JPH0460548U - - Google Patents

Info

Publication number
JPH0460548U
JPH0460548U JP10110890U JP10110890U JPH0460548U JP H0460548 U JPH0460548 U JP H0460548U JP 10110890 U JP10110890 U JP 10110890U JP 10110890 U JP10110890 U JP 10110890U JP H0460548 U JPH0460548 U JP H0460548U
Authority
JP
Japan
Prior art keywords
substrate
film forming
heating device
cooling
forming apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10110890U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10110890U priority Critical patent/JPH0460548U/ja
Publication of JPH0460548U publication Critical patent/JPH0460548U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
JP10110890U 1990-09-26 1990-09-26 Pending JPH0460548U (US06826419-20041130-M00005.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10110890U JPH0460548U (US06826419-20041130-M00005.png) 1990-09-26 1990-09-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10110890U JPH0460548U (US06826419-20041130-M00005.png) 1990-09-26 1990-09-26

Publications (1)

Publication Number Publication Date
JPH0460548U true JPH0460548U (US06826419-20041130-M00005.png) 1992-05-25

Family

ID=31844282

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10110890U Pending JPH0460548U (US06826419-20041130-M00005.png) 1990-09-26 1990-09-26

Country Status (1)

Country Link
JP (1) JPH0460548U (US06826419-20041130-M00005.png)

Similar Documents

Publication Publication Date Title
JPH0460548U (US06826419-20041130-M00005.png)
JPH01110429U (US06826419-20041130-M00005.png)
JPS63162558U (US06826419-20041130-M00005.png)
JPS6319565U (US06826419-20041130-M00005.png)
JPH0378062U (US06826419-20041130-M00005.png)
JPH0433651U (US06826419-20041130-M00005.png)
JPH0460539U (US06826419-20041130-M00005.png)
JPH0397993U (US06826419-20041130-M00005.png)
JPH0430076U (US06826419-20041130-M00005.png)
JPH0230947U (US06826419-20041130-M00005.png)
JPS6315476U (US06826419-20041130-M00005.png)
JPH0465355U (US06826419-20041130-M00005.png)
JPS63164220U (US06826419-20041130-M00005.png)
JPS63188604U (US06826419-20041130-M00005.png)
JPH01110428U (US06826419-20041130-M00005.png)
JPS63183265U (US06826419-20041130-M00005.png)
JPS61132863U (US06826419-20041130-M00005.png)
JPS6418730U (US06826419-20041130-M00005.png)
JPH0430969U (US06826419-20041130-M00005.png)
JPH0429712U (US06826419-20041130-M00005.png)
JPS60128364U (ja) 加熱定着装置
JPH01151901U (US06826419-20041130-M00005.png)
JPH0220324U (US06826419-20041130-M00005.png)
JPS6290138U (US06826419-20041130-M00005.png)
JPS6422026U (US06826419-20041130-M00005.png)