JPH0463634U - - Google Patents

Info

Publication number

JPH0463634U

JPH0463634U JP10732490U JP10732490U JPH0463634U JP H0463634 U JPH0463634 U JP H0463634U JP 10732490 U JP10732490 U JP 10732490U JP 10732490 U JP10732490 U JP 10732490U JP H0463634 U JPH0463634 U JP H0463634U

Authority

JP

Japan

Prior art keywords

liquid tank

cleaning liquid

replenishment pipe

cleaning

chemical

Prior art date

1990-10-12

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000004140 cleaning Methods 0.000 claims description 7
• 239000007788 liquid Substances 0.000 claims description 7
• 239000000126 substance Substances 0.000 claims 2
• 239000004065 semiconductor Substances 0.000 claims 1
• VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 1
• 235000011114 ammonium hydroxide Nutrition 0.000 description 1
• QOSATHPSBFQAML-UHFFFAOYSA-N hydrogen peroxide;hydrate Chemical compound O.OO QOSATHPSBFQAML-UHFFFAOYSA-N 0.000 description 1
• 238000005406 washing Methods 0.000 description 1