JPH0459133U - - Google Patents
Info
- Publication number
- JPH0459133U JPH0459133U JP10063590U JP10063590U JPH0459133U JP H0459133 U JPH0459133 U JP H0459133U JP 10063590 U JP10063590 U JP 10063590U JP 10063590 U JP10063590 U JP 10063590U JP H0459133 U JPH0459133 U JP H0459133U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- hot plate
- support plate
- plate
- lifting arm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 12
- 238000010438 heat treatment Methods 0.000 claims description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10063590U JP2523691Y2 (ja) | 1990-09-25 | 1990-09-25 | 基板加熱装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10063590U JP2523691Y2 (ja) | 1990-09-25 | 1990-09-25 | 基板加熱装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0459133U true JPH0459133U (cs) | 1992-05-21 |
| JP2523691Y2 JP2523691Y2 (ja) | 1997-01-29 |
Family
ID=31843422
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10063590U Expired - Lifetime JP2523691Y2 (ja) | 1990-09-25 | 1990-09-25 | 基板加熱装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2523691Y2 (cs) |
-
1990
- 1990-09-25 JP JP10063590U patent/JP2523691Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JP2523691Y2 (ja) | 1997-01-29 |