JPH0469461U - - Google Patents

Info

Publication number
JPH0469461U
JPH0469461U JP11173990U JP11173990U JPH0469461U JP H0469461 U JPH0469461 U JP H0469461U JP 11173990 U JP11173990 U JP 11173990U JP 11173990 U JP11173990 U JP 11173990U JP H0469461 U JPH0469461 U JP H0469461U
Authority
JP
Japan
Prior art keywords
magnetic material
target
electrode part
composite
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11173990U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11173990U priority Critical patent/JPH0469461U/ja
Publication of JPH0469461U publication Critical patent/JPH0469461U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
JP11173990U 1990-10-25 1990-10-25 Pending JPH0469461U (US08188275-20120529-C00054.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11173990U JPH0469461U (US08188275-20120529-C00054.png) 1990-10-25 1990-10-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11173990U JPH0469461U (US08188275-20120529-C00054.png) 1990-10-25 1990-10-25

Publications (1)

Publication Number Publication Date
JPH0469461U true JPH0469461U (US08188275-20120529-C00054.png) 1992-06-19

Family

ID=31859210

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11173990U Pending JPH0469461U (US08188275-20120529-C00054.png) 1990-10-25 1990-10-25

Country Status (1)

Country Link
JP (1) JPH0469461U (US08188275-20120529-C00054.png)

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