JPH0469464U - - Google Patents

Info

Publication number
JPH0469464U
JPH0469464U JP11040990U JP11040990U JPH0469464U JP H0469464 U JPH0469464 U JP H0469464U JP 11040990 U JP11040990 U JP 11040990U JP 11040990 U JP11040990 U JP 11040990U JP H0469464 U JPH0469464 U JP H0469464U
Authority
JP
Japan
Prior art keywords
wafer
holding piece
placement plate
wafer holding
holding position
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11040990U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11040990U priority Critical patent/JPH0469464U/ja
Publication of JPH0469464U publication Critical patent/JPH0469464U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP11040990U 1990-10-22 1990-10-22 Pending JPH0469464U (US20030199744A1-20031023-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11040990U JPH0469464U (US20030199744A1-20031023-C00003.png) 1990-10-22 1990-10-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11040990U JPH0469464U (US20030199744A1-20031023-C00003.png) 1990-10-22 1990-10-22

Publications (1)

Publication Number Publication Date
JPH0469464U true JPH0469464U (US20030199744A1-20031023-C00003.png) 1992-06-19

Family

ID=31857744

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11040990U Pending JPH0469464U (US20030199744A1-20031023-C00003.png) 1990-10-22 1990-10-22

Country Status (1)

Country Link
JP (1) JPH0469464U (US20030199744A1-20031023-C00003.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000343475A (ja) * 1999-04-01 2000-12-12 Applied Materials Inc ウェーハハンドリングロボット用の空気圧作動式撓みグリッパ
KR101068704B1 (ko) * 2008-01-24 2011-09-28 가부시키가이샤 야스카와덴키 기판 파지 장치 및 그것을 구비한 기판 반송 로봇, 반도체 제조 장치

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0243130A (ja) * 1988-08-02 1990-02-13 Toshiba Ceramics Co Ltd 搬送装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0243130A (ja) * 1988-08-02 1990-02-13 Toshiba Ceramics Co Ltd 搬送装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000343475A (ja) * 1999-04-01 2000-12-12 Applied Materials Inc ウェーハハンドリングロボット用の空気圧作動式撓みグリッパ
KR101068704B1 (ko) * 2008-01-24 2011-09-28 가부시키가이샤 야스카와덴키 기판 파지 장치 및 그것을 구비한 기판 반송 로봇, 반도체 제조 장치

Similar Documents

Publication Publication Date Title
JPH0469464U (US20030199744A1-20031023-C00003.png)
JPH0282435U (US20030199744A1-20031023-C00003.png)
JPH0412335U (US20030199744A1-20031023-C00003.png)
JPH03106305U (US20030199744A1-20031023-C00003.png)
JPS61166727U (US20030199744A1-20031023-C00003.png)
JPH0259088U (US20030199744A1-20031023-C00003.png)
JPH0449125U (US20030199744A1-20031023-C00003.png)
JPH0181259U (US20030199744A1-20031023-C00003.png)
JPS6437043U (US20030199744A1-20031023-C00003.png)
JPH0193736U (US20030199744A1-20031023-C00003.png)
JPS6263230U (US20030199744A1-20031023-C00003.png)
JPH0379158U (US20030199744A1-20031023-C00003.png)
JPS636708U (US20030199744A1-20031023-C00003.png)
JPS61191831U (US20030199744A1-20031023-C00003.png)
JPS62201433U (US20030199744A1-20031023-C00003.png)
JPH0311584U (US20030199744A1-20031023-C00003.png)
JPH038501U (US20030199744A1-20031023-C00003.png)
JPS62105724U (US20030199744A1-20031023-C00003.png)
JPS6386952U (US20030199744A1-20031023-C00003.png)
JPS6341322U (US20030199744A1-20031023-C00003.png)
JPS61109675U (US20030199744A1-20031023-C00003.png)
JPS6240794U (US20030199744A1-20031023-C00003.png)
JPH02114937U (US20030199744A1-20031023-C00003.png)
JPS63156709U (US20030199744A1-20031023-C00003.png)
JPH0370831U (US20030199744A1-20031023-C00003.png)