe20(以下、軟磁性材料層の組成式は重量
%で示す)の軟磁性材料層を2層積層して、厚さ1.00
5μm の軟磁性層を作成した。その上にCoCrTaの
垂直磁気記録層、炭素の保護層を順次形成し、垂直磁気
記録媒体を作成した(実験No1)。同様に上述の構成
で1層0.25μm のNi80Fe20の軟磁性材料層を4層
積層して厚さ2.015μm の積層体のものを作成した
(実験No2)。また、軟磁性材料層をCu3.5 Mo4.
5 Ni77Fe15として1層0.5μm の軟磁性材料層が2
層のもの(実験No3)と0.05μm の軟磁性材料層が
20層のもの(実験No4)を作成した。これらの媒体
の軟磁性材料層の結晶子の大きさ、保磁力の測定結果及
び媒体再生時の媒体ノイズを測定した結果を表1に示
す。結晶子の測定方法、保磁力の測定方法、再生時の媒
体ノイズの測定方法は次に示す方法によった。
Example 1 On a smooth glass substrate having an outer diameter of 95 mm, an inner diameter of 25 mm, and a thickness of 1.27 mm, a soft magnetic layer was used as a nonmagnetic material intermediate layer with a carbon layer (50 Å) interposed between them to form a layer of 0.5 μm.
Two soft magnetic material layers of m 80 of Ni 80 Fe 20 (hereinafter, the composition formula of the soft magnetic material layer is shown by weight%) are laminated to have a thickness of 1.00
A 5 μm soft magnetic layer was formed. A perpendicular magnetic recording layer of CoCrTa and a protective layer of carbon were sequentially formed thereon to prepare a perpendicular magnetic recording medium (Experiment No. 1). Similarly, four layers of Ni 80 Fe 20 soft magnetic material layers of 0.25 μm each having the above-described structure were laminated to prepare a laminated body having a thickness of 2.015 μm (Experiment No. 2). Further, the soft magnetic material layer Cu 3. 5 Mo 4.
5 One layer of Ni 77 Fe 15 with 0.5 μm soft magnetic material layer
A layer (Experiment No. 3) and a soft magnetic material layer of 0.05 .mu.m having 20 layers were prepared (Experiment No. 4). Table 1 shows the measurement results of the crystallite size of the soft magnetic material layer of these media, the coercive force, and the media noise during reproduction of the media. The crystallite measuring method, the coercive force measuring method, and the medium noise during reproduction were measured as follows.

【0014】(軟磁性材料層の結晶子の測定方法)軟磁
性層を非磁性基板上に形成し、その軟磁性材料層のX線
回折強度をX線回折装置を用いて測定した。その回折強
度からNi(111)面の回折線のブラッグ角θ
(度)、積分幅β(ラジアン)を求め、これらの値を
Scherrerの式 D=λ/(β×cosθ)に代
入し、結晶子の大きさDを求める。ただし、λは測定X
線の波長であり、本実験では1.54とした。
(Method of Measuring Crystallite of Soft Magnetic Material Layer) A soft magnetic layer was formed on a non-magnetic substrate, and the X-ray diffraction intensity of the soft magnetic material layer was measured by using an X-ray diffractometer. From the diffraction intensity, the Bragg angle θ of the diffraction line on the Ni (111) plane
(Degree), the integral width β (radian), and these values
Substituting in Scherrer's equation D = λ / (β × cos θ), the crystallite size D is obtained. However, λ is the measurement X
This is the wavelength of the line, and was set to 1.54 in this experiment.

【0015】(保磁力の測定方法)軟磁性層を非磁性基
板上に形成し、その軟磁性層が形成された非磁性基板を
7mm角の正方形に打ち抜き保磁力を測定した。装置は、
理研電子株式会社製の振動試料型磁化特性自動記録装置
MODEL BHV−3.5を使用した。
(Method of measuring coercive force) A soft magnetic layer was formed on a non-magnetic substrate, and the non-magnetic substrate on which the soft magnetic layer was formed was punched into a square of 7 mm square and the coercive force was measured. The device is
A vibration sample type automatic recording device MODEL BHV-3.5 manufactured by Riken Denshi Co., Ltd. was used.

【0016】(再生時の媒体ノイズの測定方法)非磁性
基板上に軟磁性層、磁性層、保護層を順次形成した垂直
磁気記録媒体に線記録密度45kfciの信号を記録し
た時の再生スペクトルとシステムノイズスペクトルとの
差を媒体ノイズとして求めた。
(Method of measuring medium noise during reproduction) A reproduction spectrum when a signal having a linear recording density of 45 kfci is recorded on a perpendicular magnetic recording medium in which a soft magnetic layer, a magnetic layer and a protective layer are sequentially formed on a non-magnetic substrate. The difference from the system noise spectrum was obtained as the medium noise.

【0017】〔実施例2〕軟磁性材料層の間に形成する
非磁性材料中間層の材質をTiとした以外は実施例1の
実験No2またはNo4と同様の手順で垂直磁気記録媒
体を作成した(実験No5,No6)。得られた垂直磁
気記録媒体について実施例1の測定方法によって軟磁性
材料層の結晶子の大きさ、保磁力の測定結果及び再生時
の媒体ノイズを測定し、その結果を表1に示す。
Example 2 A perpendicular magnetic recording medium was prepared by the same procedure as Experiment No. 2 or No. 4 of Example 1 except that the material of the non-magnetic material intermediate layer formed between the soft magnetic material layers was Ti. (Experiment No5, No6). With respect to the obtained perpendicular magnetic recording medium, the measurement results of the crystallite size of the soft magnetic material layer, the coercive force and the medium noise at the time of reproduction were measured by the measuring method of Example 1. The results are shown in Table 1.

【0018】〔比較例〕外径95mm、内径25mm、 厚
み1.27mmの平滑なガラス基板上にNi80Fe20の層厚
1.0μm の軟磁性材料層を軟磁性層として作成した。そ
の上にCoCrTaの垂直磁気記録層、炭素の保護層を
順次形成し、垂直磁気記録媒体を作成した(実験No
1)。同様に上述の構成で、軟磁性材料層をCu3.5
4.5 Ni77Fe15の組成として保磁力を2Oe のもの
(実験No2)と保磁力を10Oeのもの(実験No
3)とを作成した。得られた垂直磁気記録媒体につい
て、実施例の方法によって軟磁性材料層の結晶子の大き
さ、保磁力及び再生時の媒体ノイズを測定した結果を表
1に示す。
[Comparative Example] Ni 80 Fe 20 layer thickness on a smooth glass substrate having an outer diameter of 95 mm, an inner diameter of 25 mm and a thickness of 1.27 mm.
A soft magnetic material layer of 1.0 μm was formed as a soft magnetic layer. A perpendicular magnetic recording layer of CoCrTa and a protective layer of carbon were sequentially formed thereon to prepare a perpendicular magnetic recording medium (Experiment No.
1). Similarly, with the above-mentioned structure, the soft magnetic material layer is made of Cu 3.5 M.
o 4. 5 Ni 77 as the coercive force of 2Oe the composition of Fe 15 (Experiment No2) to that of 10Oe coercive force (Experiment No
3) and were created. Table 1 shows the results of measuring the crystallite size of the soft magnetic material layer, the coercive force, and the medium noise at the time of reproduction of the obtained perpendicular magnetic recording medium by the method of the example.

【0019】[0019]

【発明の効果】本発明によれば、非磁性基板上に形成す
る軟磁性層を非磁性材料中間層を介して複数層の軟磁性
材料層からなる積層体とすることにより媒体ノイズが低
く、記録再生特性がすぐれた垂直磁気記録媒体を得るこ
とができる。
According to the present invention, since the soft magnetic layer formed on the non-magnetic substrate is a laminated body composed of a plurality of soft magnetic material layers with the non-magnetic material intermediate layer interposed therebetween, the medium noise is low, A perpendicular magnetic recording medium having excellent recording / reproducing characteristics can be obtained.

【図面の簡単な説明】[Brief description of drawings]

【図1】 本発明の一例を示す垂直磁気記録媒体の断面
図を示す。
FIG. 1 is a sectional view of a perpendicular magnetic recording medium showing an example of the present invention.

【図2】 本発明の一例を示す垂直磁気記録媒体の断面
図を示す。
FIG. 2 is a sectional view of a perpendicular magnetic recording medium showing an example of the present invention.

【符号の説明】[Explanation of symbols]

1:非磁性基板 2:軟磁性材料層 3:非磁性材料中間層 4:磁性層 5:保護層 6:軟磁性層 1: Non-magnetic substrate 2: Soft magnetic material layer 3: Non-magnetic material intermediate layer 4: Magnetic layer 5: Protective layer 6: Soft magnetic layer

【表1】 [Table 1]

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 非磁性基板上に軟磁性層、磁性層および
保護層が形成されてなる垂直磁気記録媒体において、前
記軟磁性層が非磁性材料中間層を介して複数層の軟磁性
材料層からなる積層体であることを特徴とする垂直磁気
記録媒体。
1. A perpendicular magnetic recording medium comprising a soft magnetic layer, a magnetic layer and a protective layer formed on a non-magnetic substrate, wherein the soft magnetic layer comprises a plurality of soft magnetic material layers with a non-magnetic material intermediate layer interposed therebetween. A perpendicular magnetic recording medium, which is a laminated body made of.
【請求項2】 前記軟磁性材料層がNiFe系合金であ
って、前記軟磁性層の結晶子の大きさが300Å以下で
あることを特徴とする請求項1記載の垂直磁気記録媒
体。
2. The perpendicular magnetic recording medium according to claim 1, wherein the soft magnetic material layer is a NiFe alloy and the crystallite size of the soft magnetic layer is 300 Å or less.
【請求項3】 前記非磁性材料中間層が炭素であること
を特徴とする請求項2記載の垂直磁気記録媒体。
3. The perpendicular magnetic recording medium according to claim 2, wherein the non-magnetic material intermediate layer is carbon.
【請求項4】 前記非磁性基板がガラスであることを特
徴とする請求項3記載の垂直磁気記録媒体。
4. The perpendicular magnetic recording medium according to claim 3, wherein the non-magnetic substrate is glass.
JP29508691A 1991-10-15 1991-10-15 Vertical magnetic recording medium Withdrawn JPH05109044A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP29508691A JPH05109044A (en) 1991-10-15 1991-10-15 Vertical magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29508691A JPH05109044A (en) 1991-10-15 1991-10-15 Vertical magnetic recording medium

Publications (1)

Publication Number Publication Date
JPH05109044A true JPH05109044A (en) 1993-04-30

Family

ID=17816129

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29508691A Withdrawn JPH05109044A (en) 1991-10-15 1991-10-15 Vertical magnetic recording medium

Country Status (1)

Country Link
JP (1) JPH05109044A (en)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0704839A1 (en) * 1994-09-29 1996-04-03 Carnegie-Mellon University Magnetic recording medium with B2 structured underlayer and a cobalt-based magnetic layer
US6432563B1 (en) 2000-04-03 2002-08-13 Carnegie Mellon University Zinc enhanced hard disk media
JP2002358618A (en) * 2000-12-28 2002-12-13 Showa Denko Kk Magnetic recording medium, manufacturing method therefor, and magnetic recording and reproducing device
US6942936B2 (en) 2002-08-14 2005-09-13 Kabushiki Kaisha Toshiba Perpendicular magnetic recording medium and magnetic recording/reproduction apparatus
US7166375B2 (en) 2000-12-28 2007-01-23 Showa Denko K.K. Magnetic recording medium utilizing a multi-layered soft magnetic underlayer, method of producing the same and magnetic recording and reproducing device
JP2007257798A (en) * 2006-03-24 2007-10-04 Fujitsu Ltd Magnetic recording medium and magnetic recorder
EP1850334A1 (en) * 2006-04-27 2007-10-31 Heraeus, Inc. Soft magnetic underlayer in magnetic media and soft magnetic alloy based sputter target
US7736767B2 (en) 2007-03-02 2010-06-15 Hitachi Global Storage Technologies Netherlands, B.V. Perpendicular magnetic recording medium having an interlayer formed from a NiWCr alloy
JP2010287290A (en) * 2009-06-12 2010-12-24 Hitachi Global Storage Technologies Netherlands Bv Perpendicular magnetic recording medium
US8795478B2 (en) * 2004-10-21 2014-08-05 HGST Netherlands B.V. Method for manufacturing perpendicular magnetic recording medium

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0704839A1 (en) * 1994-09-29 1996-04-03 Carnegie-Mellon University Magnetic recording medium with B2 structured underlayer and a cobalt-based magnetic layer
US6432563B1 (en) 2000-04-03 2002-08-13 Carnegie Mellon University Zinc enhanced hard disk media
JP2002358618A (en) * 2000-12-28 2002-12-13 Showa Denko Kk Magnetic recording medium, manufacturing method therefor, and magnetic recording and reproducing device
US7166375B2 (en) 2000-12-28 2007-01-23 Showa Denko K.K. Magnetic recording medium utilizing a multi-layered soft magnetic underlayer, method of producing the same and magnetic recording and reproducing device
US6942936B2 (en) 2002-08-14 2005-09-13 Kabushiki Kaisha Toshiba Perpendicular magnetic recording medium and magnetic recording/reproduction apparatus
US8795478B2 (en) * 2004-10-21 2014-08-05 HGST Netherlands B.V. Method for manufacturing perpendicular magnetic recording medium
JP2007257798A (en) * 2006-03-24 2007-10-04 Fujitsu Ltd Magnetic recording medium and magnetic recorder
EP1850334A1 (en) * 2006-04-27 2007-10-31 Heraeus, Inc. Soft magnetic underlayer in magnetic media and soft magnetic alloy based sputter target
US7736767B2 (en) 2007-03-02 2010-06-15 Hitachi Global Storage Technologies Netherlands, B.V. Perpendicular magnetic recording medium having an interlayer formed from a NiWCr alloy
JP2010287290A (en) * 2009-06-12 2010-12-24 Hitachi Global Storage Technologies Netherlands Bv Perpendicular magnetic recording medium

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