JPH0463120U - - Google Patents
Info
- Publication number
- JPH0463120U JPH0463120U JP10505390U JP10505390U JPH0463120U JP H0463120 U JPH0463120 U JP H0463120U JP 10505390 U JP10505390 U JP 10505390U JP 10505390 U JP10505390 U JP 10505390U JP H0463120 U JPH0463120 U JP H0463120U
- Authority
- JP
- Japan
- Prior art keywords
- heat treatment
- pillars
- treatment unit
- exhausted
- pillar
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 2
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10505390U JPH0463120U (en:Method) | 1990-10-04 | 1990-10-04 | |
| US07/767,588 US5201653A (en) | 1990-10-02 | 1991-09-30 | Substrate heat-treating apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10505390U JPH0463120U (en:Method) | 1990-10-04 | 1990-10-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0463120U true JPH0463120U (en:Method) | 1992-05-29 |
Family
ID=31850592
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10505390U Pending JPH0463120U (en:Method) | 1990-10-02 | 1990-10-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0463120U (en:Method) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02196414A (ja) * | 1989-01-25 | 1990-08-03 | Fujitsu Ltd | レジスト処理装置 |
-
1990
- 1990-10-04 JP JP10505390U patent/JPH0463120U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02196414A (ja) * | 1989-01-25 | 1990-08-03 | Fujitsu Ltd | レジスト処理装置 |