JPH0473861U - - Google Patents

Info

Publication number

JPH0473861U

JPH0473861U JP11705690U JP11705690U JPH0473861U JP H0473861 U JPH0473861 U JP H0473861U JP 11705690 U JP11705690 U JP 11705690U JP 11705690 U JP11705690 U JP 11705690U JP H0473861 U JPH0473861 U JP H0473861U

Authority

JP

Japan

Prior art keywords

support substrate

gas detection

detection element

substrate

hereinafter referred

Prior art date

1990-11-06

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000001514 detection method Methods 0.000 claims description 5
• 239000000758 substrate Substances 0.000 claims description 5
• 229910000510 noble metal Inorganic materials 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 2
• 239000004065 semiconductor Substances 0.000 description 2
• 238000009434 installation Methods 0.000 description 1
• NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
• 239000010409 thin film Substances 0.000 description 1