JPH0481963U - - Google Patents

Info

Publication number
JPH0481963U
JPH0481963U JP12340790U JP12340790U JPH0481963U JP H0481963 U JPH0481963 U JP H0481963U JP 12340790 U JP12340790 U JP 12340790U JP 12340790 U JP12340790 U JP 12340790U JP H0481963 U JPH0481963 U JP H0481963U
Authority
JP
Japan
Prior art keywords
valve
gate
back plate
gate valve
stopper
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12340790U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0734929Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12340790U priority Critical patent/JPH0734929Y2/ja
Publication of JPH0481963U publication Critical patent/JPH0481963U/ja
Application granted granted Critical
Publication of JPH0734929Y2 publication Critical patent/JPH0734929Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP12340790U 1990-11-22 1990-11-22 真空装置用のゲート装置 Expired - Lifetime JPH0734929Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12340790U JPH0734929Y2 (ja) 1990-11-22 1990-11-22 真空装置用のゲート装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12340790U JPH0734929Y2 (ja) 1990-11-22 1990-11-22 真空装置用のゲート装置

Publications (2)

Publication Number Publication Date
JPH0481963U true JPH0481963U (US07179912-20070220-C00144.png) 1992-07-16
JPH0734929Y2 JPH0734929Y2 (ja) 1995-08-09

Family

ID=31871117

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12340790U Expired - Lifetime JPH0734929Y2 (ja) 1990-11-22 1990-11-22 真空装置用のゲート装置

Country Status (1)

Country Link
JP (1) JPH0734929Y2 (US07179912-20070220-C00144.png)

Also Published As

Publication number Publication date
JPH0734929Y2 (ja) 1995-08-09

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Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

EXPY Cancellation because of completion of term