JPH0474423U - - Google Patents

Info

Publication number
JPH0474423U
JPH0474423U JP11839090U JP11839090U JPH0474423U JP H0474423 U JPH0474423 U JP H0474423U JP 11839090 U JP11839090 U JP 11839090U JP 11839090 U JP11839090 U JP 11839090U JP H0474423 U JPH0474423 U JP H0474423U
Authority
JP
Japan
Prior art keywords
chamber
heater
gas
introduction means
gas introduction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11839090U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11839090U priority Critical patent/JPH0474423U/ja
Publication of JPH0474423U publication Critical patent/JPH0474423U/ja
Pending legal-status Critical Current

Links

JP11839090U 1990-11-08 1990-11-08 Pending JPH0474423U (US20030199744A1-20031023-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11839090U JPH0474423U (US20030199744A1-20031023-C00003.png) 1990-11-08 1990-11-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11839090U JPH0474423U (US20030199744A1-20031023-C00003.png) 1990-11-08 1990-11-08

Publications (1)

Publication Number Publication Date
JPH0474423U true JPH0474423U (US20030199744A1-20031023-C00003.png) 1992-06-30

Family

ID=31866306

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11839090U Pending JPH0474423U (US20030199744A1-20031023-C00003.png) 1990-11-08 1990-11-08

Country Status (1)

Country Link
JP (1) JPH0474423U (US20030199744A1-20031023-C00003.png)

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