JPH0478550U - - Google Patents

Info

Publication number

JPH0478550U

JPH0478550U JP12154790U JP12154790U JPH0478550U JP H0478550 U JPH0478550 U JP H0478550U JP 12154790 U JP12154790 U JP 12154790U JP 12154790 U JP12154790 U JP 12154790U JP H0478550 U JPH0478550 U JP H0478550U

Authority

JP

Japan

Prior art keywords

ozone

detection element

heater

shows

chamber

Prior art date

1990-11-19

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 claims description 9
• 238000001514 detection method Methods 0.000 description 5
• 238000000354 decomposition reaction Methods 0.000 description 2
• 239000004065 semiconductor Substances 0.000 description 2
• NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
• 239000000758 substrate Substances 0.000 description 1
• 239000010409 thin film Substances 0.000 description 1

Cited By (1)