JPH0461508B2 - - Google Patents
Info
- Publication number
- JPH0461508B2 JPH0461508B2 JP62095801A JP9580187A JPH0461508B2 JP H0461508 B2 JPH0461508 B2 JP H0461508B2 JP 62095801 A JP62095801 A JP 62095801A JP 9580187 A JP9580187 A JP 9580187A JP H0461508 B2 JPH0461508 B2 JP H0461508B2
- Authority
- JP
- Japan
- Prior art keywords
- mesa
- semiconductor layer
- layer
- type
- semiconductor substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 claims description 67
- 239000000758 substrate Substances 0.000 claims description 20
- 239000012535 impurity Substances 0.000 claims description 9
- 150000004767 nitrides Chemical class 0.000 description 7
- 238000005530 etching Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 229910004298 SiO 2 Inorganic materials 0.000 description 5
- 230000015556 catabolic process Effects 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 239000011347 resin Substances 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 230000006641 stabilisation Effects 0.000 description 2
- 238000011105 stabilization Methods 0.000 description 2
- 230000000087 stabilizing effect Effects 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 239000008188 pellet Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
Landscapes
- Solid State Image Pick-Up Elements (AREA)
- Element Separation (AREA)
- Light Receiving Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62095801A JPS62282470A (ja) | 1987-04-17 | 1987-04-17 | メサ形半導体装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62095801A JPS62282470A (ja) | 1987-04-17 | 1987-04-17 | メサ形半導体装置 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5217377A Division JPS53137688A (en) | 1977-05-07 | 1977-05-07 | Semiconductor device of mesa type |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62282470A JPS62282470A (ja) | 1987-12-08 |
| JPH0461508B2 true JPH0461508B2 (enrdf_load_stackoverflow) | 1992-10-01 |
Family
ID=14147535
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62095801A Granted JPS62282470A (ja) | 1987-04-17 | 1987-04-17 | メサ形半導体装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62282470A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7163858B2 (ja) * | 2019-04-18 | 2022-11-01 | 日本電信電話株式会社 | 受光装置 |
-
1987
- 1987-04-17 JP JP62095801A patent/JPS62282470A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62282470A (ja) | 1987-12-08 |
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