JPH0477524U - - Google Patents

Info

Publication number
JPH0477524U
JPH0477524U JP11990290U JP11990290U JPH0477524U JP H0477524 U JPH0477524 U JP H0477524U JP 11990290 U JP11990290 U JP 11990290U JP 11990290 U JP11990290 U JP 11990290U JP H0477524 U JPH0477524 U JP H0477524U
Authority
JP
Japan
Prior art keywords
conveying device
atmosphere
container
utility
registration request
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11990290U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11990290U priority Critical patent/JPH0477524U/ja
Publication of JPH0477524U publication Critical patent/JPH0477524U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Non-Mechanical Conveyors (AREA)

Description

【図面の簡単な説明】
第１図、本考案の搬送装置の第１の実施例の概
略図。第２図は、本考案の搬送装置の第２の実施
例の概略図。第３図は、従来の搬送装置の概略図
。 １……カセツト、３……ガイド軸、４……リニ
アガイド、５……ステージ、６……ボールネジ、
７……ボールネジナツト、１０……モーター、２
１ａ……磁石、２１ｂ……磁石、２２……非磁性
シール。

Claims (1)

    【実用新案登録請求の範囲】
  1. 容器内部の特定雰囲気中に置かれた移動部と大
    気中の駆動部を非磁性シールを介して磁気的に結
    合したことを特徴とする搬送装置。
JP11990290U 1990-11-16 1990-11-16 Pending JPH0477524U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11990290U JPH0477524U (ja) 1990-11-16 1990-11-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11990290U JPH0477524U (ja) 1990-11-16 1990-11-16

Publications (1)

Publication Number Publication Date
JPH0477524U true JPH0477524U (ja) 1992-07-07

Family

ID=31867832

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11990290U Pending JPH0477524U (ja) 1990-11-16 1990-11-16

Country Status (1)

Country Link
JP (1) JPH0477524U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021116175A (ja) * 2020-01-28 2021-08-10 Ｊｆｅアドバンテック株式会社 移動停止機構およびその移動停止機構を備えた移動装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021116175A (ja) * 2020-01-28 2021-08-10 Ｊｆｅアドバンテック株式会社 移動停止機構およびその移動停止機構を備えた移動装置

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