JPH0463121U - - Google Patents

Info

Publication number
JPH0463121U
JPH0463121U JP10422690U JP10422690U JPH0463121U JP H0463121 U JPH0463121 U JP H0463121U JP 10422690 U JP10422690 U JP 10422690U JP 10422690 U JP10422690 U JP 10422690U JP H0463121 U JPH0463121 U JP H0463121U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10422690U
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10422690U priority Critical patent/JPH0463121U/ja
Publication of JPH0463121U publication Critical patent/JPH0463121U/ja
Pending legal-status Critical Current

Links

JP10422690U 1990-10-03 1990-10-03 Pending JPH0463121U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10422690U JPH0463121U (ja) 1990-10-03 1990-10-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10422690U JPH0463121U (ja) 1990-10-03 1990-10-03

Publications (1)

Publication Number Publication Date
JPH0463121U true JPH0463121U (ja) 1992-05-29

Family

ID=31849431

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10422690U Pending JPH0463121U (ja) 1990-10-03 1990-10-03

Country Status (1)

Country Link
JP (1) JPH0463121U (ja)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5961043A (en) * 1982-09-29 1984-04-07 Nec Corp Sample holder for ion implantation
JPS5986147A (en) * 1983-09-28 1984-05-18 Hitachi Ltd Wafer holder
JPS5952626B2 (ja) * 1977-09-12 1984-12-20 Matsushita Electric Ind Co Ltd

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5952626B2 (ja) * 1977-09-12 1984-12-20 Matsushita Electric Ind Co Ltd
JPS5961043A (en) * 1982-09-29 1984-04-07 Nec Corp Sample holder for ion implantation
JPS5986147A (en) * 1983-09-28 1984-05-18 Hitachi Ltd Wafer holder

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