JPH0480070U - - Google Patents

Info

Publication number

JPH0480070U

JPH0480070U JP12499690U JP12499690U JPH0480070U JP H0480070 U JPH0480070 U JP H0480070U JP 12499690 U JP12499690 U JP 12499690U JP 12499690 U JP12499690 U JP 12499690U JP H0480070 U JPH0480070 U JP H0480070U

Authority

JP

Japan

Prior art keywords

signal detection

conductivity type

junctions

detection electrodes

view

Prior art date

1990-11-26

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
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• 238000001514 detection method Methods 0.000 claims description 3
• 238000009792 diffusion process Methods 0.000 claims description 2
• 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 2
• 229920005591 polysilicon Polymers 0.000 claims description 2
• 239000000758 substrate Substances 0.000 claims description 2
• 239000004065 semiconductor Substances 0.000 claims 1
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
• 229910052710 silicon Inorganic materials 0.000 description 1
• 239000010703 silicon Substances 0.000 description 1