JPH0486612U - - Google Patents

Info

Publication number
JPH0486612U
JPH0486612U JP13082790U JP13082790U JPH0486612U JP H0486612 U JPH0486612 U JP H0486612U JP 13082790 U JP13082790 U JP 13082790U JP 13082790 U JP13082790 U JP 13082790U JP H0486612 U JPH0486612 U JP H0486612U
Authority
JP
Japan
Prior art keywords
substrate
substrate transfer
engaging
transport device
transfer tables
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13082790U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13082790U priority Critical patent/JPH0486612U/ja
Publication of JPH0486612U publication Critical patent/JPH0486612U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chain Conveyers (AREA)
JP13082790U 1990-11-30 1990-11-30 Pending JPH0486612U (US07655746-20100202-C00011.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13082790U JPH0486612U (US07655746-20100202-C00011.png) 1990-11-30 1990-11-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13082790U JPH0486612U (US07655746-20100202-C00011.png) 1990-11-30 1990-11-30

Publications (1)

Publication Number Publication Date
JPH0486612U true JPH0486612U (US07655746-20100202-C00011.png) 1992-07-28

Family

ID=31878141

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13082790U Pending JPH0486612U (US07655746-20100202-C00011.png) 1990-11-30 1990-11-30

Country Status (1)

Country Link
JP (1) JPH0486612U (US07655746-20100202-C00011.png)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01119100A (ja) * 1987-10-31 1989-05-11 Toshiba Corp 基板搬送装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01119100A (ja) * 1987-10-31 1989-05-11 Toshiba Corp 基板搬送装置

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