JPH0469767U - - Google Patents
Info
- Publication number
- JPH0469767U JPH0469767U JP11186190U JP11186190U JPH0469767U JP H0469767 U JPH0469767 U JP H0469767U JP 11186190 U JP11186190 U JP 11186190U JP 11186190 U JP11186190 U JP 11186190U JP H0469767 U JPH0469767 U JP H0469767U
- Authority
- JP
- Japan
- Prior art keywords
- probe
- contact pressure
- probed
- pressure sensing
- support shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 claims description 23
Landscapes
- Measuring Leads Or Probes (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11186190U JPH0469767U (h) | 1990-10-25 | 1990-10-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11186190U JPH0469767U (h) | 1990-10-25 | 1990-10-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0469767U true JPH0469767U (h) | 1992-06-19 |
Family
ID=31859344
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11186190U Pending JPH0469767U (h) | 1990-10-25 | 1990-10-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0469767U (h) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06102302A (ja) * | 1992-09-18 | 1994-04-15 | Fujitsu Ltd | 薄膜基板の試験装置 |
-
1990
- 1990-10-25 JP JP11186190U patent/JPH0469767U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06102302A (ja) * | 1992-09-18 | 1994-04-15 | Fujitsu Ltd | 薄膜基板の試験装置 |
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