JPH04737U - - Google Patents

Info

Publication number
JPH04737U
JPH04737U JP4007490U JP4007490U JPH04737U JP H04737 U JPH04737 U JP H04737U JP 4007490 U JP4007490 U JP 4007490U JP 4007490 U JP4007490 U JP 4007490U JP H04737 U JPH04737 U JP H04737U
Authority
JP
Japan
Prior art keywords
etching
sample mounting
electrode
sample
rotation shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4007490U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4007490U priority Critical patent/JPH04737U/ja
Publication of JPH04737U publication Critical patent/JPH04737U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP4007490U 1990-04-13 1990-04-13 Pending JPH04737U (US20100268047A1-20101021-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4007490U JPH04737U (US20100268047A1-20101021-C00003.png) 1990-04-13 1990-04-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4007490U JPH04737U (US20100268047A1-20101021-C00003.png) 1990-04-13 1990-04-13

Publications (1)

Publication Number Publication Date
JPH04737U true JPH04737U (US20100268047A1-20101021-C00003.png) 1992-01-07

Family

ID=31549547

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4007490U Pending JPH04737U (US20100268047A1-20101021-C00003.png) 1990-04-13 1990-04-13

Country Status (1)

Country Link
JP (1) JPH04737U (US20100268047A1-20101021-C00003.png)

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