JPH0485730U - - Google Patents

Info

Publication number
JPH0485730U
JPH0485730U JP12875490U JP12875490U JPH0485730U JP H0485730 U JPH0485730 U JP H0485730U JP 12875490 U JP12875490 U JP 12875490U JP 12875490 U JP12875490 U JP 12875490U JP H0485730 U JPH0485730 U JP H0485730U
Authority
JP
Japan
Prior art keywords
sensor
outputs
wafer
power supplies
detection device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12875490U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12875490U priority Critical patent/JPH0485730U/ja
Publication of JPH0485730U publication Critical patent/JPH0485730U/ja
Pending legal-status Critical Current

Links

JP12875490U 1990-11-29 1990-11-29 Pending JPH0485730U (US07321065-20080122-C00160.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12875490U JPH0485730U (US07321065-20080122-C00160.png) 1990-11-29 1990-11-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12875490U JPH0485730U (US07321065-20080122-C00160.png) 1990-11-29 1990-11-29

Publications (1)

Publication Number Publication Date
JPH0485730U true JPH0485730U (US07321065-20080122-C00160.png) 1992-07-24

Family

ID=31876198

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12875490U Pending JPH0485730U (US07321065-20080122-C00160.png) 1990-11-29 1990-11-29

Country Status (1)

Country Link
JP (1) JPH0485730U (US07321065-20080122-C00160.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014529888A (ja) * 2011-08-16 2014-11-13 アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated チャンバ内の基板を感知するための方法および装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014529888A (ja) * 2011-08-16 2014-11-13 アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated チャンバ内の基板を感知するための方法および装置
JP2017038071A (ja) * 2011-08-16 2017-02-16 アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated チャンバ内の基板を感知するための方法および装置

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