JPH0480041U - - Google Patents

Info

Publication number
JPH0480041U
JPH0480041U JP12469590U JP12469590U JPH0480041U JP H0480041 U JPH0480041 U JP H0480041U JP 12469590 U JP12469590 U JP 12469590U JP 12469590 U JP12469590 U JP 12469590U JP H0480041 U JPH0480041 U JP H0480041U
Authority
JP
Japan
Prior art keywords
exhaust duct
insulating cover
heat insulating
heat
hot plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12469590U
Other languages
English (en)
Japanese (ja)
Other versions
JP2517721Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12469590U priority Critical patent/JP2517721Y2/ja
Publication of JPH0480041U publication Critical patent/JPH0480041U/ja
Application granted granted Critical
Publication of JP2517721Y2 publication Critical patent/JP2517721Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)
JP12469590U 1990-11-26 1990-11-26 基板加熱装置 Expired - Fee Related JP2517721Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12469590U JP2517721Y2 (ja) 1990-11-26 1990-11-26 基板加熱装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12469590U JP2517721Y2 (ja) 1990-11-26 1990-11-26 基板加熱装置

Publications (2)

Publication Number Publication Date
JPH0480041U true JPH0480041U (US20030220297A1-20031127-C00009.png) 1992-07-13
JP2517721Y2 JP2517721Y2 (ja) 1996-11-20

Family

ID=31872331

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12469590U Expired - Fee Related JP2517721Y2 (ja) 1990-11-26 1990-11-26 基板加熱装置

Country Status (1)

Country Link
JP (1) JP2517721Y2 (US20030220297A1-20031127-C00009.png)

Also Published As

Publication number Publication date
JP2517721Y2 (ja) 1996-11-20

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees