JPH0466400U - - Google Patents

Info

Publication number

JPH0466400U

JPH0466400U JP11006290U JP11006290U JPH0466400U JP H0466400 U JPH0466400 U JP H0466400U JP 11006290 U JP11006290 U JP 11006290U JP 11006290 U JP11006290 U JP 11006290U JP H0466400 U JPH0466400 U JP H0466400U

Authority

JP

Japan

Prior art keywords

cold trap

trap chamber

diffusion pump

oil diffusion

liquid nitrogen

Prior art date

1990-10-19

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 6
• 238000009792 diffusion process Methods 0.000 claims description 5
• 239000007788 liquid Substances 0.000 claims description 3
• 229910052757 nitrogen Inorganic materials 0.000 claims description 3
• 238000004140 cleaning Methods 0.000 claims 2