JPH0456765U - - Google Patents
Info
- Publication number
- JPH0456765U JPH0456765U JP10058190U JP10058190U JPH0456765U JP H0456765 U JPH0456765 U JP H0456765U JP 10058190 U JP10058190 U JP 10058190U JP 10058190 U JP10058190 U JP 10058190U JP H0456765 U JPH0456765 U JP H0456765U
- Authority
- JP
- Japan
- Prior art keywords
- pulling shaft
- tool
- crystal
- center
- guide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000013078 crystal Substances 0.000 claims description 9
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 3
- 238000001816 cooling Methods 0.000 claims description 3
- 238000000034 method Methods 0.000 claims description 2
- 239000002994 raw material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000007664 blowing Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Description
第１図は本考案による育成結晶冷却用具の一実
施例の構成図、第２図は従来装置を説明する図で
ある。
１……単結晶育成炉、２……るつぼ、３……高
周波加熱コイル、４……融液、５……種結晶、６
……ガス吹付口、７……ガイド、８……引上軸シ
ヤフト、９……アルミナ管、１０……連結具、１
１……締結具、１２……ネジ、１３……連結穴、
１４……穴。
FIG. 1 is a block diagram of an embodiment of a growing crystal cooling device according to the present invention, and FIG. 2 is a diagram illustrating a conventional device. 1... Single crystal growth furnace, 2... Crucible, 3... High frequency heating coil, 4... Melt, 5... Seed crystal, 6
... Gas blowing port, 7 ... Guide, 8 ... Pulling shaft, 9 ... Alumina pipe, 10 ... Connector, 1
1... Fastener, 12... Screw, 13... Connection hole,
14...hole.
補正 平３．９．６
実用新案登録請求の範囲を次のように補正する
。Amendment 3/9/6 The scope of claims for utility model registration is amended as follows.
【実用新案登録請求の範囲】
引上げ法により単結晶を製造する場合の用具で
あつて、引上軸はガイドの中心穴に挿通し、前記
引上軸の側面に設けた連通穴を介して中心に貫通
する穴と連結し、前記引上軸の下部では種結晶を
固定したアルミナ管と接続したことを特徴とした
育成結晶冷却用具。[Claims for Utility Model Registration] A tool for producing a single crystal by a pulling method , in which a pulling shaft is inserted into a center hole of a guide, and a center A growing crystal cooling tool, characterized in that the lower part of the pulling shaft is connected to an alumina tube to which a seed crystal is fixed.
Claims (1)
晶を製造する場合の用具であつて、引上軸はガイ
ドの中心穴に挿通し、前記引上軸の側面に設けた
連通穴を介して中心に貫通する穴と連結し、前記
引上軸の下部では種結晶を固定したアルミナ管と
接続したことを特徴とした育成結晶冷却用具。 This is a tool for producing a single crystal from a raw material melt by the Czyochralski method, in which the pulling shaft is inserted into the center hole of the guide, and the center A growing crystal cooling tool, characterized in that the lower part of the pulling shaft is connected to an alumina tube to which a seed crystal is fixed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990100581U JPH0647015Y2 (en) | 1990-09-26 | 1990-09-26 | Growth crystal cooling tool |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990100581U JPH0647015Y2 (en) | 1990-09-26 | 1990-09-26 | Growth crystal cooling tool |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0456765U true JPH0456765U (en) | 1992-05-15 |
| JPH0647015Y2 JPH0647015Y2 (en) | 1994-11-30 |
Family
ID=31843343
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990100581U Expired - Lifetime JPH0647015Y2 (en) | 1990-09-26 | 1990-09-26 | Growth crystal cooling tool |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0647015Y2 (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS538374A (en) * | 1976-07-12 | 1978-01-25 | Hitachi Ltd | Growing method for single crystal of semiconductor |
-
1990
- 1990-09-26 JP JP1990100581U patent/JPH0647015Y2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS538374A (en) * | 1976-07-12 | 1978-01-25 | Hitachi Ltd | Growing method for single crystal of semiconductor |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0647015Y2 (en) | 1994-11-30 |
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