JPH0479223U - - Google Patents

Info

Publication number
JPH0479223U
JPH0479223U JP12260090U JP12260090U JPH0479223U JP H0479223 U JPH0479223 U JP H0479223U JP 12260090 U JP12260090 U JP 12260090U JP 12260090 U JP12260090 U JP 12260090U JP H0479223 U JPH0479223 U JP H0479223U
Authority
JP
Japan
Prior art keywords
fluid
sensor part
control valve
flow rate
mass flowmeter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12260090U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12260090U priority Critical patent/JPH0479223U/ja
Publication of JPH0479223U publication Critical patent/JPH0479223U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Volume Flow (AREA)
JP12260090U 1990-11-22 1990-11-22 Pending JPH0479223U (US20110009641A1-20110113-C00185.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12260090U JPH0479223U (US20110009641A1-20110113-C00185.png) 1990-11-22 1990-11-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12260090U JPH0479223U (US20110009641A1-20110113-C00185.png) 1990-11-22 1990-11-22

Publications (1)

Publication Number Publication Date
JPH0479223U true JPH0479223U (US20110009641A1-20110113-C00185.png) 1992-07-10

Family

ID=31870365

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12260090U Pending JPH0479223U (US20110009641A1-20110113-C00185.png) 1990-11-22 1990-11-22

Country Status (1)

Country Link
JP (1) JPH0479223U (US20110009641A1-20110113-C00185.png)

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