JPH0478003B2 - - Google Patents

Info

Publication number
JPH0478003B2
JPH0478003B2 JP58024825A JP2482583A JPH0478003B2 JP H0478003 B2 JPH0478003 B2 JP H0478003B2 JP 58024825 A JP58024825 A JP 58024825A JP 2482583 A JP2482583 A JP 2482583A JP H0478003 B2 JPH0478003 B2 JP H0478003B2
Authority
JP
Japan
Prior art keywords
heater cover
reactor
ring
heater
susceptor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58024825A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59151418A (ja
Inventor
Kazuo Taniguchi
Yukio Murakawa
Akira Yoshida
Shozo Hosoda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Hitachi High Tech Corp
Original Assignee
Hitachi Ltd
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd, Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Ltd
Priority to JP2482583A priority Critical patent/JPS59151418A/ja
Publication of JPS59151418A publication Critical patent/JPS59151418A/ja
Publication of JPH0478003B2 publication Critical patent/JPH0478003B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
JP2482583A 1983-02-18 1983-02-18 反応炉 Granted JPS59151418A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2482583A JPS59151418A (ja) 1983-02-18 1983-02-18 反応炉

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2482583A JPS59151418A (ja) 1983-02-18 1983-02-18 反応炉

Publications (2)

Publication Number Publication Date
JPS59151418A JPS59151418A (ja) 1984-08-29
JPH0478003B2 true JPH0478003B2 (https=) 1992-12-10

Family

ID=12148953

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2482583A Granted JPS59151418A (ja) 1983-02-18 1983-02-18 反応炉

Country Status (1)

Country Link
JP (1) JPS59151418A (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63157425A (ja) * 1986-12-22 1988-06-30 Hitachi Electronics Eng Co Ltd 気相反応装置
JPS63176474A (ja) * 1987-01-14 1988-07-20 Hitachi Electronics Eng Co Ltd 気相反応装置
JP5997952B2 (ja) * 2012-07-06 2016-09-28 大陽日酸株式会社 気相成長装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5748851A (en) * 1980-09-08 1982-03-20 Goda Tadayoshi Display device for calling number of telephone set

Also Published As

Publication number Publication date
JPS59151418A (ja) 1984-08-29

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