JPH0482840U - - Google Patents

Info

Publication number

JPH0482840U

JPH0482840U JP12559290U JP12559290U JPH0482840U JP H0482840 U JPH0482840 U JP H0482840U JP 12559290 U JP12559290 U JP 12559290U JP 12559290 U JP12559290 U JP 12559290U JP H0482840 U JPH0482840 U JP H0482840U

Authority

JP

Japan

Prior art keywords

wafer

vertical

support jig

insertion position

placement surface

Prior art date

1990-11-28

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 235000012431 wafers Nutrition 0.000 claims 9
• 230000037431 insertion Effects 0.000 claims 2
• 238000003780 insertion Methods 0.000 claims 2
• 239000004065 semiconductor Substances 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 2
• 238000009792 diffusion process Methods 0.000 description 1
• 230000003647 oxidation Effects 0.000 description 1
• 238000007254 oxidation reaction Methods 0.000 description 1

Cited By (1)